Transcript System-Level Modeling and Simulation of Optical MEM Systems

HOW SMALL CAN WE TAKE THIS? ART OF MINIATURIZATION
Timeline of MEMS and MEME
Micro-Electrical-Mechanical Systems
Micro-Electrical-Mechanical Equipments
Same fabrication techniques used
for electrical VLSI
So what are MEMS?
Microelectromechanical systems (MEMS)
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small integrated devices or systems that combine
electrical and mechanical components
range in size from the sub micrometer (or sub micron)
level to the millimeter level, and there can be any
number, from a few to millions, in a particular system
MEMS extend the fabrication techniques developed for
the integrated circuit industry to add mechanical
elements such as beams, gears, diaphragms, and
springs to devices.
Timeline of MEMS
1750s
First electrostatic motor (Benjamin Franklin, Andrew Gordon)
Silicon discovered
1927
Field effect transistor patented (Lilienfield)
1947
Invention of the transistor (Germanium) at Bell Telephone
Laboratories. (23 December)
1948
Schockley, Bardeen, and Brattain won the Nobel Prize
1954
C.S. Smith., “ Piezoresistive effect in Germanium and
Silicon”
1955
The IC concept was conceived by several groups, and
included RCA's Monolithic Circuit Technique for hybrid
circuits
Timeline of MEMS
Piezo Pressure Sensors
1958
Silicon strain gauges commercially available
1958
Jack Kilby of Texas Instruments in 1958, using Ge devices
1959
A patent was issued to Kilby
A few months later, Robert Noyce of Fairchild Semiconductor
announced the development of a planar Si IC
1961
First silicon pressure sensor demonstrated (Kulite)
Timeline of MEMS
Timeline of MEMS
Surface Micromachining
1967
Invention of surface micromachining (Nathanson, Resonant
Gate Transistor)
Sensors and MicroMirror
1970
First silicon accelerometer demonstrated (Kulite)
1977
First capacitive pressure sensor (Stanford)
1980
K.E. Petersen, “ Silicon Torsional Scanning Mirror”
Timeline of MEME
Side Drive Motor
1982
Disposable blood pressure transducer (Foxboro/ICT, Honeywell, $40)
1984
First polysilicon MEMS device (Howe, Muller)
1988
Rotary electrostatic side drive motors (Fan, Tai, Muller)
Electro Comb Drive Actuator
1989
Lateral comb drive (Tang, Nguyen, Howe)
Commercial Polysilicon Surface Micromachining
1992
MCNC starts the Multi User MEMS Process (MUMPs)
ADXL and DRIE of SOI
1993
First surface micromachined accelerometer sold (ADXL50)
1994
XeF2 used for MEMS
1994
Bosch process for Deep Reactive Ion Etching is patented
Timeline of MEME
BioMEMS and Optical MEMS
1995
Bio-MEMS comes of age
1998
The premiere of Star Wars shown on TI’s Digital Mirror Device
2000
Optical fiber switches becomes big business
What is the Next Big MEMS
Things?
Optical MEMS
Projection displays
Diffractive optics
Optical-fiber
switches
Adaptive optics, photonic
crystals
Sub-wavelength
structures
are well suited for implantation in MEMS
This will lower the cost and also add functionality
Promising application areas include
environmental monitoring
biomedicine
security
optical interconnects
surveillance
optical wireless communications
MEMS Patents issued by year
Figure 1. Worldwide and U. S. patents on MEMS as a function of year. The total
number of patents in this distribution is 861, of which 247 are from the U. S.
Patent Activity
MEMS Folks like bugs?!
First Commercial Product
MEMS – Become Optical
► Reflective
metal
 Gold
 Aluminum
Optical MEMS become Commercial
DLP System
2x2 Optical Switch
Cross State
Bar State
NxN Optical Link
3D Optical Switch
Agilent Bubble Switch
MEMS Add/Drop
Sensor: Spectrometer on Chip
References
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http://mems.colorado.edu/c1.res.ppt/
http://www.csa.com/hottopics/mems/abstracts_s.php
http://www.aero.org/publications/helvajian/helvajian1.html
Manchester University Experimental Transistor Computer
1953
http://www.computer50.org/kgill/transistor/trans1.gif
Close-up of the Experimental Transistor Computer
http://www.computer50.org/kgill/transistor/trans2.gif