Transcript Applications of Micro Electro Mechanical Systems

Applications of
Micro Electro Mechanical Systems
(MEMS)
Jobin Philip
Introduction

IC invention

Large number of transistors on single silicon chip
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Interconnected to functional circuits
Micro-fabricated Membrane Mirrors
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12 mm in diameter
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Less than 1um in thickness
Micro-fabricated Membrane Mirrors
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Optical Switching
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High optical efficiency
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Good potential for aberrations correction
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Coupling efficiency of 3000 interconnections
Micro-fabricated Membrane Mirrors
Two Axis Micro-mirror
Micro-Mirror
Micro-Mirror
Optical Switch
2x2 Optical Switch
Cross State
Bar State
Optical Switch
NxN Optical Link
Agilent Bubble Switch
Segmented Mirrors
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Space Optical Telecommunication
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Reliable, Small in size, Light in weight, & Easy to
fabricate
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Air Turbulence causes optical aberrations
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Quick response time, therefore able correct optical
aberrations
Segmented Micro-Mirrors
Segmented Micro-Mirrors
Grating Light Valve
(GLV)
Down ribbons
Diffracted Incident
Incident Reflected
Diffracted
Up ribbons
Ribbons
Oth Mode
1/4 l
+1st Mode
+3rd Mode
Silicon Light Machines: http://www.siliconlight.com
GLV Projection System
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Digital Projection System using Grating Light
Valve
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If pixel is “off”, light is reflected straight off GVL into
the absorbing screen
If pixel is “on”, light is diffracted at an angle,
propagating through the lens to the focal plane
Prism
Lens
GLV
Screen
Color Wheel
Optical Input
Focal Plane
Next Generation Projectors
Question…???
Optical Switch