Transcript NA LChem report April 2012 MTPT

North America Liquid Chemicals
Committee
Liaison Report
April 2012
NA LChem Report - April 2012
Outline
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New TFOFs and SNARFs
Leadership
Organization Chart
Meeting Information
Ballot Results
Upcoming Ballots
Task Force Reports
Upcoming Meeting Schedule
NA SEMI Standards Staff Change
NA LChem Report –April 2012
New TFOFs and SNARFs
• TFOFs
– None.
• SNARFs
– Revision to SEMI F63, Guide for Ultrapure Water
Used in Semiconductor Processing (#5415)
– Revision of SEMI F104-0312, Particle Test Method
Guide for Evaluation of Components Used in
Ultrapure Water and Liquid Chemical Distribution
Systems (#5416)
NA LChem Report - April 2012
Leadership
• Committee Co-chairs
– Frank Flowers / FMC
– Frank Parker / ICL
NA LChem Report - April 2012
Current Committee Structure
NA LChem Report - April 2012
Meeting Information
• Last meeting
– April 03, 2012 @ NA Spring 2012 Meetings
SEMI Headquarters, San Jose, CA
• Next meeting
– July 10, 2012 @ SEMICON West 2012
San Francisco Marriott Marquis Hotel,
San Francisco, CA
NA LChem Report - April 2012
Document Review Summary
Cycle 1-2012 [1/3]
Document #
4543A
Document Title
Revision to SEMI C20-1101, Specification and Guidelines
for Ammonium Fluoride 40%, with title change to:
Specification and Guide for Ammonium Fluoride 40%
Committee
Action
Passed as
balloted
4544C
Revision to SEMI C24-0301, Specification for n-Butyl
Acetate
Failed and
reballoted
4547C
Revision to SEMI C33-0301, Specifications for nMethyl 2-Pyrrolidone
Failed and
reballoted
NA LChem Report - April 2012
Document Review Summary
Cycle 1-2012 [2/3]
Document #
Document Title
Committee Action
5191A
Revision to SEMI C34-0306, Specification and
Guideline for Mixed Acid Etchants, with title change
to: Specification and Guide for Mixed Acid Etchants
Failed and
reballoted
5193
Revision to SEMI C46-0306, Guideline for 25%
Tetramethylammonium Hydroxide, with title change
to: Guide for 25% Tetramethylammonium Hydroxide
Passed as
balloted
Revision of SEMI C26-0306 with title change to:
Specification and Guide for Hexamethyldisilazane
(HMDS)
Failed and
reballoted
5299A
NA LChem Report - April 2012
Document Review Summary
Cycle 1-2012 [3/3]
Document #
Document Title
Committee Action
5354
Revision to SEMI C47-0706, Guideline for Trans 1, 2
Dichloroethylene with title change to: Guide for Trans
1, 2 Dichloroethylene
Passed as
balloted
5355
Revision to SEMI C48-0706, Specification and
Guideline for 1,1,1-Trichloroethane, Furnace Grade
with title change to: Specification and Guide for 1,1,1Trichloroethane, Furnace Grade
Passed as
balloted
5356
Revision to SEMI C51-0706, Specifications and
Guidelines for Xylenes with title change to:
Specifications and Guide for Xylenes
Failed and
reballoted
NA LChem Report - April 2012
Technical Ballots to be reviewed at
SEMICON West 2012
Document #
Document Title
TF / SC
Cycle 3 or Cycle 4, 2012
Analytical
Methods TF
4544D
Revision to SEMI C24-0301, Specification for n-Butyl
Acetate
4547D
Revision to SEMI C33-0301, Specifications for n-Methyl 2- Analytical
Methods TF
Pyrrolidone
5188
New Standard: Guide to Evaluate the Performance of Sub15 nm Filters Used in Ultrapure Water (UPW) Distribution
Systems
NA LChem Report - April 2012
UPW
Filtration
Efficiency
TF
Technical Ballots to be reviewed at
SEMICON West 2012 [continued]
Document #
Document Title
TF / SC
Cycle 3 or Cycle 4, 2012
Analytical
Methods TF
5191B
Revision to SEMI C34-0306, Specification and Guideline
for Mixed Acid Etchants, with title change to: Specification
and Guide for Mixed Acid Etchants
5299B
Analytical
Revision of SEMI C26-0306 with title change to:
Specification and Guide for Hexamethyldisilazane (HMDS) Methods TF
5356A
Revision to SEMI C51-0706, Specifications and Guidelines
for Xylenes with title change to: Specifications and Guide
for Xylenes
NA LChem Report - April 2012
Analytical
Methods TF
Task Force Updates
• Analytical Test Methods TF
– Reviewing documents for 5 year review
• SEMI C27, Specifications and Guidelines for Hydrochloric Acid
• SEMI C31, Specifications and Guide for 4.9% Hydrofluoric Acid
(10:1 v/v)
• SEMI C35, Specifications and Guideline for Nitric Acid
• SEMI C36, Specifications for Phosphoric Acid
• Statistical Methods TF
– Considering to disband at SEMICON West if there is no
further interest on existing TF discussions (e.g., ship-tocontrol)
NA LChem Report - April 2012
Task Force Updates [continued]
• F57 Revision TF
– Ballot 4555A passed technical committee and procedural
reviews and is now published as SEMI F57-0312
– Possible further alignment of F57 with ITRS (International
Technology Roadmap for Semiconductors ) risk factors, to be
discussed at next meeting during SEMICON West 2012
• F104 Revision TF
– Newly approved SNARF # 5416
• Revision of SEMI F104-0312, Particle Test Method Guide for
Evaluation of Components Used in Ultrapure Water and Liquid
Chemical Distribution Systems
NA LChem Report - April 2012
Task Force Updates [continued]
• Polymer Surface Roughness TF
– Continue drafting of ballot 4989
• New Standard: Test Method for Determining Surface Roughness in
Polymer Components Used in Ultrapure Water and Liquid Chemical
Distribution Systems
• UPW Filtration Efficiency TF
– Continuing development of Doc. 5188. Ballot submission
planned for Cycle 4, 2012
• New Standard: Guide for Validation of the Efficiency of Final Filtration
in Ultrapure Water Production Used in Semiconductor Processing
NA LChem Report - April 2012
Task Force Updates [continued]
• F63 Revision TF
– New SNARF # 5415
• Revision to SEMI F63, Guide for Ultrapure Water Used in Semiconductor Processing
• F31, F39, and F41 Rewrite TF
– TFOF revised to include F31
– Will look into the following documents due for 5-Year Review:
• SEMI E49.2, Guideline for the Qualification of Polymer Assemblies Used in Ultrapure
Water and Liquid Chemical Systems in Semiconductor Process Equipment
• SEMI E49.4, Guide for High Purity Solvent Distribution Systems in Semiconductor
Manufacturing Equipment
• SEMI E49.5, Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor
Manufacturing Equipment
• SEMI E49.7, Purity Guide for the Design and Manufacture of Ultrapure Water and Liquid
Chemical Systems in Semiconductor Process Equipment
NA LChem Report - April 2012
Proposed Meeting Schedule at
SEMICON West 2012
• Monday, July 9
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F104 Rewrite TF (1:00 PM to 2:00 PM)
F39, F31& F41 Rewrite TF (2:00 PM to 3:00 PM)
Polymer Surface Roughness TF (3:00 PM to 4:00 PM)
UPW Filtration TF/ F63 TF (4:00 PM to 5:00 PM)
• Tuesday, July 10
– F57 Discussion/ITRS Alignment (8:00 AM to 10:00 AM)
– Analytical Methods TF (10:00 AM to 12 Noon)
– Liquid Chemicals Committee (1:00 PM to 4:00 PM)
NA LChem Report - April 2012
NA Standards Staff Changes
New NA Standards staff:
Michael Tran
[email protected]
Paul Trio
Sr. Manager, NA Standards Operations
Kevin Nguyen
Manager, NA Standards Committees
Michael Tran
Senior Standards Engineer
NA LChem Report - April 2012
Operations
Committees: NARSC / I&C / ATE / EHS / HB-LED / 3DS-IC
Meetings & Events Planning
General Information
STEPS/Workshops and Sponsorships
Committees: Facilities / Gases / PV / PV Automation /
PV Materials / Silicon Wafer / Traceability
Standards Website
Committees: Compound Semiconductor Materials / FPD /
Liquid Chemicals / MEMS / Metrics /
Microlithography / PIC
Standards Membership
Thank You!
For more information or participate in
any NA Liquid Chemical activities, please
contact Michael Tran at SEMI
([email protected])
NA LChem Report - April 2012