Remote MEMS Simulation, Testing and Design
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Transcript Remote MEMS Simulation, Testing and Design
Remote MEMS Simulation, Testing and Design
A Next Generation Internet Incubator
James Demmel
CITRIS Chief Scientist
Remote MEMS Simulation, Testing and Design
• MEMS = MicroElectroMechanicalSystems
• Core CITRIS Sensor/Actuator Technology
• Goal: Make tools for designing MEMS available
to remote users
– Simulation, Fabrication, Testing
– Academic and Industrial users (thousands)
• Leverage large investment in networking and
unique facilities at UCB and elsewhere
BSAC Microscopic Stroboscopic Interferometer
(Muller, Rembe, BSAC, UCB)
Adaptive Optics MicroMirror
(Muller, Rembe, BSAC)
SUGAR
(Pister, Demmel, Govindjee, Agogino, Gu, Bai)
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MEMS Simulation Tool, inspired by SPICE
Available as Web service on Millennium
Currently 100s of users
Ex: Laterally actuated torsionally suspended micromirror
Matisse Project (DARPA)
• Provide remote access to unique and mostly
MEMS facilities for large user community
• Provide central facility (MEMS Exchange)
to organize national networkof MEMS
testing sites
• Use SuperNet infrastructure
• DARPA supported (UCB, LBL, CMU, MIT,
CNRI, ISI, Sarnoff)
Current MEMS Exchange Fabrication
Sites and Participating Sites
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1100 registered users
Fabrication Sites Under Contract:
– Academic:
• University of California at Berkeley
• Stanford University
• Cornell University
• University of Michigan
• Case Western Reserve University
• University of Illinois
• LSU/Center for Advanced Microstructures and Devices (expected soon)
– Commercial:
• Analog Devices
• Teledyne Electronics
• Microwave Bonding Inc.
• Integrated Sensing Systems (ISSYS)
• Sony Semiconductor
• Tactical Fabs, Inc.
• Zygo TeraOptics, Inc.
• Advanced MEMS Optical, Inc.
• ASML
• Lance Goddard Assoc.
• Intelligent Micropatterning, LLC
SuperNet
Notes:
Site/network connection operational
Site/network connection expected to be operational soon
Site/network connection down due to NTON network turn down
Peering with other networks
Matisse Site Connections
Needs and Potential Impact
• West Coast down because NTON down
– Even if NTON were up, if would not reach all potential users
• How many users?
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Currently 1100 registered MEMS Exchange users
Hundreds of SUGAR users
More signed up (UCD, UCLA, Stanford, BSAC industrial affiliates)
Intend to export as educational facility
• Large potential user base, high leverage
• Requirements
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Move and store 80 GB data files
Raw data from experimental platforms up to 300MBs/
Real time data from UCB Interferometer = 80 MB/s
Real time control of experiment => ?? Latency
• Impact
– Greatly expand MEMS community
A Next Generation Internet Incubator
• CommerceNet-funded NGI
– http://www.commerce.net
• At Bancroft/Shattuck in shared CCIT space
– http://www.path.berkeley.edu/PATH/CCIT/Default.htm
• Companies will incubate and collaborate with CITRIS faculty
and students
– Kalil, Demmel, Sastry, Teece (advisors)
– http://www.cs.berkeley.edu/~demmel/CommerceNet
• Companies chosen for closeness to CITRIS
• Mankoff working with Pangea on access for people with
disabilities
• Resources available, contact Tom Kalil
([email protected])