Transcript Slide 1

Trends in Simulation at Nano-scale
Industrial perspective for university research trends
Steven J. Hillenius
Executive Vice President
Semiconductor Research Corporation
Needs for semiconductor simulation
 Managing complexity
 Creating multilevel design tools
 Determining the technology limits
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Example: Electronic Cell
Major functional blocks:
Sensing
Communication
Technology
Control
Convergence
Energy
~10 mm
S1
Energy
S2
Control
Constraints and Trade-offs:
Very limited space needs
to by divided between
sensors
power supply
electronic components
Layout:
3D microcircuits
Scaling Limits need
to be Understood
High Level needs for nano-scale devices
Integrated multilevel perspective:
 From molecule to mesoscale nanostructures to microscale thin films and
components to circuit level simulations of integrated devices
 From femto scale electronic transitions and nanoscale and microscale
molecular dynamics through macroscopic properties and behavior.
Complexity of materials modeling in nanotechnology is
increasing, due to increasing complexity from a variety of
factors, which include:
 Combinatorial System: Number of materials has continued to increase with
each technology.
 Size: Most of the devices have dimensions close to material domain sizes
(e.g. grain size, thin film thickness).
 Topography: Non-planar material structures modulate properties and
behavior, due to different materials at multiple interfaces.
 Topology of the nanostructures and molecules.
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Nanoscale simulation topics of importance to the
Semiconductor Industry
Process-related:
 Interface of high-K dielectric on difference channel materials (III-V,
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CNT, graphene, Ge… as function of surface orientation, termination…)
Ultra-rapid thermal annealing (activation and diffusion in micro-s time
frame)
Contact morphology
Strain in 3-D nanostructures
Defect formation due to strain
Process variability (line-width roughness, doping fluctuation, thermal
fluctuation…)
Self-assembly
Synthesis to structure & composition, especially for the interfaces and
multi-interface material structures.
Probe interactions with samples to enhance quantification of structure,
composition, and critical properties.
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Nanoscale simulation topics of importance to the
Semiconductor Industry
Device-related:
 Band structures in various III-V compounds
 Band structures in 3-D structures (FinFET, CNT, graphene nanoribbon…)
 Ballistic transport
 Dissipative quantum transport
 Transport through contact
 Strain-enhanced transport
 Device output variability (due to process variability)
 Reliability (High-K interface, hot-carrier, TDDB, NBTI, …)
 Analog performance (1/f noise, RTN…)
 Parasitics and cross-talk
 Modeling of novel memories (MRAM, PCRAM, ferroelectric, nanocrystals…)
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Nanoscale simulation topics of importance to the
Semiconductor Industry
Circuit-related:
 Compact modeling interface
 Predictive modeling for design of complex SoCs on advanced
processes.
 Reliability simulation (NBTI, TDDB, HCI, RTN) that were not as
evident in older processes..
 Higher frequency design (GHz to THz)
 Robust design elements
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