Transcript Tim Volin(Parker Hannifin)

NA Facilities and Gases Committees
Liaison Report
Updated January 26, 2012
Gases Co-chair
Tim Volin - Parker Hannifin
Facilities Co-chairs
Steve Lewis - CH2M Hill
Phil Naughton - Applied
Materials
Gases Committee
C: Tim Volin – Parker Hannifin
Components SC
Mohamed Saleem – Fujikin
Materials & Process SC
Tim Volin – Parker Hann.
Mass Flow TF
Mohamed Saleem - Fujikin
John Savadkouhi – Brooks
Instrument
Materials of
Construction Gas Delivery
Systems TF
Tim Volin – Parker Hann.
Pressure Measurement TF
Justin Hough – AMAT
David Colquhoun – BriskHeat
Heater Jacket TF
David Colquhoun – BriskHeat
Contamination SC
Tim Volin – Parker Hann.
Filters & Purifiers TF
Mohamed Saleem – Fujikin
Gas Specifications TF
Mark Ripkowski – CONSCI
Facilities Committee
C: Phil Naughton – Applied Materials
C: Steve Lewis – CH2M Hill
F47 (Voltage Sag) Revision TF
Uwe Haller – Applied Materials
Phil Sarikas – Intel
Todd Steudtner – TI
Alex McEachern - PSL
F51 (Elastomer) Revision TF
Dalia Vernikovsky - Applied Seals
Building Information Modeling (BIM)
for Semiconductor Capital
Equipment TF
Ben Bruce – Applied Materials
Meeting Information
• Last meeting
– Tuesday, October 25, 2011, NA Fall Standards
Meeting
• SEMI HQ in San Jose, CA
• Next meeting
– Tuesday, April 3, 2012, NA Spring Standards
Meeting
• SEMI HQ in San Jose, CA
• www.semi.org/standards for the latest update
Ballot Results Summary
•
Ballot Passed Technical Committee Review [1]
– Doc. 4737D, New Standard: Guide For Guide For Heater Systems
Requirements – To be published as SEMI F109-0212
– Doc. 5243, Reapproval of SEMI F53-0307, Test Method for
Evaluating the Electromagnetic Susceptibility of Thermal Mass Flow
Controllers
– Doc. 5244, Reapproval of SEMI F21-1102, Classification of Airborne
Molecular Contaminant Levels in Clean Environments – failed ISC
review due to changing “shall” to “may” on editorial change
– Doc. 5245, Reapproval of SEMI F55-0600 (Reapproved 0307), Test
Method for Determining the Corrosion Resistance of Mass Flow
Controllers
– Doc. 5246, Reapproval of SEMI F56-0600 (Reapproved 0307), Test
Method for Determining Steady-State Supply Voltage Effects for Mass
Flow Controllers
Ballot Passed Technical Committee Review [2]
– Doc. 5217A, Revision of SEMI C9.1-93 (Reapproved 1102), Guide for
Analysis of Uncertainties in Gravimetrically Prepared Gas Mixtures
– Doc. 5218A, Revision of SEMI C15-95 (Reapproved 1102), Test
Method for ppm and ppb Humidity Standards
– Doc. 5247, Withdrawal of SEMI C3.26-0301, Specification for
Tungsten Hexafluoride (WF6) In Cylinders, 99.8% Quality
– Doc. 5248, Withdrawal of SEMI C3.33-92 (Reapproved 0303),
Standard for Boron Trichloride (BCl3) (Provisional)
– Doc. 5249, Withdrawal of SEMI C3.51-1101, Specification for Boron
Trichloride (BCl3), 99.98% Quality
– Doc. 5250, Withdrawal of SEMI C3.52-0200, Standard for Tungsten
Hexafluoride, 99.996% Quality
Ballot Failed Technical Committee
Review
– Doc. 4785A, Revision of SEMI F22-1102, Guide
for Gas Distribution Systems
Upcoming Ballots [1/2]
•
Technical Ballot for Cycle 1 and 2, 2012
• Doc. 4785A, Revision of SEMI F22-1102 Guide for Gas
Distribution Systems
• Reapproval of SEMI F47-0706 Specification for
Semiconductor Processing Equipment Voltage SAG
Immunity
• Reapproval of SEMI F6-92 Guide For Secondary
Containment Of Hazardous Gas Piping Systems
• Reapproval of SEMI F13-1101 Guide For Gas Source
Control Equipment
• Reapproval of SEMI F14-93 (Reapproved 0699) Guide
For The Design Of Gas Source Equipment Enclosures
Upcoming Ballots [2/2]
– Reapproval of SEMI C3-0699, Specifications For Gases
– Reapproval of SEMI F23-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Flammable Specialty Gases
– Reapproval of SEMI F24-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Inert Specialty Gases
– Reapproval of SEMI F25-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Oxidant Specialty Gases
– Reapproval of SEMI F26-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Toxic Specialty Gases
Gas Specification TF [1/2]
• Gas Specification TF/ Mark Ripkowski (CONSCI)
• Balloted 5 year revisions/withrawals of Gas standards.
All passed
• Doc. 5217A Revision of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of
Uncertainties in Gravimetrically Prepared Gas Mixtures
• Doc. 5218A Revision of SEMI C15-95 (Reapproved 1102), Test Method for ppm
and ppb Humidity Standards
• Doc. 5247 Withdrawal of SEMI C3.26-0301 Specification For Tungsten
Hexafluoride (Wf6) In Cylinders, 99.8% Quality
• Doc. 5250 Withdrawal of SEMI C3.52-0200 Standard For Tungsten Hexafluoride,
99.996% Quality
• Doc. 5248 Withdrawal of SEMI C3.33-92 (Reapproved 0303) Standard For Boron
Trichloride (BCl3) (Provisional)
• Doc. 5249 Withdrawal of SEMI C3.51-1101 Specification For Boron Trichloride
(BCl3), 99.98% Quality
Gas Specification TF [2/2]
• Gas Specification TF/ Mark Ripkowski (CONSCI)
• Submitted 5 year reapproval for following Gas standards
for cycle 1- 2012 ballots.
• Reapproval of SEMI C3-0699, Specifications For Gases
• Reapproval of SEMI F23-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Flammable Specialty Gases
• Reapproval of SEMI F24-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Inert Specialty Gases
• Reapproval of SEMI F25-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Oxidant Specialty Gases
• Reapproval of SEMI F26-0697 (Reapproved 0303), Particle
Specification For Grade 10/0.2 Toxic Specialty Gases
Components Subcommittee
• Mass Flow TF/Mohamed Saleem (Fujikin)
– Balloted 5 year approvals of Mass Flow Controller
standards. All passed
• Doc. 5243 Reapproval of SEMI F53-0307 Test Method
for Evaluating the Electromagnetic Susceptibility of
Thermal MFC
• Doc. 5245 Reapproval of SEMI F55-0307 Test Method
for Determining Corrosion Resistance of MFC
• Doc. 5246 Reapproval of SEMI F56-0307 Test Method
for Determining Steady-State Supply Voltage Effects for
MFC
– TF is investigating on updating Ethernet Protocol
standards for MFCs
Components Subcommittee
• Pressure Measurement TF/Justin
Hough (Applied Materials)
– New co-leader – David Colquhoun (BriskHeat)
– Drafting doc. 3440B, New Standard: Test Method
For Pressure Transducers In Gas Delivery Systems
– TF is now active
– Meeting biweekly on teleconference
Contamination Subcommittee
• Filters & Purifiers TF/Mohamed Saleem
(Fujikin)
– Five year reapproval ballot passed review at NA Fall
meeting
• Doc. 5244 Reapproval of SEMI F21-1102 Classification of Airborne
Molecular Contaminant Levels in Clean Environments
– Ballot failed ISC A&R review due to changing “shall” to “may”
on editorial change
– TF will add Dimensional specification for Sandwich filters when SEMI
F36, Guide for Dimensions and Connections of Gas Distribution
Components is up for 5 year review
Materials & Processes Subc
• Materials of Construction Gas Delivery
Systems TF/ Tim Volin(Parker Hannifin)
– Doc. 4785A, Revision of F22-1102 Guide For Gas
Distribution Systems
• Failed review and reballoted in cycle 1
– TF will submit following standards 5 year reapproval
• Reapproval of SEMI F6-92 Guide For Secondary
Containment Of Hazardous Gas Piping Systems
• Reapproval of SEMI F13-1101 Guide For Gas Source
Control Equipment
• Reapproval of SEMI F14-93 (Reapproved 0699) Guide For
The Design Of Gas Source Equipment Enclosures
Materials & Processes Subc
• Heater Jacket TF/David Colquhoun
(BriskHeat)
– Doc. 4737D, Guide For Heater Systems
Requirements
• Ballot passed committee review and to be published as
SEMI F109-0212
– The TF will start working on a different standard
• New Guide for Material with Temperature Range
• SNARF is to be submitted
Facilities Committee
• SEMI F47 Revision Task Force/Alex
McEachern (PSL)
– F47 is up for 5 year review.
– F47 requires that tools be immune to voltage sags
that commonly occur on AC power grids.
– Draft doc. 5079, Reapproval of SEMI F47-0706 Specification for Semiconductor Processing
Equipment Voltage SAG Immunity
• Doc was sent for ballot in cycle 1-2012
Facilities Committee [2]
• SEMI F51 Revision Task Force/Dalia
Vernikovsky (Applied Seals NA)
– F51 is up for 5 year review
– Drafting doc. 5080, Revision of SEMI F51-0200 Guide for Elastometric Sealing Technology
• A review of possibilities to ‘assign’ a code of possible
levels of acceptance of what o-rings can be suited for
( a rating system ) was proposed
• Meeting monthly
• End user is encouraged to participate
Facilities Committee [3]
• Building Information Modeling (BIM) for
Semiconductor Capital Equipment TF/Ben
Bruce (Applied Materials)
– A 3-D model will work with multiple different software
applications and needs to reflect true dimensions of the
semiconductor fabrication tool with its location and
interface point.
– Drafting doc. 5155, Guide for Building Information
Modeling (BIM) for Semiconductor Capital Equipment
– Next meeting will be at NA Spring 2012
• Minutes posted on https://sites.google.com/a/semi.org/bim-tf/
Contact
• For more information, please contact
– Kevin Nguyen at [email protected]