Transcript Slide 1

Nanotechnology on our Desktops
Transistor
Hard Disk
Gate
Sensor
Source
Well
6 nm
Medium
Drain
Gate oxide
4 nm
Switching layer
5 nm
Magnetic grain
10 nm
Electrons in the
Conduction Band
p-type
n-type
Holes in the
Valence Band
Benefits of a quantum well:
1) Trap electrons and holes in the same
quantum well and thereby keep them
together longer.
Alferov
Kroemer
Nobel Prize in Physics 2000
2) Electrons and holes have well-defined,
quantized energies, such that most of
them contribute to the same laser line.
Quantum Well Laser Optimization
6 nm : Optimum Thickness
The (MOSFET) Transistor
MOS = Metal-Oxide-Semiconductor
FET = Field Effect Transistor
Electrons
The electron flow from source to drain is
controlled by the gate voltage.
Transistor
DRAM
(Dynamic Random
Access Memory)
Transistor + Capacitor
Moore’s Law of Silicon Electronics
The performance of silicon devices increases exponentially.
Corollaries:
The storage density doubles every 2 years, linear dimensions x½ every 4 years.
The cost per megabyte decreases exponentially.
The cost of a factory (“fab”) increases exponentially (now a few billion $).
Power consumption by a leaky gate oxide:
A show-stopper for Moore’s Law ?
Gate oxide has
shrunk to < 2nm,
< 10 atom layers.
Electrons can
tunnel through
when applying
a gate voltage.
Uses up to 1/3
of the power.
Semiconductor-Insulator Interfaces :
From the MOSFET to Molecular Electronics
Mismatch of the bond density at the Si/SiO2 interface
The Si/SiO2 Interface
Intermediate oxidation states at the interface
provide a gradual transition from Si to SiO2 .
0.7 nm Limit Predicted for the Gate Oxide Thickness
Intermediate oxides insulate poorly
CBM
Si2p
STEM + electron energy loss measurement across
the Si/SiO2 interface (see Lect. 5, Slides 16,17)
Intel is already at the limit:
0.8 nm oxide reached in demos
Need gate insulator with high dielectric constant : HfO2
Thicker oxide with same capacitance and less leakage
Atomic Layer Epitaxy (ALE) for Monolayer Control
“Digital Growth”
General concept of ALE:
Adsorb fairly inert precursor molecules onto a
reactive sbstrate, such
that only one monolayer
sticks.
Reactivate the surface
by chemical treatment.
Repeat this cycle.
ALE growth of Al2O3 (alumina) from an
organo-metallic precursor with
reactivation by H2O.
Molecular Field Effect Transistors
Molecular Control of Gate Dielectric and its Interface
Si-Molecule Interfaces
Halik et al., Nature 431, 963 (2004)
Review: Malliaras and Friend, Physics Today, May 2005, p. 5
Attaching Alkanes to Silicon via Siloxane Chemistry
C-C
OTS
Alkane
C-H
Moist

Ordered
Dry

Disordered
Cl
H
O
Silicon
Peters et al., Langmuir 18, 1250 (2002)
In Pursuit of the Ultimate Storage Medium
1 bit = 1 atom
Silicon Surface
CD-ROM
Track spacing
5 atom rows
10 m
10 nm
Density x106
Bennewitz et al.
Nanotechnology
13, 499 (2002)
When will we be down to atoms ?
Using Moore's Law ...
250 Terabit/inch2
Year 2038
CCD (Charge Coupled Device)
The CCD detectors in digital cameras wiped out photographic film.
Physics Nobel Prize 2009: Boyle and Smith
Operation of a CCD
CCD detectors are based on silicon MOS technology (compare Slides 4, 5).
Each pixel consists of a MOS capacitor with positive gate voltage. Contrary to
a MOSFET, electrons cannot flow directly into the channel. Only those excited
by photons are able to charge the capacitor, building up a charge bucket.
Readout: Charge buckets are shifted along a row of pixels (“bucket brigade”) .
Gate
Channel
CB
VB