Transcript DEVELOPMENT OF VOLTAGE

Overview of Semiconductor
Technologies
• Key Semiconductor Technologies.
- Bulk silicon, SOI, III-V and II-VI semiconductors.
• Economic Impacts of Semiconductor Industry.
• Comparison of SIA Technology Node.
• Photovoltaic Technology and Market Analysis.
• Photonic Devices: LEDs and LDs.
Comparison of SIA Technology Node
Introduction Projections in 94 vs. 97
94’ Roadmap
97”Roadmap
Min feature(mm)
Lithography
DRAM bits/chip
mP xstrs/chip
mP xstrs/cm2
98
97
0.25
248nm
256M
28M
7M
01
99
0.18
248/193
1G
64M
13M
04
03
0.13
193
4G
150M
25M
07
06
0.08
EUV
16G
350M
50M
10________
09________
0.05
EUV?
64G
800M
90M
New Materials for the New Millennium:
• Copper metallization replaces Al-Cu interconnects.
• New dielectric materials such as Ta2O5, BaSrTiO3 are being used to
replace SiO2, Si3N4 to handle the increase of DRAM density. Thinner oxide
requires higher dielectric materials.
• New SOI technology to replace bulk Si- technology for higher packing density,
higher speed and lower power consumption.
Economic Impact of Semiconductor
Industry (S.I.)
• Global S.I. growth rate at 15%/year reaching $140 B in 97, which
reached to $300 B by early 2000 because of strong demand of
communications equipment and computers.
• S.I. growth holds down inflation: S.I. price index: -4.5%/yr vs. +3%/yr
for the rest of economy.
• S. I. offers higher wages and lower inflation.
• Faster technology diffusion (25%): Auto:60 yrs, Tel:35, TV:25, PC:13,
Internet:< 10 yrs.
• Drivers of semiconductor market growth: declining prices and
increasing performance: price/DRAM bit reduced by 25 to 30%/yr, while
IC complexity double every 18 months (Moore’s Law).
• Less’s Law: improvements in reliability have accompanied increases in
chip complexity:transistors/die increases from 2x103 in 71 to 108 in 98.
Current Status, Issues, and Trends
in Semiconductor Technologies
• Bulk Silicon Technologies:
- scaled down submicron VLSIs
- larger wafer size, 8, 10, 12”..
- copper interconnects
- high dielectric insulating materials
- Si/SixGe1-x technologies
• Silicon-On-Insulator (SOI) technologies:
- SIMOX and wafer bonding (WB).
- low power, low voltage, high-speed, and high density ULSIs.
3-D IC’s
• III-V and II-VI Compound Semiconductor Technologies.
- LEDs, LDs, detectors, MESFETS, HBTs, HEMTs,
quantum effect devices (QWIPs).
- photovoltaic devices (solar cells) technology
- wide band gap and high temperature devices
(InGaN, GaN, AlGaN, SiC, diamond)
Comparison of the World
Semiconductor Industry
Delay Time vs. Power Dissipation for CMOS and
Other Devices
Exponential Increase of DRAM Density vs. Year
(Based on SIA Road Map)
Microprocessor Computational Power vs. Year
Key Silicon-On-Insulator (SOI)
Technologies
• Separation by Implantation of Oxygen (SIMOX) Process
• Wafer Bonding and SIMOX- WB Process
• Zone Melting Recrystallization (ZMR) Process
• Epitaxial Lateral Overgrowth (ELO) Process (3-D IC’s)
• Fully Isolation of Porous Silicon (FIPOS) Process
Band Gap Energy vs. Lattice Constant for
Elemental and Compound Semiconductors
A Bright Future for Blue/Green LEDs
(Highly luminous III-V nitride based LEDs)
Color
Wavelength (nm)
Violet
Blue
< 450
450 - 490
(InGaN/AlGaN LED)
Green
490 - 560
(InGaN/AlGaN or ZnSe LED)
Yellow
560 - 590
(AlInGaP LED)
Orange
Red
(AlGaAs LEDs)
590 - 630
> 630
Photovoltaic (PV) Market Analysis
• PV Market Growth Rate:
Solar cell module production average increase: 14% per year 90-97, and
production jumped by 38% in 1997 to 122 MWp. Growth rate is expected
to increase at a rate of 20%/year over the next 15 years with potential
annual module shipments of around 2,25 GWp (about $3billions per year by
2010) in the year 2010.
• PV Markets:
- consumer electronic products (14%): calculators, watches, lanterns...
- off-grid residential power systems (35%): cottages, rural village,
homes and offices.
- off-grid industrial power system (33%) : telecom.repeaters.
- off-grid connected PV systems (18%):government and/or utility
demons.
Key PV Technologies
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•
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Single crystal Si solar cells.
Poly Si solar cells.
a- Si thin film solar cells.
Ribbon Si solar cells.
CdTe thin film solar cells.
CIGS (CuInGaSe) thin film solar cells.
III-V semiconductor (GaAs, InP, GaInP..) solar cells
- single and multi-junction solar cells
• Concentrator solar cells.