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Digital Integrated
Circuits
A Design Perspective
Jan M. Rabaey
Anantha Chandrakasan
Borivoje Nikolic
The Devices
Revised from Digital Integrated Circuits, © Jan M. Rabaey el, 2003
© Digital Integrated Circuits2nd
Devices
Goal of this chapter
Understand device operation for shortchannel devices
Present intuitive understanding of device
operation
Introduction of basic device equations
Introduction of models for manual analysis
Introduction of models for Spice/Spectre
simulation
Analysis of secondary and deep-sub-micron
effects
Understanding MOS transistor parasitics
© Digital Integrated Circuits2nd
Devices
The Diode
B
A
Al
SiO2
p
n
Cross-section of pn -junction in an IC process
A
p
Al
A
n
B
One-dimensional
representation
B
diode symbol
Mostly occurring as parasitic element in Digital ICs
© Digital Integrated Circuits2nd
Devices
Depletion Region
hole diffusion
electron diffusion
(a) Current flow.
n
p
hole drift
electron drift
Charge
Density
x
Distance
+
-
Electrical
Field
(b) Charge density.
x
(c) Electric field.
V
Potential
-W 1
© Digital Integrated Circuits2nd
W2
x
(d) Electrostatic
potential.
Devices
Diode Current
© Digital Integrated Circuits2nd
Devices
The diffusion current
dominates the drift
component. The carriers
traverse the depletion region
and are injected into to the
neutral n and p regions
(become minority carriers)
pn (W2)
Forward Bias (minority carrier concen.)
pn0
Lp
np0
p-region
-W1 0
Typically avoided in Digital ICs
© Digital Integrated Circuits2nd
W2
n-region
x
diffusion
Devices
Reverse Bias (minority carrier concen.)
The drift current dominates
the diffusion component.
Barrier raised and almost no
current from n to p.
pn0
np0
p-region
-W1 0
W2
x
n-region
diffusion
drift
The Dominant Operation Mode for diode
in CMOS VLSI design
© Digital Integrated Circuits2nd
Devices
Models for Manual Analysis
© Digital Integrated Circuits2nd
Devices
Junction Capacitance
© Digital Integrated Circuits2nd
Devices
Diffusion Capacitance
Caused by charge-storage effects of the
minority carriers (in Forward-bias only)
© Digital Integrated Circuits2nd
Devices
Secondary Effects
ID (A)
0.1
0
–0.1
–25.0
–15.0
–5.0
0
5.0
VD (V)
Avalanche Breakdown
© Digital Integrated Circuits2nd
Devices
Diode Model
RS
+
VD
ID
CD
-
© Digital Integrated Circuits2nd
Devices
SPICE Parameters
© Digital Integrated Circuits2nd
Devices
What is a Transistor?
A Switch!
An MOS Transistor
VGS V T
|VGS|
Ron
S
© Digital Integrated Circuits2nd
D
Devices
The MOS Transistor
Polysilicon
© Digital Integrated Circuits2nd
Aluminum
Devices
MOS Transistors -Types and Symbols
D
D
G
G
S
S
NMOS
NMOS
D
G
G
S
PMOS
© Digital Integrated Circuits2nd
D
B
S
NMOS with
Bulk Contact
Devices
Threshold Voltage: Concept
+
S
VGS
D
G
-
n+
n+
n-channel
Depletion
Region
p-substrate
B
The semiconductor surface inverts to n-type material (strong inversion)
A continuous n-type channel is formed
© Digital Integrated Circuits2nd
Devices
The Threshold Voltage
The value of VGS where strong inversion occurs is called the threshold voltage VT
Fermi potential
When VSB=0 (always has
to be larger than -0.6V to
back bias the pn-junction)
© Digital Integrated Circuits2nd
Devices
The Body Effect
0.9
0.85
0.8
0.75
VT (V)
0.7
0.65
0.6
0.55
0.5
0.45
0.4
-2.5
-2
-1.5
-1
V
BS
© Digital Integrated Circuits2nd
-0.5
0
(V)
Devices
Current-Voltage Relations
A good transistor
6
x 10
-4
VGS= 2.5 V
5
Resistive
Saturation
4
ID (A)
VGS= 2.0 V
3
VDS = VGS - VT
2
VGS= 1.5 V
1
0
Quadratic
Relationship
VGS= 1.0 V
0
0.5
1
1.5
2
2.5
VDS (V)
© Digital Integrated Circuits2nd
Devices
Transistor in Linear
VGS
VDS
S
G
n+
–
V(x)
<VGS-VT
ID
D
n+
+
L
x
p-substrate
B
A continuous conductive channel
MOS transistor and its bias conditions
© Digital Integrated Circuits2nd
Devices
Transistor in Saturation
VGS
VDS > VGS - VT
G
D
S
n+
-
VGS - VT
+
n+
Pinch-off
constant
© Digital Integrated Circuits2nd
Devices
Current-Voltage Relations
Long-Channel Device
Mobility (e.g. electron velocity)
© Digital Integrated Circuits2nd
Devices
A model for manual analysis
© Digital Integrated Circuits2nd
Devices
Current-Voltage Relations
The Deep-Submicron Era
2.5
x 10
-4
VGS= 2.5 V
Early Saturation
2
VGS= 2.0 V
ID (A)
1.5
VGS= 1.5 V
1
0.5
0
Linear
Relationship
VGS= 1.0 V
0
0.5
1
1.5
2
2.5
VDS (V)
© Digital Integrated Circuits2nd
Devices
u n (m/s)
Velocity Saturation
The critical field at which
saturation occurs depends
on both doping levels and
vertical electrical field.
Typically 1 to 5v/um for .
(2V across 0.25µm channel).
usat = 105
Constant velocity (hole and electron)
Constant mobility (slope = µ)
c = 1.5
© Digital Integrated Circuits2nd
(V/µm)
Devices
Perspective
When increasing the VDS, the electrical field in the channel
ultimately reaches the critical value and the carriers at the drain
become velocity saturated (gives a early saturation at VDSAT).
ID
Long-channel device
VGS = VDD
Short-channel device
V DSAT
© Digital Integrated Circuits2nd
VGS - V T
VDS
Devices
ID versus VGS
-4
6
x 10
-4
x 10
2.5
5
2
4
linear
quadratic
ID (A)
ID (A)
1.5
3
1
2
0.5
1
0
0
quadratic
0.5
1
1.5
VGS(V)
Long Channel
© Digital Integrated Circuits2nd
2
2.5
0
0
0.5
1
1.5
2
2.5
VGS(V)
Short Channel
Devices
ID versus VDS
-4
6
-4
x 10
VGS= 2.5 V
x 10
2.5
VGS= 2.5 V
5
2
Resistive Saturation
ID (A)
VGS= 2.0 V
3
VDS = VGS - VT
2
1
VGS= 1.5 V
0.5
VGS= 1.0 V
VGS= 1.5 V
1
0
0
VGS= 2.0 V
1.5
ID (A)
4
VGS= 1.0 V
0.5
1
1.5
VDS(V)
Long Channel
© Digital Integrated Circuits2nd
2
2.5
0
0
0.5
1
1.5
2
VDS(V)
Short Channel
Devices
2.5
A unified model for manual analysis of
short-channel devices
Linear (Resistive)
VDS < VDSAT
Saturated (Constant Current) VDS VDSAT
G
S
D
B
© Digital Integrated Circuits2nd
Devices
Simple Model versus SPICE
2.5
x 10
-4
VDS=VDSAT
2
Velocity
Saturated
ID (A)
1.5
Linear
1
VDSAT=VGT
0.5
VGT<VDSAT
Saturated
0
0
0.5
1
1.5
2
2.5
VDS (V)
© Digital Integrated Circuits2nd
Devices
A PMOS Transistor
Assume all variables
negative!
-4
0
x 10
VGS = -1.0V
-0.2
VGS = -1.5V
ID (A)
-0.4
-0.6
-0.8
-1
-2.5
VGS = -2.0V
VGS = -2.5V
-2
-1.5
-1
-0.5
0
VDS (V)
© Digital Integrated Circuits2nd
Devices
Transistor Model
for Manual Analysis
© Digital Integrated Circuits2nd
Devices
The Transistor as a Switch
VGS V T
Most time spent between here
when discharging
Ron
S
D
ID
V GS = VD D
Rmid
R0
V DS
VDD/2
© Digital Integrated Circuits2nd
VDD
Devices
The Transistor as a Switch
where I DSAT
7
x 10
W
k
L
'
5
2
VDSAT
(VDD VT )VDSAT
2
6
5
Req (Ohm)
• R is inversely proportional to W/L
4
• No significant reduction when VDD
is much larger than VT+VDSAT/2
3
2
• VDD can not be too small (e.g.
close to VT), otherwise resistance is
very large
1
0
0.5
1.5
1
V
© Digital Integrated Circuits2nd
DD
2
2.5
(V)
Devices
The Transistor as a Switch
© Digital Integrated Circuits2nd
Devices
MOS Capacitances
Dynamic Behavior
• Dynamic behavior is a function of time for the transistor
to charge/discharge the parasitic capacitances
• Parasitic includes
intrinsic capacitance of the device
load capacitance by the fanout gates and wires
• Intrinsic capacitance have three sources
basic MOS structure
channel charge
depletion region (of reversed-biased pn-junction at
drain/source)
© Digital Integrated Circuits2nd
Devices
Dynamic Behavior of MOS Transistor
G
CGS
CGD
D
S
CGB
CSB
CDB
B
© Digital Integrated Circuits2nd
Devices
1. The Gate Capacitance: overlap capacitance
Polysilicon gate
Lateral diffusion
CGSO=CGDO=
Source
Drain
xd
n+
xd
Ld
W
Cox Xd W=COW
n+
Gate-bulk
overlap
Top view
Gate oxide
tox
n+
Leff
n+
Cross section view
© Digital Integrated Circuits2nd
Devices
2. The Gate Capacitance: channel capacitance
G
G
CGC
CGC
D
S
G
Cut-off
CGC
D
S
Resistive
D
S
Saturation
Most important regions in digital design: saturation and cut-off
© Digital Integrated Circuits2nd
Devices
Gate Capacitance
Discontinuity at around VT
CG C
WLC ox
WLC ox
CG C
=
WLC ox
2
CGC B
C G CS = CG CD
Capacitance as a function of VGS
(with VDS = 0) in linear region
© Digital Integrated Circuits2nd
WLC ox
3
+
CGCD
2
VG S
2WLC ox
CG CS
0
VDS /(VVGDSAT
S-VT)
1
Capacitance as a function of the
degree of saturation (VGS>VT)
Devices
Measuring the Gate Cap using simulator
-16
×10
3 102 16
10
I
I=CG(VGS) dVGS/dt
for VDS=0
© Digital Integrated Circuits2nd
9
Gate Capacitance (F)
V GS
8
7
6
5
4
3
2
2 2 2 1.5 2 1 2 0.5 0 0.5 1
V GS (V)
1.5 2
Devices
3. Junction Capacitance
Channel-stop implant
N A
Side wall
Source
ND
W
Bottom
xj
Side wall
LS
Channel
Substrate N A
Junction capacitance
per unit length
Junction capacitance per unit area
© Digital Integrated Circuits2nd
No channel side
Devices
Junction Capacitance
• Both Cj and Cjsw are non-linear and depends on the bias voltage.
• Keep large reverse-biased voltage for PN junction
© Digital Integrated Circuits2nd
Devices
Capacitances in 0.25 mm CMOS
process
© Digital Integrated Circuits2nd
Devices
The Sub-Micron MOS Transistor
Threshold
Variations
Sub-threshold
Parasitic
© Digital Integrated Circuits2nd
Conduction
Resistances
Devices
Threshold Variations due to DIBL
VT
VT
Long-channel threshold
L
Threshold as a function of
the length (for low VDS )
Low VDS threshold
VDS
Drain-induced barrier lowering (DIBL)
(for very small L )
In traditional derivation of VT, the channel depletion region is assumed to
mainly originate from gate voltage, which neglects the already depleted
region in the source/drain area. This gives more error in case of shorter
channel length.
© Digital Integrated Circuits2nd
Devices
Threshold Variations due to Hot-carrier
• In short-channel devices, the increasing electric field
causes increasing velocity of electron (until velocity
saturation).
• Electron become too “hot”, often trapped in the oxide,
which changes the threshold voltage.
• Hot-carrier effects typically increase threshold of
NMOS, but decrease that of PMOS?
• This complicate the design and leads to long-term
reliability problem.
© Digital Integrated Circuits2nd
Devices
Sub-Threshold Conduction
The Slope Factor
-2
10
Linear
-4
I D ~ I 0e
10
-6
Quadratic
CD
, n 1
Cox
S is DVGS for ID2/ID1 =10
ID (A)
10
qVGS
nkT
-8
10
-10
Exponential
-12
VT
10
10
0
0.5
1
1.5
2
2.5
Typical values for S:
60 .. 100 mV/decade
VGS (V)
© Digital Integrated Circuits2nd
Devices
Sub-Threshold ID vs VGS
I D I 0e
qVGS
nkT
qV
DS
1 e kT
VDS from 0 to 0.5V
© Digital Integrated Circuits2nd
Devices
Sub-Threshold ID vs VDS
I D I 0e
qVGS
nkT
qV
DS
1 e kT
1 VDS
VGS from 0 to 0.3V
© Digital Integrated Circuits2nd
Devices
Summary of MOSFET Operating
Regions (sub-micron design)
Strong
Inversion VGS > VT
Linear (Resistive) VDS < VDSAT
Saturated (Constant Current) VDS VDSAT
Weak
Inversion (Sub-Threshold) VGS VT
Exponential in VGS with linear VDS dependence
© Digital Integrated Circuits2nd
Devices
Parasitic Resistances
Polysilicon gate
LD
G
Drain
contact
D
S
RS
W
VGS,eff
RD
Drain
© Digital Integrated Circuits2nd
Devices
Latch-up
To Backbias pn junction, body of
PMOS connected to Vdd and body of
NMOS to GND
• Parasitic bipolar transistors exist and form positive
feedback
• To cope with it, minimize the Nwell resistance and Psub
resistance
• Place as many N-Well and Substrate contacts as possible
© Digital Integrated Circuits2nd
Devices