Transcript SUGAR - Courant Institute of Mathematical Sciences

SUGAR
• Tool for system-level MEMS simulation
• Goal: Be SPICE to the MEMS world
• Analyzes static, dynamic, and linearized
steady-state behavior
• Challenges:
– Be fast enough for design and optimization
(not just verification)
– Handle coupled physical effects (electrical,
mechanical, thermal, optical, …)
SUGAR: Current work
• Broad set of component models
• Validation against optical measurements
• Deployment of Millennium-based web
service (used in EE245 in Fall 2001)
• Analyze dependence on parameters
(sensitivity analysis, bifurcation analysis)
• Design synthesis and optimization
• Integration of state-of-the-art solvers
Architecture
Netlist
uses mumps.net
Analysis Results
Solvers
transient analysis
steady-state analysis
param ox=0, oy=0, oz=0
System Assembly
gap3dV2 p1 [b c D E]
static analysis
[l=100u w1=5u w2=5u
gap=2u t1=0u t2=500u
V1=5 V2=12
Device Models
ox=ox oy=oy oz=oz]
MATLAB™ Web
Library
User Interfaces
sensitivity analysis
Mirror
Torsional
hinge
Perforate
d beams
Cosineshaped
beams
Moment
arm
Actuation
direction
Recessed
inner plate
Perforated comb drive array
Torsional micromirror.
MEMS Design by: M. Last, K.S.J. Pister
• Complex system with ~1000 comb fingers and torsional springs
• Finite Element Analysis might use O(106) continuum elements
• Sugar: system reduces to 2,621 elements and 11,706 unknowns
• Device described using parameterized substructures
M&MEMS: SUGAR on the Web
• Hosted on Berkeley Millennium cluster
• Requires only a web browser (with Java for graphics)
• Used in Berkeley’s Fall 2001 introductory MEMS course