Transcript SEMI STEP: Introduction to SEMI S2-0706

SEMI STEP:
Introduction to SEMI S2-0706
The Future of SEMI S2
Chris Evanston, PE
Program Manager
Earth Tech Microelectronics
[email protected]
Introduction to SEMI S2-0706
The Future of SEMI S2 Agenda
• Where have we been
– The origin of S2
– The development of S2
• The Current Status of S2
– Inside SEMI
– Outside SEMI
• Projections
– Future Development: Near Term
– Future Development: Long Term
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SEMI STEP: Introduction to SEMI S2-0706
The Origin of SEMI S2
• As the semiconductor industry developed it became
apparent that no established standards addressed the
safety concerns of the industry
• The natural response was for companies to develop their
own standards
• The next rational step in the evolution of this process was
to develop on common industry standard
– This would reduce cost because equipment manufacturers
would not have to comply with numerous standards
– An improve safety by driving toward best industry practices.
• Out of this process SEMI S2 was born
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SEMI STEP: Introduction to SEMI S2-0706
SEMI S2-91 A Revolution
in Product Safety
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Developed with
strong end user
input
Comprehensive
nature
Single-point
failure clause
Report as an
information
document
Requires hazard
evaluation
Continuing
development
SEMI STEP: Introduction to SEMI S2-0706
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Electrical, Interlocks, EMO
Robotics
Mechanical & Robots
Earthquake
Fire Protection
Radiation
Chemical & Industrial Hygiene
Noise
Environmental
Ventilation and Exhaust
Lasers
Ergonomics
The Evolution of SEMI S2
SEMI S2-91 (Initial Guideline)
Small Upgrades and Clarifications
SEMI S2-93 (First Complete Revision)
Internationalization + Major Upgrades and Clarifications
SEMI S2-0200 (Second Complete Revision)
Incremental Upgrades and Revisions
The Last Complete
Revision Planned
SEMI S2-0703 (Only Line Item Changes)
Incremental Upgrades and Clarifications
SEMI S2-0706 (Line Items on 3 Year Cycle)
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SEMI STEP: Introduction to SEMI S2-0706
S2 is an Umbrella Document
Major
Revision
Recently
Passed
Major
Revision
In The
Works
S2
S1
S3
S6
S8
Labels
Heated Baths
Ventilation
Ergonomics
S10 S14
Risk
Fire
S18
S22
S23
Silane
Electrical
Energy
Significant New Support Guidelines
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Although S2 may not
change significantly
Its supporting
standards are still
evolving
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SEMI STEP: Introduction to SEMI S2-0706
Use Of S2 End Users and Regulators
END USERS
It Has Become the essential Safety Standard
Used By End Users World Wide
US Authorities
Some Fire Marshals Have
Been Using It in the US
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SEMI STEP: Introduction to SEMI S2-0706
European Authorities
Many Use It to Support their
MD/LVD Compliance Efforts
S2 Outside the
Semiconductor Industry
• Flat Panel Industry is developing a standard based on S2
• The use of S2 in non-semiconductor manufacturing
environments has been growing.
– Disk Drive Industry
– Medical Device Companies
• It is viewed by increasing numbers of companies outside
the semiconductor industry as a sound way to address
safety issues in technology driven industries.
• The growth of S2 beyond the semiconductor industry is
something the industry never envisioned.
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SEMI STEP: Introduction to SEMI S2-0706
Projections For The Near Term
Development of SEMI S2
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No Major Changes in SEMI S2 appear on the horizon.
Incremental line item changes will continue on a three year
revision cycle
Potential significant changes will occur in SEMI S2’s
supporting guidelines – this should be watched
S2 application has already saturated the semiconductor
market place for production equipment – but its use for
related equipment seems to be growing (Abatement
equipment is one example)
Increasing use in related industries and non-related
technology driven industries appears to be an emerging
trend.
SEMI STEP: Introduction to SEMI S2-0706
Projections For The Near Term
Development of SEMI S2
6)
The future of SEMI S2’s use by regulators is less clear.
However, it seems that as regulators become more aware
of how the industry manages its own safety concerns they
will continue to look at it as a useful resource
Summary
S2 will continue to grow in technical sophistication.
Its use inside and outside the industry will continue to grow.
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SEMI STEP: Introduction to SEMI S2-0706
Projections For The Long Term
Development of SEMI S2
The complexity of the semiconductor manufacturing process and
its diverse hazards is ultimately what drove the emergence
of S2
This increasing severity and diversity of hazards as well as
growing complexity of equipment is a reality that describes
more and more industries in the 21st century.
Therefore, it seems reasonable to conclude that the S2
approach to safety is something that is going to expand.
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SEMI STEP: Introduction to SEMI S2-0706
Projections For The Long Term
Development of SEMI S2
Because S2 itself is driven by the complexity of the
manufacturing process, it is reasonable to conclude that it
will continue to be an increasingly major factor in the long
term both inside and outside the semiconductor industry.
If other technology driven industries require significant variations
from S2, then the S2 approach will still continue to grow
because the increasing complexity of technology driven
production requires an approach of this type to control
hazards inherent in those protection processes.
The revolutionary approach to product safety that started
with S2-91 will continue to expand because the needs of
technology driven industries demand it.
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