1 Prof. Johnny Kin On SIN IEEE Fellow for contributions to the

Download Report

Transcript 1 Prof. Johnny Kin On SIN IEEE Fellow for contributions to the

Prof. Johnny Kin On SIN
IEEE Fellow
for contributions to the design and
commercialization of power semiconductor
devices
The Hong Kong University of Science and Technology
Dept. of Electronic and Computer Engineering
Clear Water Bay, Hong Kong
1
Power Semiconductor Devices Design
 Using VLSI technologies to design compact, low cost, fast acting
and efficient power switches for hundreds of amps and thousands of
volts!
Modern Intelligent Power Module
Old Mechanical
Switch
Multi-chip
IGBT
Assembly
2
Power Semiconductor Devices Design (cont’d)
A power semiconductor device mounted
on a lead frame
 The power devices designed require
very fine geometry (in the order of
100nms) and are built over a large
area.
SEM micrograph of a power semiconductor device
Poly-Si: Trench Gate
P-pillar Trench
Source
Trench
Drain
Trench
Ldrift
Poly-Si: Top Gate
3
Commercialization of Power Devices
 Millions of parts used in applications:
Consumer
Electronics
Appliances
Automotive
Portable
Electronics
Power Modules
4