Transcript Environmental, Health and Safety Japan TC Chapter Liaison

Environmental, Health and Safety Japan TC
Chapter Liaison Report
NA EHS TC Chapter Meeting
Thursday, July 14, 2016
Leadership
• Committee Co-chairs
– Hidetoshi Sakura/ Independent
• GCS voting member
• EHS Committee representative to the JRSC
– Moray Crawford/ Hatsuta Seisakusho
• GCS voting member
– Supika Mashiro/ Tokyo Electron
• Leadership Changes
– None
TC Chapter Organization
EHS Japn TC Chapter
Hidetoshi Sakura/ Independent
Moray Crawford/ Hatsuta Seisakusho
Supika Mashiro/ TEL
FPD System Safety TF
Naokatsu Nishiguchi/
Screen Semiconductor Solutions
S23 Revision Global TF
George Hoshi / TEL
Lauren Crane/ KLA-Tencor
STEP Planning WG
Kenji Sugihara/ Panasonic
GHG Emission
Characterization TF
George Hoshi / TEL
Seismic Protection TF
Naokatsu Nishiguchi/
Screen Semiconductor Solutions
SDRCM TF
Supika Mashiro/ TEL
Meeting Information
• Previous Meetings
– April 19, 2016 at SEMI Japan Office
– June 28, 2016 at SEMI Japan Office
• Next Meeting
– December 16, 2016 at Conference Tower, Tokyo Big
Site, Tokyo, Japan
Ballot Result on April 19
• Doc. 5972: Reapproval of SEMI S19-031, Safety
Guideline for Training of Manufacturing
Equipment Installation, Maintenance and
Service Personnel.
Passed (Super Clean)
– Under Proof process
Ballot Result on June 28
• Doc. 5556B: Line Item Revision to SEMI S2-0715,
Environmental, Health, and Safety Guideline for
Semiconductor Manufacturing Equipment, Revisions to §19
“Seismic Protection” (In Delayed Effective Date Format)
 Passed with editorial changes and technical changes
 Ratification Ballot R5556B will be submitted to be voted in Cycle 6
• Doc. 5947A: Revision to SEMI S23-0813, with title change
from “GUIDE FOR CONSERVATION OF ENERGY, UTILITIES
AND MATERIALS USED BY SEMICONDUCTOR
MANUFACTURING EQUIPMENT” to “GUIDE FOR ENERGY,
UTILITIES AND MATERIALS USE EFFICIENCY OF
SEMICONDUCTOR MANUFACTURING EQUIPMENT”
 Passed with editorial changes and technical changes
 Ratification Ballot R5947A will be submitted to be voted in Cycle 6
Upcoming Ballots
• For Cycle 6, 2016
– Doc. R5556B, Line Item Revisions to SEMI S2-0712,
Environmental, Health, and Safety Guideline for Semiconductor
Manufacturing Equipment Revisions Related to Section 19
Seismic Protection
:Ratification Ballot to validate all of the technical changes
made by a TC Chapter during adjudication of 5556B
– Doc. R5947A: Revision to SEMI S23, with title change from
“GUIDE FOR CONSERVATION OF ENERGY, UTILITIES AND
MATERIALS USED BY SEMICONDUCTOR MANUFACTURING
EQUIPMENT” to “GUIDE FOR ENERGY, UTILITIES AND
MATERIALS USE EFFICIENCY OF SEMICONDUCTOR
MANUFACTURING EQUIPMENT”
:Ratification Ballot to validate all of the technical changes
made by a TC Chapter during adjudication of 5947A
TF/ WG/ SG Reports -1
• S23 Revision Global Task Force
– No special report except Doc. 5947A at the TC
Chapter meeting on June. 29.
• Passed the TC Chapter review on June 28, 2016
• Ratification Ballot R5556B will be submitted to Cycle 6, 2016
Made a wish & Wrote it down on
paper strip by George Hoshi
TF/ WG/ SG Reports -2
• Greenhouse Gas (GHG) Emission
Characterization Task Force
– No special update from the last report
TF/ WG/ SG Reports -3
• FPD System Safety Task Force
– Doc. 5875: Revision to S26-0415: Environmental,
Health, and Safety Guideline for FPD Manufacturing
System (Line Item Revision)
• S26-0516 was published
– No other special update from the last report, but task
force disbandment is under consideration.
TF/ WG/ SG Reports -4
• Seismic Protection Task Force
– Doc. 5556B, Line Item Revisions to SEMI S2-0712,
Environmental, Health, and Safety Guideline for
Semiconductor Manufacturing Equipment Revisions
Related to Section 19 Seismic Protection
• Passed the TC Chapter review on June 28, 2016
• Ratification Ballot R5556B will be submitted to Cycle 6, 2016
TF/ WG/ SG Reports -5
• SDRCM (S Documents REG-PG-SM
Conformance Maintenance) TF
– Doc. 5972: Reapproval of SEMI S19-031, Safety
Guideline for Training of Manufacturing Equipment
Installation, Maintenance and Service Personnel.
• Submitted to Cycle 1, 2016
• Super clean
• Under Proof process
TF/ WG/ SG Reports -6
• STEP Planning Working Group
– STEP/ SEMI S2 will be held in fall at SEMI Japan
Office.
Thank you!
Staff contact
Junko Collins
SEMI Japan
[email protected]