Transcript Remote MEMS Simulation, Testing and Design

Remote MEMS Simulation, Testing and Design
James Demmel, EECS & Math
Kristofer Pister, Richard Muller, BSAC, EECS, UC Berkeley
Sanjay Govindjee, CEE
Alice Agogino, ME
Ming Gu, Math
Zhaojun Bai, CS, UC Davis
Goals
• Combine two technologies to “Close the MEMS design loop”
– Simulation (SUGAR)
– Measurement (Microscopic Stroboscopic Interferometer, …)
• Leverage large investment in networking and unique facilities at
UCB and elsewhere
• Make tools available to remote users
– Run large simulations on UCB Millennium cluster
– Test devices on UCB, other test rigs
– Feedback data into simulation, design
• Compare simulation and reality
• Parameter extraction, sensitivity studies
BSAC Microscopic Stroboscopic Interferometer
(Muller, Rembe, BSAC, UCB)
Adaptive Optics MicroMirror
(Muller, Rembe, BSAC)
SUGAR
(Pister, Demmel, Govindjee, Agogino, Gu, Bai)
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MEMS Simulation Tool, inspired by SPICE
Available as Web service on Millennium
Currently 100s of users
Ex: Laterally actuated torsionally suspended micromirror
Matisse Project (DARPA)
• Provide remote access to unique and mostly
MEMS facilities for large user community
• Provide central facility (MEMS Exchange)
to organize national network of MEMS
testing sites
• Use SuperNet infrastructure (CENIC)
• DARPA supported (UCB, LBL, CMU, MIT,
CNRI, ISI, Sarnoff)
Matisse Site Connections
Current MEMS Exchange Fabrication
Sites and Participating Sites
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1100 registered users
Fabrication Sites Under Contract:
– Academic:
• University of California at Berkeley
• Stanford University
• Cornell University
• University of Michigan
• Case Western Reserve University
• University of Illinois
• LSU/Center for Advanced Microstructures and Devices (expected soon)
– Commercial:
• Analog Devices
• Teledyne Electronics
• Microwave Bonding Inc.
• Integrated Sensing Systems (ISSYS)
• Sony Semiconductor
• Tactical Fabs, Inc.
• Zygo TeraOptics, Inc.
• Advanced MEMS Optical, Inc.
• ASML
• Lance Goddard Assoc.
• Intelligent Micropatterning, LLC