Transcript Safety Guideline for Semiconductor Manufacturing Equipment

North America Environmental, Health,
and Safety Committee
April 2011
Leadership and Schedule
Committee Leaders
• Committee Co-chairs
– Chris Evanston / Salus
Engineering
– Sean Larsen / Cymer
– Eric Sklar / Safety Guru, LLC
– James Beasley / ISMI
• Technical Architect
Meeting Schedule
• Last Meeting:
– 2011/03/31 at
NA Spring 2011 Mtngs
Applied Materials
Santa Clara, CA
• Next Meeting:
– Eric Sklar / Safety Guru, LLC
• Technical Editors
– 2011/07/14 at
SEMICON West 2011
San Francisco, CA
– Sean Larsen / Cymer
– Eric Sklar / Safety Guru, LLC
April 2011
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Organization Chart
North America
Environmental, Health,
and Safety Committee
Manufacturing
Equipment Safety
Subcommittee (MESSC)
AMHS Safety TF
S6 Revision TF
Ergonomics (S8) TF
S7 Evaluator
Qualifications TF
S2 3.3 Limitations TF
(NEW)
Fire Protection (S14) TF
S2 Chemical Exposure TF
FPD Safety System
Liaison TF (Inactive)
S2 Interlock Reliability TF
S2 Ladders & Steps TF
S2/Mach. Dir. Mapping TF
(Inactive)
Lifting Equipment TF
(Inactive)
S1 Update TF (Inactive)
S13 NA Support TF
(Inactive)
S18 Support TF
S22 (Safe Electrical
Design) TF
S25 Revision TF (NEW)
S3 Revision TF
E34 Rvsn TF (Disbanded)
S2 Non-Ionizing Radiation
TF
April 2011
Abate. Systems (F5) TF
(Disbanded)
NA EHS Liaison Report
S12 Rvsn TF (Disbanded)
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Notable / New Activities
• New activities
– S2 3.3 Limitations Task Force
• Leaders: Lauren Crane (Applied Materials), Cliff
Greenberg (Nikon Precision)
• Intended result: correction of text in 3.3 of SEMI S2
– S25 Revision Task Force
• Leaders: Jean-Marie Collard (Solvay), Steve Dobson
(Solvay), Eric Sklar (Safety Guru, LLC)
• Intended result: line item revisions to S25
April 2011
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Published for 0211
Revised:
S2-0310b
Environmental, Health, and Safety Guideline for Semiconductor
Manufacturing Equipment
(Delayed Revisions related to electrical safety)
S12-0211
Environmental, Health and Safety Guideline for Manufacturing
Equipment Decontamination
(Miscellaneous minor corrections)
S22-1110a
Safety Guideline for the Electrical Design of Semiconductor
Manufacturing Equipment
(Delayed Revisions related to S2, transformers)
Withdrawn:
S9-0307
(Withdrawn
0211)
April 2011
Guide to Electrical Design Verification Tests for Semiconductor
Manufacturing Equipment That Have Been Moved to SEMI S22
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Committee Activities
Ballot Results [1/2]
4316H
(1 LI)
Line Item Revisions to SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment, and
SEMI S22-1110, Safety Guideline for the Electrical Design of
Semiconductor Manufacturing Equipment
(Delayed Revision Related to Safe Electrical Design)
FAILED
4605D
(4 LIs)
Line Item Revisions to SEMI S22-1110, Safety Guideline for the
Electrical Design of Semiconductor Manufacturing Equipment
(Delayed Revisions on Multiple Topics)
1: FAILED
2: APPROVED
3: APPROVED
4: FAILED
4683
(3 LIs)
Line Item Revisions to SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment
(Delayed Revisions Related to Chemical Exposure)
All Line Items
FAILED
APPROVED ballots forwarded for Procedural Review
FAILED ballots returned to task force unless noted
April 2011
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Committee Activities
Ballot Results [2/2]
4774
(6 LIs)
Delayed Line Item Revisions to SEMI S2-0310, Environmental,
Health, and Safety Guideline for Semiconductor Manufacturing
Equipment
(Revisions Related to Non-Ionizing Radiation)
1: FAILED
2: APPROVED
3: APPROVED
4: APPROVED
5: APPROVED
6: FAILED
4931A
Revision to SEMI S7-0310, Safety Guideline for Evaluation
Personnel and Evaluating Company Qualifications
FAILED
5109
Reapproval of SEMI S25-0306, Safety Guideline for Hydrogen
Peroxide Storage & Handling Systems
FAILED and
transferred to
S25 Revision TF
APPROVED ballots forwarded for Procedural Review
FAILED ballots returned to task force unless noted
April 2011
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Committee Activities
New and Updated TFOFs/SNARFs
New
TFOF
Correction of text in 3.3 of SEMI S2
S2 3.3
Limitations TF
TFOF
5-year review of SEMI S25
S25 Revision TF
5170
Line Item Revisions to SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment
(Revisions Related to Section 3.3)
S2 3.3
Limitations TF
5171
Revision to SEMI S25-0706, Safety Guideline for Hydrogen Peroxide
Storage & Handling Systems
S25 Revision TF
5172
Withdrawal of SEMI F15-0308, Test Method (SF6 Tracer Gas) for
Enclosures Has Been Moved to SEMI S6
NA EHS TC
Updated
5110
April 2011
Line Item Revisions to SEMI S3-0306, Safety Guidelines for Process
Liquid Heating System, and SEMI S2-0310, Environmental,
Health, and Safety Guideline for Semiconductor
Manufacturing Equipment
NA EHS Liaison Report
S3 Revision TF
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Committee Activities
Upcoming Ballots [1/2]
Cycle 3-11
5172
Withdrawal of SEMI F15-0308, Test Method (SF6 Tracer Gas) for
Enclosures Has Been Moved to SEMI S6
NA EHS TC
Either Cycle 3-11 or Cycle 4-11
3560M
New Safety Guideline: Safety Guideline for Semiconductor
Manufacturing Equipment Robots, Automation, and Load Ports
AMHS Safety TF
4774A
Line Item Revisions to SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment
(Delayed Revisions Related to Non-Ionizing Radiation)
S2 Non-Ionizing
Radiation TF
5000
Line Item Revisions to SEMI S2-0310
(Delayed Revisions Related to Reliability Requirements)
S2 Interlock
Reliability TF
5110
Line Item Revisions to SEMI S3-0306, Safety Guidelines for Process
Liquid Heating System, and SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment
S3 Revision TF
5171
Revision to SEMI S25-0706, Safety Guideline for Hydrogen Peroxide
Storage & Handling Systems
S25 Revision TF
April 2011
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Committee Activities
Upcoming Ballots [2/2]
Cycle 4-11
4316I
Line Item Revisions to SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment, and
SEMI S22-1110, Safety Guideline for the Electrical Design of
Semiconductor Manufacturing Equipment
(Delayed Revision Related to Safe Electrical Design)
S22 TF
4449C
Line Item Revisions to SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment
(Delayed Revisions Related to Work at Elevated Locations)
S2 Ladders &
Steps TF
4605E
Line Item Revisions to SEMI S22-1110, Safety Guideline for the
Electrical Design of Semiconductor Manufacturing Equipment
(Delayed Revisions on Multiple Topics)
S22 TF
4683A
Line Item Revisions to SEMI S2-0310, Environmental, Health, and
Safety Guideline for Semiconductor Manufacturing Equipment
(Delayed Revisions Related to Chemical Exposure)
S2 Chemical
Exposure TF
April 2011
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Committee Activities
Subcommittees & Task Forces (1/3)
MESSC
Discussed various topics, included text of paragraph 3.3 in S2
and the definitions of “fault-tolerant” and “fail-safe”.
AMHS Safety TF
Completed review of responses to Doc. 3560L; planning to
ballot Doc. 3560M in C3-11 or C4-11.
Ergonomics TF
New leader: Paul Schwab (TI) replaces Mark Harralson (Intel).
Continuing work to merge the SESC checklist with the SESC RI
section in S8.
Fire Protection TF
Continuing work on content related to audiovisual notifications.
S2 3.3 Limitations
TF
Starting work on updated text for paragraph 3.3 of S2.
April 2011
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Committee Activities
Subcommittees & Task Forces (2/3)
S2 Chemical
Exposure TF
Issued Doc. 4683 in C2-11; reviewing responses to failed line
items and planning to ballot Doc. 4683A in C4-11.
S2 Interlock
Reliability TF
Planning to ballot Doc. 5000 (addition of an RI on interlock
reliability to SEMI S2) in C3-11 or C4-11.
S2 Ladders & Steps
TF
Continuing to review responses to Doc. 4449B; planning to
ballot Doc. 4449C in C4-11 if possible.
S2 Non-Ionizing
Radiation TF
Issued Doc. 4774 in C2-11; reviewing responses to failed line
items and planning to ballot Doc. 4774A in C3-11 or C4-11.
S3 Revision TF
Continuing work on line items to revise S3; expanded scope
to include line items to revise affected content in S2. Planning
to ballot Doc. 5110 in C3-11 or C4-11.
April 2011
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Committee Activities
Subcommittees & Task Forces (3/3)
S6 Revision TF
Continuing to develop line item revisions to S6 and new
content for S6 addressing gas detectors.
S7 Evaluator
Qualifications TF
Document 4931A (add business continuity-related criteria to
S7) failed; ballot to be re-worked and re-issued.
S18 Support TF
Continuing to support S18 Revision TF in Japan.
S22 (Safe Electrical
Design) TF
Some line items of Doc. 4605D (misc. line item revisions to
S22) approved. Reviewing responses to failed items and Doc.
4316H (alignment of criteria in S2 and S22). Planning to ballot
Docs. 4316I and 4605E in C4-11.
S25 Revision TF
Reviewing responses to S25 reapproval ballot; starting work
on revisions to S25. Planning to ballot Doc. 5171 in C4-11.
FPD System Safety Liaison, Lifting Equipment TF, S1 Update, S2 Machinery Directive
Mapping, and S13 Support – nothing to report or inactive.
April 2011
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Regional Staff
Contact Information
Name
Ian McLeod
E-mail
[email protected]
Phone
1.408.943.6996
Office Address
SEMI Headquarters (San Jose)
Committees etc.
Compound Semiconductor Materials
Environmental, Health, and Safety
Flat Panel Display (inactive)
Liquid Chemicals
Metrics
Physical Interfaces & Carriers
Membership
April 2011
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