Transcript CMOS Fabrication

CMOS Fabrication
EMT 251
Objectives
• To discussed the fundamentals of
CMOS fabrication steps.
• To examined the major steps of the
process flow.
• To overview the cross section view of
a circuit
• Photolithography (photo)
– Process of transferring pattern on mask to photoresist
layer on wafer surface (pre-pattern the chip)
• Etching
– Process of permanently removed the unwanted part of
design on wafer surface to get the desired pattern
• Diffusion
– Process of introducing dophant layer by movement of
dophant atoms from high concentration to low
concentration area at high temperature
• Ion implantation
– Process of introducing dophant layer by bombardment of
high energy dophant ion in high electric field chamber
• Oxidation
– Process of growing thick or thin SiO2 layer depend on
oxide application
• CMP
– Process to physically grind flat to have a planar surface
for better exposure at photo process.
Chip making Process
Introduction
MOSFET
NMOS
PMOS
CMOS
MOSFET
Gate
Drain
Source
Metal Oxide Semiconductor Field Effect Transistor
Source (Arsenic, Phosphorous, Boron)
Drain (Arsenic, Phosphorous, Boron)
Gate (Aluminum, Polysilicon)
NMOS
P-type substrate
N-type dopant for Source & Drain
Inversion layer is formed to conduct electricity
NMOS
P-type substrate
N-type dopant for Source & Drain
Inversion layer is formed to conduct electricity
PMOS
N-type substrate
P-type dopant for Source & Drain
Inversion layer is formed to conduct electricity
PMOS
N-type substrate
P-type dopant for Source & Drain
Inversion layer is formed to conduct electricity
CMOS
A combination of both NMOS & PMOS technology
Most basic example: inverter
PROCESS FLOW
WELL FORMATION
ISOLATION FORMATION
TRANSISTOR MAKING
INTERCONNECTION
PASSIVATION
CMOS FABRICATION PROCESS
well formation
• Start with clean p-type
substrate (p-type wafer)
CMOS FABRICATION PROCESS
well formation
• Grow epitaxy layer (made from
SiO2) as mask layer for well
formation
CMOS FABRICATION PROCESS
well formation
Well will be formed
here
• By *photolithography and
etching process, well opening are
made
*photolithography and etch processes are shown in next slides
Photolithography (CED)
photoresist
P-substrate
UV light
Si02
• Photoresist coating (C)
• Masking and exposure
under UV light(E)
Opaque
area • Resist dissolved after
developed (D)
Transparent
mask
P-substrate
area
– Pre-shape the well
pattern at resist layer
etching
P-substrate
P-substrate
• Removing the unwanted
pattern by wet etching
• Resist clean
• Desired pattern formed
CMOS FABRICATION PROCESS
well formation
Phosphorus ion
• Ion bombardment by ion implantation
• SiO2 as mask, uncovered area will
exposed to dophant ion
CMOS FABRICATION PROCESS
isolation formation
Thick oxide
• Increase SiO2 thickness by
oxidation at high temperature
• Oxide will electrically isolates
nmos and pmos devices
CMOS FABRICATION PROCESS
transistor making
nmos will
be formed
here
pmos will
be formed
here
LOCOS (isolation structure)
• By photolithography and etching
process, pmos and nmos areas
are defined
CMOS FABRICATION PROCESS
transistor making
Gate oxide
• Grow very thin gate oxide at
elevated temperature in very
short time
CMOS FABRICATION PROCESS
transistor making
polisilicon
• Deposit polisilicon layer
CMOS FABRICATION PROCESS
transistor making
gate
• Photolithography (photo) and
etching to form gate pattern
CMOS FABRICATION PROCESS
transistor making
Arsenic ion
photoresist
• Photo process to define the nmos’s
active (source and drain) area and
VDD contact
• Ion implantation with Arsenic ion for
n+ dophant.
• Photoresist and polisilicon gate act as
mask
CMOS FABRICATION PROCESS
transistor making
source
drain
VDD
contact
• Nmos’s Source and drain with VDD
contact formation
• Resist removal
CMOS FABRICATION PROCESS
transistor making
Boron ion
photoresist
• Photo process to define the GND contact
and pmos’s active area (source and drain)
• Ion implantation with boron ionto have p+
dophant
• Photoresist and gate act as mask
CMOS FABRICATION PROCESS
transistor making
GND
contact
Pmos’s
drain
Pmos’
source
• Pmos’s source and drain
formation with GND contact
• Resist removal
CMOS FABRICATION PROCESS
interconnection
SiO2
• Deposit SiO2 layer through
out wafer surface
CMOS FABRICATION PROCESS
interconnection
contact
• Photo and etching process to
make contact
CMOS FABRICATION PROCESS
interconnection
Metal 1
• Metal 1 deposition throughout
wafer surface
CMOS FABRICATION PROCESS
interconnection
• Photo and etching processes to
pattern interconnection
Mask Layout
Mask Layout
Mask Layout
Mask Layout
A’
A
Metal 1
oxide
n+
n+
p+
p+
N-well
p-substrate
Exercise
B
B’
Exercise
GLOSSARY
•
Photolithography (photo)
•
Etching
•
Diffusion
•
Ion implantation
•
Oxidation
•
CMP
– Process of transferring pattern on mask to photoresist layer on wafer
surface (pre-pattern the chip)
– Process of permanently removed the unwanted part of design on wafer
surface to get the desired pattern
– Process of introducing dophant layer by movement of dophant atoms
from high concentration to low concentration area at high temperature
– Process of introducing dophant layer by bombardment of high energy
dophant ion in high electric field chamber
– Process of growing thick or thin SiO2 layer depend on oxide application
– Process to physically grind flat to have a planar surface for better
exposure at photo process.
THE END