Transcript Mass Flow TF/Mohamed Saleem (Fujikin)

NA Facilities and Gases Committees
Liaison Report
Updated August 24, 2011
Gases Co-chair
Tim Volin - Parker Hannifin
Facilities Co-chairs
Steve Lewis - CH2M Hill
Phil Naughton - Applied
Materials
Gases Committee
C: Tim Volin – Parker Hannifin
Components SC
Mohamed Saleem – Fujikin
Mass Flow TF
Mohamed Saleem - Fujikin
John Savadkouhi – Brooks
Instrument
Pressure Measurement TF
Justin Hough - AMAT
Contamination SC
Tim Volin – Parker Hann.
Filters & Purifiers TF
Mohamed Saleem – Fujikin
Materials & Process SC
Tim Volin – Parker Hann.
Materials of
Construction Gas Delivery
Systems TF
Tim Volin – Parker Hann.
Heater Jacket TF
David Colquhoun – BriskHeat
Facilities Committee
C: Phil Naughton – Applied Materials
C: Steve Lewis – CH2M Hill
F47 (Voltage Sag) Revision TF
Ken Kapur – KLA Tencor
Uwe Haller – Applied Materials
Phil Sarikas – Intel
Todd Steudtner – TI
Alex McEachern - PSL
F51 (Elastomer) Revision TF
Dalia Vernikovsky - Applied Seals
Building Information Modeling (BIM)
for Semiconductor Capital
Equipment TF (New)
Ben Bruce – Applied Materials
Meeting Information
• Last meeting
– Tuesday, July 12, 2011, SEMICON West
• San Francisco Marriott Marquis, CA
• Next meeting
– Tuesday, October 25, 2011, NA Fall Standards
Meeting
• SEMI HQ in San Jose, CA
• www.semi.org/standards for the latest update
Ballot Results Summary
•
Ballot Passed Technical Committee Review [1]
– Doc. 5202 Reapproval of SEMI F98-0305, Guide for Treatment of Reuse Water In
Semiconductor Processing
– Doc. 5203 Revision of SEMI E17-0600 (Reapproved 0307), with title change to: Guide
for Mass Flow Controller Transient Characteristics Tests
– Doc. 5206 Revision of SEMI C3.39-0304, with title change to: Specification for
Nitrogen Trifluoride (NF3), 99.98% Quality
– Doc. 5207 Revision of SEMI C3.40-1000, with title change to: Specification for Carbon
Tetrafluoride (CF4), 99.997% Quality
– Doc. 5208 Revision of SEMI C3.47-1101, Specification for Hydrogen Bromide (HBr),
99.98% Quality
– Doc. 5209 Withdrawal of SEMI C3.54-0200E, Gas Purity Guideline for Silane
– Doc. 5211 Revision of SEMI C3.58-0303, with title change to: Specification for
Octafluorocyclobutane, C4F8, Electronic Grade in Cylinders, 99.999% Quality
– Doc. 5195 Reapproval of SEMI E137-0705, Guide for Final Assembly, Packaging,
Transportation, Unpacking, and Relocation of Semiconductor Manufacturing
Equipment
Ballot Passed Technical Committee Review [2]
– Doc. 5196 Reapproval of SEMI E49-1104, Guide for High Purity and Ultrahigh Purity
Piping Performance, Subassemblies, and Final Assemblies
– Doc. 5197 Reapproval of SEMI E49.6-1103, Guide for Subsystem Assembly and Testing
Procedures - Stainless Steel System
– Doc. 5198 Reapproval of E49.8-1103, Guide for High Purity and Ultrahigh Purity Gas
Distribution Systems in Semiconductor Manufacturing Equipment
– Doc. 5199 Reapproval of SEMI F101-1105, Test Methods for Determining Pressure
Regulator Performance In Gas Distribution Systems
– Doc. 5200 Reapproval of SEMI F62-0701 (Reapproved 0307), Test Method for
Determining Mass Flow Controller Performance Characterisitics from Ambient and Gas
Temperature Effects
– Doc. 5201 Reapproval of SEMI F64-0701 (Reapproved 0307), Test Method for
Determining Pressure Effects on Indicated and Actual Flow for Mass Flow Controllers
– Doc. 4678C Revision of SEMI E67-0304, Test Method for Determining Reliability of
Mass Flow Controller
Ballot Passed Technical Committee Review
[3]
– Doc. 4658 Reapproval of SEMI C3.27-1102, Specification for Boron Trifluoride
(BF3) in Cylinders, 99.0% Quality
– Doc. 5210 Revision of SEMI C3.55-0200, with title change to: Specification for
Silane (SiH4), Bulk, 99.994% Quality
– Doc. 5212 Reapproval of SEMI C6.2-93 (Reapproved 1102), Particle
Specification for Grade 20/0.02 Oxygen Delivered as Pipeline Gas
– Doc. 5213 Reapproval of SEMI C6.4-90 (Reapproved 1102), Particle
Specification for Grade 20/0.02 Nitrogen (N2) and Argon (Ar) Delivered as
Pipeline Gas
– Doc. 5214 Reapproval of SEMI C6.5-90 (Reapproved 1102), Particle
Specification for Grade 10/0.2 Nitrogen (N2) and Argon (Ar) Delivered as
Pipeline Gas
– Doc. 5215 Reapproval of SEMI C6.6-90 (Reapproved 1102), Particle
Specification for Grade 10/0.1 Nitrogen (N2) and Argon (Ar) Delivered as
Pipeline Gas
– Doc. 5216 Reapproval of C6.7-93 (Reapproved 1102), Particle Specification
for Grade 10/0.2 Nitrogen in High Pressure Gas Cylinders
– Doc. 5219 Reapproval of C6.3-89 (Reapproved 0303), Particle Specification
for Grade 20/0.2 Hydrogen (H2) Delivered as Pipeline Gas
Ballot Failed Technical Committee
Review
– Doc. 4737C, New Standard: Guide For Heated
Systems Requirements
– Doc. 5217 Reapproval of SEMI C9.1-93
(Reapproved 1102), Guide for Analysis of
Uncertainties in Gravimetrically Prepared Gas
Mixtures
– Doc. 5218 Reapproval of SEMI C15-95
(Reapproved 1102), Test Method for ppm and
ppb Humidity Standards
Upcoming Ballots [1/2]
•
Technical Ballot for Cycle 5 and 6, 2011
– Doc. 4737D New Standard: Guide For Heated Systems
Requirements
– Doc. 5217A Revision of SEMI C9.1-93 (Reapproved 1102),
Guide for Analysis of Uncertainties in Gravimetrically
Prepared Gas Mixtures
– Doc. 5218A Revision of SEMI C15-95 (Reapproved 1102),
Test Method for ppm and ppb Humidity Standards
– Doc. 4785A Revision of F22-1102 Guide For Gas
Distribution Systems
Upcoming Ballots [2/2]
– Doc. 5247 Withdrawal of SEMI C3.26-0301 Specification For Tungsten
Hexafluoride (Wf6) In Cylinders, 99.8% Quality
– Doc. 5250 Withdrawal of SEMI C3.52-0200 Standard For Tungsten
Hexafluoride, 99.996% Quality
– Doc. 5248 Withdrawal of SEMI C3.33-92 (Reapproved 0303) Standard
For Boron Trichloride (BCl3) (Provisional)
– Doc. 5249 Withdrawal of SEMI C3.51-1101 Specification For Boron
Trichloride (BCl3), 99.98% Quality
– Doc. 5244 Reapproval of SEMI F21-1102 Classification of Airborne
Molecular Contaminant Levels in Clean Environments
– Doc. 5243 Reapproval of SEMI F53-0307 Test Method for Evaluating
the Electromagnetic Susceptibility of Thermal MFC
– Doc. 5245 Reapproval of SEMI F55-0307 Test Method for
Determining Corrosion Resistance of MFC
– Doc. 5246 Reapproval of SEMI F56-0307 Test Method for
Determining Steady-State Supply Voltage Effects for MFC
Components Subcommittee
• Mass Flow TF/Mohamed Saleem (Fujikin)
– Balloted 5 year revisions/approvals of Mass Flow
Controller standards for review at NA Fall
meeting
• Doc. 5243 Reapproval of SEMI F53-0307 Test Method
for Evaluating the Electromagnetic Susceptibility of
Thermal MFC
• Doc. 5245 Reapproval of SEMI F55-0307 Test Method
for Determining Corrosion Resistance of MFC
• Doc. 5246 Reapproval of SEMI F56-0307 Test Method
for Determining Steady-State Supply Voltage Effects for
MFC
Gas Specification
• Gas Specification TF/ Mark Ripkowski
(CONSCI)
• Five year review ballots for review at NA Fall meeting
• Doc. 5217A Revision of SEMI C9.1-93 (Reapproved 1102), Guide for Analysis of
Uncertainties in Gravimetrically Prepared Gas Mixtures
• Doc. 5218A Revision of SEMI C15-95 (Reapproved 1102), Test Method for ppm
and ppb Humidity Standards
• Doc. 5247 Withdrawal of SEMI C3.26-0301 Specification For Tungsten
Hexafluoride (Wf6) In Cylinders, 99.8% Quality
• Doc. 5250 Withdrawal of SEMI C3.52-0200 Standard For Tungsten Hexafluoride,
99.996% Quality
• Doc. 5248 Withdrawal of SEMI C3.33-92 (Reapproved 0303) Standard For Boron
Trichloride (BCl3) (Provisional)
• Doc. 5249 Withdrawal of SEMI C3.51-1101 Specification For Boron Trichloride
(BCl3), 99.98% Quality
Components Subcommittee
• Pressure Measurement TF/Justin
Hough (Applied Materials)
– Drafting
• Doc. 3440B, New Standard: Test Method For Pressure
Transducers In Gas Delivery Systems
Contamination Subcommittee
• Filters & Purifiers TF/Mohamed Saleem
(Fujikin)
– Five year reapproval ballot for review at NA Fall
meeting
• Doc. 5244 Reapproval of SEMI F21-1102 Classification
of Airborne Molecular Contaminant Levels in Clean
Environments
Materials & Processes Subc
• Materials of Construction Gas Delivery
Systems TF/ Tim Volin(Parker
Hannifin)
– Five year ballot for review at NA Fall
meeting
• Doc. 4785A, Revision of F22-1102 Guide For
Gas Distribution Systems
– To look into writing a new document for
welding and joining processes currently not
addressed by SEMI Standards
Materials & Processes Subc
• Heater Jacket TF/David Colquhoun
(BriskHeat)
– Demand for higher performance jacketing heater
systems in the semiconductor is needed
• Consistent ways of specifying jacket is required
– Drafting doc. 4737C, Guide For Heated Systems
Requirements
• Failed and returned to TF for rework
• The document was reballoted as 4737D in cycle 5-11
for review at NA Fall meeting.
Facilities Committee
• SEMI F47 Revision Task Force/Alex
McEachern (PSL)
– F47 is up for 5 year review.
– F47 requires that tools be immune to voltage sags
that commonly occur on AC power grids.
– Rewriting doc. 5079, Revision of SEMI F47-0706 Specification for Semiconductor Processing
Equipment Voltage SAG Immunity
Facilities Committee [2]
• SEMI F51 Revision Task Force/Dalia
Vernikovsky (Applied Seals NA)
– F51 is up for 5 year review
– Drafting doc. 5080, Revision of SEMI F51-0200 Guide for Elastometric Sealing Technology
• A review of possibilities to ‘assign’ a code of possible
levels of acceptance of what o-rings can be suited for
( a rating system ) was proposed
• Survey to be distributed. Check www.semi.org/standards
• Meeting monthly
• End user is encouraged to participate
Facilities Committee [3]
• Building Information Modeling (BIM) for
Semiconductor Capital Equipment TF/Ben
Bruce (Applied Materials) (New!)
– A 3-D model will work with multiple different software
applications and needs to reflect true dimensions of the
semiconductor fabrication tool with its location and
interface point.
– Formed to draft doc. 5155, Guide for Building Information
Modeling (BIM) for Semiconductor Capital Equipment
– First kickoff meeting met at SEMICON West
• Minutes posted on https://sites.google.com/a/semi.org/bim-tf/
Contact
• For more information, please contact
– Kevin Nguyen at [email protected]