Transcript DHM Reflectometry

DHM®
3D Reflectometry Module for DHM
Measurement of (semi-)transparent
patterned depositions and liquids
This module is unique in optical
microscopy for 3D structures within a
range of nanometer to several microns!
Reflective vs. Semi-Transparent Materials
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Analysis tool
Sample 1: Gold
Sample 2: SiO2 on Si
Purely reflective surface
Staircase
X No information
on steps heights
Classical Optical
Microscopy
Full light spectrum
• Advanced
Conclusion
Multi-reflection on semitransparent structure
X Colored information
on steps heights but
not quantitative
Optical Profilometer
x
x
 measures true profile
 measures true profile
X does not measure true profile
DHM Reflectometry
 measures true profile
X
X
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A Simple Liquid Drop on Silicon
Introduction
nair=1.0
DHMReflectometry
nLiq1=1.4
• Uniqueness
• Applications
• Analysis tool
• Advanced
nSi=3.8
Interferometer:
acquisition of an
Optical Measure
Conclusion
Reflectometry Module:
Interpretation based on
physical laws of optics
DHM Reflectometry:
Geometrical Measure
 A hole is measured
Not an artifact but a very valuable measurement
on multi-reflection:
low reflection on the drop,
high reflection on the substrate
Different refractive indices between liquid
and air: slower light speed through the drop
Reconstructed height
 The drop’s true profile is measured!
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Challenge with (Semi-)Transparent Materials
Multilayer schematic
Introduction
DHMReflectometry
• Uniqueness
Layers with thicknesses di and
reflective indices ni (i=1,2,…)
• Applications
Ψill is the illumination wave
• Analysis tool
Ψr (r=0,1,…) are the multiple
reflections
• Advanced
Conclusion
The reflected wavefront is composed of
Reflection from the top layer
Multiple reflections within each interface
Topography measurement depends on each layer’s
refractive indices and thicknesses
DHM Reflectometry retrieves both refractive indices
and thicknesses
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A Unique Measuring Module
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Analysis tool
• Advanced
Conclusion
Benefits from DHM’s unique features
3D measurement without scanning
Considers global reflected signal
No need to differentiate a focal point on each interface as
with confocal methods
Uses a laser specific wavelength
not the full spectrum of white light
Method verified and validated by scientific research
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What’s Unique with DHM Reflectometry
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Analysis tool
• Advanced
Measure semi-transparent
3D structured layers
Fast
Insensitive to vibration
Patterns with nano- to
micrometric thickness range
Conclusion
Measure dynamic processes
True real time acquisition,
Non-scanning
Non-damaging
Non-invasive / Non-contact
Moving liquid drop
3D study at camera rate of a (semi-)transparent
material
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Thicknesses of Nanometric steps
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Geometrical
• Refractive index
Successful comparison with mechanical profilometry
Non-contact, non-damaging
Step edges are better highlighted with DHM
Fast 3D characterization
• Analysis tool
• Advanced
Conclusion
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SiO2 staircase on Si wafer
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Crater Depth in Si – SiO2 – Au
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Geometrical
• Refractive index
• Analysis tool
Structure too large to be measured with AFM
Successful profile comparison with other standard methods
DHM measures in nano- to micrometric range
Non-contact, non-damaging
Fast 3D characterization
• Advanced
Conclusion
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SIMS Calibration (Secondary Ion Mass Spectrometry for depth profiling)
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Fluid Topography on a Substrate
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Geometrical
• Refractive index
• Analysis tool
• Advanced
Non-contact DHM is ideal for liquid structures !
True real time 3D topography without scanning
Insensitive to vibration
Live acquisition enables study of micro-fluidics in 3D with
dynamic phenomena
Tetraethylene Glycol deposed on Si wafer
Conclusion
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Liquid Deformed by an Air-jet
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Geometrical
• Refractive index
• Analysis tool
• Advanced
Study of temporal changes of a soft coating material
Full field of view without scanning
Non-contact
Flexible instrument
Large working space allows experiment build-up around the sample
Possibility of Measurement of an upside down sample
Conclusion
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Refractive Index Determination
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Geometrical
• Refractive index
• Analysis tool
• Advanced
Conclusion
DHM Reflectometry by fitting equations of physical
laws
With a precision better than
2x10-2 for the deposited material
1x10-3 for the substrate material (wafer)
Refractive index enables determination of physical
related properties
Dielectric constant/ permittivity (Hall Effect)
Local chemical concentration (e.g. Sugar dissolution)
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Acquisition and Analysis Software
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Analysis tool
• Advanced
DHM Koala Software for the acquisition
DHM Reflectometry software module for measurement and analysis
Ease of use with a large database
Materials with refractive indices
Sample models: multi-layer composition and thicknesses
Conclusion
Fast calculation
Layer thicknesses
Refractive indices
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Geometrical Measurement
Introduction
Fast measurements 1D/2D Profile of
DHMReflectometry
1. Layers thickness (nanometric up to several tens of µm)
• Uniqueness
• Applications
• Analysis tool
• Advanced
Conclusion
2. Craters depth (<0, down to -10µm)
3. Deposition height (>0, up to several tens of µm in live
mode)
Measurements on up to 3 layers
Or more if layer model is known
Set of reference surface
→ zero setting 0
3
Layer 1
1
Layer 2
2
Layer 3
Layer 4
Semi-infinite
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Advanced Dynamic Study
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Analysis tool
• Advanced
Combination with Stroboscopic synchronization
for investigation of semi-transparent MEMS/MOEMS
With high speed camera for advanced microfluidics
applications
Modular system, easily integrated for in-line QC
Conclusion
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Lyncée Tec – a Pioneer Company
Introduction
DHMReflectometry
Lyncée Tec
Leader in holographic microscopy
• Uniqueness
Owner of the key patents of the technology
• Applications
10 years of market experience
• Analysis tool
• Advanced
Conclusion
A team of experts
Gives you the appropriate support
Works with you to offer you the customized solution to meet your
needs and solve your problems
Offers competent After-Sales Service
Offers a Price Competitive solution
Fast measurement
User friendly and flexible set-up
A reliable partner focusing on continuous improvement
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DHM Reflectometry: New Possibilities
Introduction
DHMReflectometry
• Uniqueness
• Applications
• Analysis tool
Topography of challenging (semi-)transparent
materials
Patterned multi-layer thin films
Multi-layered MEMS
Soft materials
Patterned Semiconductors
Complex Nano-structures
• Advanced
Conclusion
Study of dynamic processes
Microfluidics and Wettability study
Dissolution, evaporation, corrosion, etc.
During Manufacturing, for ex. Deposition
And many more!
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Scientific Papers
T. Colomb, Y. Emery, "Digital Holographic Reflectometry for SemiTransparent Multilayers Measurement“, in ISOT'12 International
Symposium on OptoMechatronic Technologies, Paris, France; 29-31 Oct.
2012. (2012).
T. Colomb, Y. Emery, "Réfléctométrie Holographique Numérique
Appliquée à la Métrologie des Fluides“, in Holophi, 1ere rencontre
francophone d'holographie numérique appliquée à la métrologie des
fluides 21-22 octobre 2010, CORIA, Rouen, France. (2010).
T. Colomb, S. Krivec, H. Hutter, A. A. Akatay, N. Pavillon, F. Montfort, E.
Cuche, J. Kühn, C. Depeursinge and Y. Emery, "Digital Holographic
Reflectometry“, Optics Express 18 (4), 3719–3731 (2010).
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