Transcript Radiant Overview - Radiant Technologies, Inc.

Radiant Technologies, Inc.
Ferroelectric Test & Technology
Joe T. Evans, Jr.
August 22, 2016
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Radiant Technologies, Inc.
Radiant Technologies
• Focus on non-linear electromechanical materials
technology. The company
• Designs and manufactures test instruments and their
operating procedures
• Fabricates thin ferroelectric film devices
• Integrates the two disciplines to create unique
functions.
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Test Instruments
Radiant pioneered
ferroelectric test with
the development of the
first commercial test
system in 1989 and now
makes a variety of
testers and fixtures.
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Test Instrument vs Integrated
Ferroelectrics
What follows is a series of measurements demonstrating the
properties of Radiant’s thin PZT capacitors measured with
Radiant test equipment.
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IC Scale Cryogenic Testing
Lakeshore CRM-EM-HF
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IC Scale Cryogenic Testing
Hysteresis & Remanent @ 20V
[ AB403 ]
50
40
30
uC/cm2
20
10
0
-10
-20
-30
-40
-50
-20
-15
-10
-5
0
Voltage
5
10
15
20
0.25m-thick PZT from 10 K to 310 K
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Quantum Design PPMS P450
The QD Model P450 Multifunction Probe can test disc-shaped bulk
capacitors at high voltage down to 2.4 K.
B
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Bulk Capacitors vs Temperature
Many surprises await at lower temperatures.
Hyster esis at 300K, 253K, & 100K
[ CTS 3241 HD ]
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253K 700V 10s: Polarization (µC/cm2)
100 K 950V 1s: Polarization (µC/cm2)
300 K 580V 10s: Polarization (µC/cm2)
30
20
10
uC/cm2
The sample to the
right is a commercial
piezoelectric PZT
from CTS Wireless in
Albuquerque
measured in a PPMS
that indicates a
normal hysteresis
loop at room
temperature but
unexpectedly has no
remanent polarization
at 100 K.
0
-10
-20
-30
-1000
-800
-600
-400
-200
0
Voltage
200
400
600
800
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1000
Leakage vs CV vs Remanent
Polarization
Decomposing the hysteresis loop on a probe
station.
Hysteresis Parameters
uC/cm^2, uA/cm^2, uF/cm^2
50
40
30
20
10
Rhyst
0
-6
-4
-2
-10
0
2
4
6
SW CV*10
nSW CV*10
-20
SW IV*2.5
-30
nSW IV*2.5
-40
Volts
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High Voltage Polarization &
Piezeoelectric Loops
Radiant Piezoelectr ic Refer ence Sample
[ PZT 12.75mm Dia - 1mm Thick ]
Proc. Hyst
Proc. Disp
Polarization (µC/cm2)
30
20
10
0
-10
-20
Displacement (Microns)
-30
0.5
0
-0.5
-1.0
-1200
-1000
-800
-600
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-400
-200
0
Volts
200
400
600
800
1000
Bulk Capacitor
displacement at
high voltage
and elevated
temperature.
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Thin Film Polarization &
Piezeoelectric Loops
The laser vibrometer
can measure the
piezoelectric motion
of a thin ferroelectric
film capacitor
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Thin Solid Capacitor Piezo Loop
AFM Reference
[ Cap A ]
Proc. Hyst
Proc. Disp
25
Polarization (µC/cm2)
AFMs work too. Surface
piston of the 1µm-thick
PNZT at 25 volts and 500
hertz using an AFM. The
capacitor is clamped by the
substrate.
0
-25
15
Angstroms
10
5
0
-5
-25
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-20
-15
-10
-5
0
Volts
5
10
15
20
25
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Thin Film PZT on Cantilever
Displacement vs Volts
0.5 um 52/48 PZT on 75mmx5mm Cantilever
10
Capturing e31 for
a thin film on a
cantilever surface
is a 3rd technique.
9
8
7
Microns
6
5
4
3
2
1
0
-1
-8
-6
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-4
-2
0
Period (ms)
2
4
6
8
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Ferroelectric Transistor Operation
Switching vs Nonswitching IV
[ ND1-0903-2 ]
0.0000050
0.0000045
0.0000040
0.0000035
current
0.0000030
0.0000025
0.0000020
0.0000015
0.0000010
0.0000005
Source & Drain
0
-6
-4
-2
0
Volts
InOx
2
4
6
I2C DAC
Module
I2C Port
Premier II
d
g
Drive
Return
PZT
Gate
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Sensor
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s
Radiant Technologies
• Integrated thin-ferroelectric-film capacitors.
 Radiant has developed a
manufacturable process
for discrete ferroelectric
capacitors.
 Radiant inserts packaged
capacitors into its testers
as test references.
 Radiant processes thin
PZT film wafers and
devices for researchers
studying non-linear
materials.
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Membrane Capacitors
• A three micron membrane with an embedded 1mthick PNZT capacitor.
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Membrane Capacitors
• Remanent strain movie if the same capacitor.
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pMEMs Devices
.
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We have work still to
do to reliably generate
reproducible devices.
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Mechanically Coupled Capacitors
DRIVE
Actuator
Actuator
Sensor
RETURN
1.2mm
Sensor
Actuator
GND
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1
2
mm
White Light
Membrane
Numarski
A 1-square-millimeter capacitor with the majority of its
surface as a membrane. In white light the membrane looks
smooth but in Numarski the membrane is unmistakable.
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2
16mm
Membrane
A 16 square millimeter membrane soldered directly to a PCB
with an on-board charge amplifier that connects to the
Radiant EDU educational tester using telephone cable.
Pyroelectric constant is -22nC/cm2/K.
The membrane is too fragile to be
touched by a human.
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Autonomous Analog Switch
This entire PCB with discrete components and a packaged
ferroelectric capacitor can be shrunk into the same solid state
switch package on the PCB in the left image. This circuit can
stand-alone and resist disturbs from dramatic power-line
voltage events.
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Nuts & Volts
Magazine
“A Simple Ferroelectric
Memory”
February 2015 Issue
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Ferroelectric Circuits
Autonomous Event Detector
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Event Input Line
Output Buffer
Ferroelectric
Capacitor
Input Overvoltage
Protection
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Demo Board - Piezo
Piezo Flapper
Latch
Event
Detector
This piezoelectric flapper is
a Measurement Specialties,
Inc. LDT0-28K Piezo Film
Sensor. Bent 90 degrees, it
generates exactly 7nC of
charge,
precisely
the
amount required to saturate
one of Radiant’s Type AB
20/80 PZT or Type AD
3/20/80 PNZT thin film
capacitors.
The Radiant ferroelectric
capacitor is encased in the
TO-18 transistor package
on the Event Detector
board.
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Magnetoelectric Sensor
Deposit magnetically sensitive material on membranes to
make magnetic field sensors. Below are dice from a wafer
prepared for this experiment but which have not yet seen the
backside DRIE. This project, executed in a CRADA with
SPAWAR, is difficult!
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Best Magnetoelectric Response
(so far)
Compare CapB Viring/+Pole/-Pole @ 50G
[ 1mm2 type AC w/nickel membrane ]
Cap B 180d -Pole: Sie-Trace Loop Avg. Filter: 1
Cap B 180d +Pole: Sie-Trace Loop Avg. Filter: 1
0.8
Cap B 180d Virgin: Se-Trace Loop Avg. Filter: 1
0.6
0.4
pC
0.2
0
-0.2
-0.4
-0.6
-50
-40
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-30
-20
-10
0
Oersted
10
20
30
40
50
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Autonomous Event Detector Set
by a Magnetic Field?
Can we magnetomechanically switch
the ferroelectric capacitor and control
the switch?
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