(MAPS) for Vertexing Applications
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irfu
saclay
Achievements & Perspectives of MIMOSA Sensors
(MAPS) for Vertexing Applications
Christine Hu-Guo (IPHC)
on behalf of IPHC (Strasbourg) & IRFU (Saclay) collaboration
Outline
Achieved MAPS (Monolithic Active Pixel Sensors) performances
R&D for improving MAPS performances
Increase readout speed Fast readout architecture
Applications and perspectives
Improve radiation tolerance
Projection beyond present (2D sensors) & perspectives
Conclusion
Development of MAPS for Charged Particle Tracking
In 1999, the IPHC CMOS sensor group proposed the first CMOS pixel sensor (MAPS)
for future vertex detectors (ILC)
Numerous other applications of MAPS have emerged since then
~10-15 HEP groups in the USA & Europe are presently active in MAPS R&D
Original aspect: integrate sensitive volume (EPI layer) and front-end readout
electronics on the same substrate
Charge created in EPI, excess carries propagate
thermally, collected by NWELL/PEPI , with help of reflection
on boundaries with P-well and substrate (high doping)
Compact, flexible
EPI layer ~10–15 µm thick
thinning to ~30–40 µm permitted
Standard CMOS fabrication technology
Q = 80 e-h / µm signal < 1000 e-
Cheap, fast multi-project run turn-around
Room temperature operation
R.T.
Attractive balance between granularity, material budget, radiation tolerance, read
out speed and power dissipation
BUT
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Very thin sensitive volume impacts signal magnitude (mV!)
Sensitive volume almost un-depleted impacts radiation tolerance & speed
Commercial fabrication (parameters) impacts sensing performances & radiation tolerance
NWELL used for charge collection restricts use of PMOS transistors
Vertex-2009
IRFU - IPHC [email protected]
2
Achieved Performances with Analogue Readout
MAPS provide excellent tracking performances
Detection efficiency ~100%
ENC ~10-15 eS/N > 20-30 (MPV) at room temperature
MIMOTEL
Single point resolution ~ µm, a function of pixel pitch
~ 1 µm (10 µm pitch), ~ 3 µm (40 µm pitch)
M18
MAPS: Final chips:
MIMOTEL (2006): ~66 mm², 65k pixels, 30 µm pitch
MIMOSTAR
EUDET Beam Telescope (BT) demonstrator
MIMOSA18 (2006): ~37 mm², 262k pixels, 10 µm pitch
Chip dimension: ~2 cm²
High resolution EUDET BT demonstrator
MIMOSTAR (2006): ~2 cm², 204k pixels, 30 µm pitch
LUSIPHER (2007): ~40 mm², 320k pixels, 10 µm pitch
Test sensor for STAR Vx detector upgrade
LUSIPHER
Electron-Bombarded CMOS for photon and radiation imaging detectors
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Vertex-2009
IRFU - IPHC [email protected]
3
Radiation tolerance (preliminary)
Ionising radiation tolerance:
O(1 M Rad) (MIMOSA15, test cond. 5 GeV e-, T = -20°C, tint~180 µs)
Integ. Dose
0
1 Mrad
Noise
9.0 ± 1.1
10.7 ± 0.9
S/N (MPV)
27.8 ± 0.5
19.5 ± 0.2
Detection Efficiency
100 %
99.96 % ± 0.04 %
tint << 1 ms, crucial at room temperature
Non ionising radiation tolerance: depends on pixel pitch:
20 µm pitch: 2x1012 neq /cm2 , (Mimosa15, tested on DESY e- beams, T = - 20°C, tint ~700 μs)
Fluence (1012neq/cm²)
S/N (MPV)
Det. Efficiency (%)
2.1
14.7 ± 0.3
99.3 ± 0.2
5.8 (5/2)
8.7 ± 2.
77. ± 2.
5.8 (4/2)
7.5 ± 2.
84. ± 2.
10 µm pitch: 1013 neq /cm2 , (MIMOSA18, tested at CERN-SPS , T = - 20°C, tint ~ 3 ms)
0
1026
28.5 ± 0.2
99.93 ± 0.03
6
680
20.4 ± 0.2
99.85 ± 0.05
10
560
14.7 ± 0.2
99.5 ± 0.1
parasitic 1–2 kGy gas N ↑
Further studies needed :
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0.47
21.8 ± 0.5
99.9 ± 0.1
5.8·1012neq/cm² values derived with standard and with soft cuts
Fluence (1012neq/cm²)
Q cluster (e-)
S/N (MPV)
Det. Efficiency (%)
0
27.8 ± 0.5
100.
Tolerance vs diode size, Readout speed, Digital output, ... , Annealing ??
Vertex-2009
IRFU - IPHC [email protected]
4
System integration
Industrial thinning (via STAR collaboration at LBNL)
~50 µm, expected to ~30-40 µm
Ex. MIMOSA18 (5.5×5.5 mm² thinned to 50 μm)
Development of ladder equipped with MIMOSA chips (coll. with LBNL)
STAR ladder (~< 0.3 % X0 ) ILC (<0.2 % X0 )
LVDS drivers
PIXEL Ladder
10 MAPS Detectors
low mass / stiffness
cables
to motherboard
40 LVDS Sensor output pairs
clock, control, JTAG, power,
ground.
% radiation length
MIMOSA detector
0.0534
Adhesive
0.0143
Cable assembly
0.090
Adhesive
0.0143
CF / RVC carrier
0.11
0.282
Total
Edgeless dicing / stitching alleviate material budget of flex cable
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18-21/05/2009
Vertex-2009
FEE09
IRFU - IPHC [email protected]
IRFU - IPHC [email protected]
5
MAPS performance Improvement
R&D organisation : 4 (5) simultaneous prototyping lines
MIMOSA22
Architecture of pixel array organised
Pixel array
136 x 576
pitch 18.4 µm
128
discriminators
in //
columns read out:
Pre-amp and CDS in each pixel
A/D: 1 discriminator / column (offset
compensation)
Power vs Speed
Power Readout in a rolling shutter
mode
Speed Pixels belonging to the same
row are read out simultaneously
MIMOSA8 (2004), MIMOSA16 (2006),
MIMOSA22 (2007/08)
Zero suppression circuit:
SUZE-01
Reduce the raw data flow of MAPS
Data compression factor ranging from 10
to 1000, depending on the hit density per
frame
SUZE-01 (2007)
Pixel Array
Analogue processing / pixel
A/D: 1 ADC ending each column
Zero suppression
Bias DC-DC Data transmission
4–5 bits ADCs (~103 ADC per sensor)
5-bit ADC
Serial link transmission with clock recovery
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Prototype (2008-2009)
Vertex-2009
Potentially replacing column-level
discriminators
5 bits: sp ~1.7–1.6 µm
4 bits: sp < 2 µm for 20 µm pitch
Next step: integrate column-level ADC
with pixel array
Voltage regulator & DC-DC converter
IRFU - IPHC [email protected]
6
MIMOSA22 + SUZE-01 Test Results
MIMOSA22: (15 µm EPI) 136 x 576 pixels + 128 column-level discriminators
Laboratory test:
Temporal Noise: 0.64 mV 12 e FPN:
0.22 mV 4 e-
0.64 mV
Beam test at CERN SPS (120 GeV pions)
Threshold ~ 4 mV 6 x σ noise
Detection Efficiency > 99.5%
Single point resolution < 4 µm
Fake rate < 10-4
0.22 mV
SUZE-01:
Lab. test :
Design performances reproduced up to 1.15 × design read-out frequency (115 MHz at room Temp ):
No pattern encoding error, can handle > 100 hits/frame at rate ~200 ns per pixel row
Still to do : improve radiation tolerance (SEU, SEL) of digital circuits (including memories)
14-18/09/2009
Vertex-2009
IRFU - IPHC [email protected]
7
MIMOSA26: 1st MAPS with Integrated Ø
CMOS 0.35 µm OPTO technology, Chip size : 13.7 x 21.5 mm2
Integration time: ~ 100 µs
R.O. speed: 10 k frames/s
Hit density: ~ 106 particles/cm²/s
Testability: several test points
implemented all along readout
path
Pixels out (analogue)
Discriminators
Zero suppression
Signal transmission
Pixel array: 576 x 1152, pitch: 18.4 µm
Active area: ~10.6 x 21.2 mm2
In each pixel:
Amplification
CDS (Correlated Double Sampling)
Row sequencer
Width: ~350 µm
1152 column-level discriminators
offset compensated high
gain preamplifier followed
by latch
Zero suppression logic
Reference Voltages
Buffering for 1152
discriminators
I/O Pads
Power supply Pads
Circuit control Pads
LVDS Tx & Rx
Current Ref.
Bias DACs
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Vertex-2009
Readout
controller
JTAG controller
Memory
management
Memory IP blocks
IRFU - IPHC [email protected]
PLL, 8b/10b
optional
8
Test MIMOSA26 (Lab. + beam test)
Measured temporal noise = 0.6-0.7 mV and FPN = 0.3-0.4 mV for pixel array with its
associated discriminators.
These values are equivalent to those obtained with Mimosa22.
It shows a good uniformity of the whole 576 x 1152 pixels with the 1152 discriminators
Entries
576 x 288
Entries
576 x 288
Mean
0.64 mV
Mean
-0.93 mV
RMS
0.07 mV
RMS
0.29 mV
Noise distribution [mV]
Threshold distribution [mV]
~ 30 MIMOSA26 chips are tested (only 1 "dead")
The characterization of Mimosa26 is complemented by the beam tests (Sept. 2009)
6 MIMOSA26 chips running simultaneously at nominal speed
Tracking successful
data analysis is underway, preliminary results show similar performances as MIMOSA22
14-18/09/2009
Vertex-2009
IRFU - IPHC [email protected]
9
MIMOSA26 = Final Sensor for EUDET Beam Telescope
EUDET supported by the European Union in the 6th Framework Programme
Provide to the scientific community an infrastructure aiming to support the detector R&D
for the ILC
JRA1 (Joint Research Activity): High resolution pixel beam telescope (BT)
Two arms each equipped with three layers of pixel sensors (MIMOSA)
DUT is located between these arms and moveable via X-Y table
MIMOSA26
13.7 mm
Pixel Sensor
y
z
x
21.5 mm
(DUT)
Being Mounted on EUDET beam telescope
EUDET beam telescope specifications:
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High extrapolated resolution < 2 µm
Large sensor area ~ 2 cm2
High read-out speed ~ 10 k frame/s
Hit density: up to 106 hits/s/cm2
Vertex-2009
Preliminary test results from the EUDET
collaboration:
3 MIMOSA26 chips mounted as DUT in BT
demonstrator in July
BT tracks reconstructed in the 3 planes
residues compatible with σsp ~ 3.5-4 μm
IRFU - IPHC [email protected]
10
Extension of MIMOSA-26 to STAR
Final HFT (Heavy Flavour Tracker) - PIXEL sensor :
MIMOSA-26 with active surface × ~1.7
1088 col. of 1024 pixels 1.1 million pixels
Pitch : 18.4 μm (~20.0 x 18.8 mm²)
Integration time 200 μs
Design from now fab. Feb. 2010
1st physics data expected in 2011/12
PIXEL at 2.5 and 8 cm
Critical points:
Reduction of power consumption
Radiation tolerance improvement
Also:
Integrated voltage reference
High speed transmission
Pixel Vx Detector
~22.4 mm
IST at 14 cm
Inner Layer:
10 ladders
SSD at 23 cm
STAR Detector Upgrade
14-18/09/2009
Vertex-2009
Outer Layer: 30 ladders
10 sensors / ladder
IRFU - IPHC [email protected]
~20.4 mm
11
Extension of MIMOSA-26 to CBM/FAIR & ILC
Micro Vertex Detector (MVD) of the CBM H.I. fixed target expt :
2 double-sided stations equipped with MIMOSA sensors
MIMOSA-26 with double-sided read-out readout speed !
Active surface : 2 x 1152 columns of 256 pixels
tint. ~ 40 μs
21.2 x 9.4 mm2
< 25 μs in < 0.18 μm techno.
Prototyping until 2012 start of physics in 2013/14 (?)
Vertex detector of the ILC:
ILD design: 2 options
tint. ~ 25 μs (innermost layer) double-sided readout
tint. ~ 100 μs (outer layer) Single-sided readout
2 μm (4-bit ADC, 20 µm) < sp < 3 μm (discri. 14 µm pitch)
Pdiss < 0.1–1 W/cm² × 1/50 duty cycle
Critical points:
Power pulsing
Design for the innermost layer:
14-18/09/2009
Small pixel pitch
Faster readout speed
Vertex-2009
5 single layers
IRFU - IPHC [email protected]
3 double layers
12
Radiation Tolerance Improvement
Ionising radiation tolerance
1. Special layout
Diode level (already realized): Remove thick oxide surrounding N-well diode by
replacing with thin-oxide without design rule violation!!
Vdd!
Pixel circuit level: ELT for the transistors
connected to the detection diode
PWR_On
M4
M6
V_clp
M3
Clp
M9
M5
M10
M7
2. Minimise integration time
Increase readout speed:
Vertex-2009
Slct_Row
M11
Slct_Gr
M12
M2
Nwell/Pepi
M1
Gr_node
Pix_Out
Minimise leakage current
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M8
Pdiff/Nwell
Gnd!
IRFU - IPHC [email protected]
13
Radiation Tolerance Improvement
Non ionising radiation tolerance
High resistivity sensitive volume faster charge collection
Exploration of a VDSM technology with depleted (partially ~30 µm) substrate:
Project "LePix" driven by CERN for SLHC trackers (attractive for CBM, ILC and CLIC Vx Det.)
Exploration of a technology with high resistivity thin epitaxial layer
XFAB 0.6 µm techno: ~15 µm EPI ( ~ O(103).cm), Vdd = 5 V (MIMOSA25)
Benefit from the need of industry for improvement of the photo-sensing
elements embedded into CMOS chip
TCAD Simulation
15 µm high resistivity EPI compared to 15 µm standard EPI
For comparison: standard CMOS
technology, low resistivity P-epi
high resistivity P-epi: size of depletion
zone size is comparable to the P-epi
thickness!
14-18/09/2009
Vertex-2009
IRFU - IPHC [email protected]
14
MIMOSA25 in a high resistivity epitaxial layer
Landau MP (in electrons) versus cluster size
0 neq/cm²
0.3 x 1013 neq/cm²
1.3 x 1013 neq/cm²
3
MIMOSA25
saturation -> >90 % of charge is collected
is 3 pixels -> very low charge spread for
depleted substrate
16x96
Pitch 20µm
x 1013 neq/cm²
To compare: «standard» non-depleted EPI
substrate: MIMOSA15 Pitch=20µm, before and
after 5.8x1012 neq/cm2
20 μm pitch, + 20°C, self-bias diode @ 4.5 V, 160 μs read-out time
Fluence ~ (0.3 / 1.3 / 3·)1013 neq/cm2
Tolerance improved by > 1 order of mag.
Need to confirm det (uniformity !) with beam tests
14-18/09/2009
Vertex-2009
IRFU - IPHC [email protected]
15
Using 3DIT to improve MAPS performances
3DIT are expected to be particularly beneficial for MAPS :
Split signal collection and processing functionalities, use best suited technology for
each Tier :
Combine different fabrication processes
Resorb most limitations specific to 2D MAPS
Tier-1: charge collection system Epitaxy (depleted or not), deep N-well ? ultra thin layer X0
Tier-2: analogue signal processing analogue, low Ileak, process (number of metal layers)
Tier-3: mixed and digital signal processing
Tier-4: data formatting (electro-optical conversion ?)
130 nm, 2-Tier run with "high"-res substrate
(allows m.i.p. detection)
3D - MAPS
Pixel Controller,
A/D conversion
Digital
Tier A to tier B bond Cu-Cu bond
3 D consortium: coordinated by FermiLab
digital process (number of metal layers)
feature size fast laser driver, etc.
2D - MAPS
Run in Chartered - Tezzaron technology
FermiLab
INFN
IN2P3-IRFU
Univ. of Bonn
CMP
Pixel Controller, CDS
Diode
Diode
Analog
~ 50 µm
Analog Readout Analog Readout
Circuit
Circuit
Sensor
Diode
Diode
Analog Readout Analog Readout
Circuit
Circuit
TSV: Through Silicon Vias
~ 20 µm
14-18/09/2009
Vertex-2009
IRFU - IPHC [email protected]
16
IPHC & IRFU 3D MAPS
Delayed R.O. Architecture for the ILC Vertex Detector
Try 3D architecture based on small pixel pitch, motivated by :
Single point resolution < 3 μm with binary output
Probability of > 1 hit per train << 10 %
12 μm pitch :
•
sp ~ 2.5 μm
•
Probability of > 1 hit/train < 5 %
Acquisition
Readout
~1 ms
~200 ms
~1 ms
Split signal collection and processing functionalities :
Tier-1: A: sensing diode & amplifier, B: shaper & discriminator
Tier-2: time stamp (5 bits) + overflow bit & delayed readout
Architecture prepares for 3-Tier perspectives : 12 µm
Tier-1: CMOS process adapted to charge collection
Tier-2: CMOS process adapted to analogue & mixed signal processing
Tier-3: digital process (<< 100 nm ????)
12 µm
A
Tier 1
Tier 2
B
12 µm
TS & R.O.
Detection diode
or Q injection
Amplifier
Amp.+Shaper
Discriminator
Hit identification
+
5 bits (7?) Time Stamp
2nd hit flag
ReadOut
24 µm
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Vertex-2009
IRFU - IPHC [email protected]
ASD
Detection diode
& Amp
17
IPHC 3D MAPS: Self Triggering Pixel Strip-like Tracker (STriPSeT)
Combine Tezzaron/Chartered 2-tiers process with XFAB high resistivity EPI process
Tier-1
Tier-2
Cf~10fF
Tier-3
off <10 mV
G~1
Digital RD
Cc=100fF
Vth
Cd~10fF
Ziptronix
(Direct Bond Interconnect, DBI®*)
Tezzaron
(metal-metal (Cu) thermocompression)
DBI® – Direct Bond Interconnect, low temperature CMOS compatible direct oxide bonding with
scalable interconnect for highest density 3D interconnections (< 1 µm Pitch, > 10 8/cm /cm² Possible)
Tier-1: XFAB, 15 µm depleted epitaxy ultra thin sensor!!!
Tier-2: Shaperless front-end: (Pavia + Bergamo)
Single stage, high gain, folded cascode based charge amplifier, with a current source in the feedback loop
Shaping time of ~200 ns very convenient: good time resolution
Low offset, continuous discriminator
Tier-3: Digital: Data driven (self-triggering), sparsified binary readout, X and Y projection of
hit pixels pattern
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Fully depleted Fast charge collection (~5ns) should be radiation tolerant
For small pitch, charge contained in less than two pixels
Sufficient (rather good) S/N ratio defined by the first stage
“charge amplification” ( >x10) by capacitive coupling to the second stage
Matrix 256x256 2 µs readout time
Vertex-2009
IRFU - IPHC [email protected]
18
IRFU & IPHC 3D MAPS: RSBPix
FAST R.O. architecture aiming to minimise power consumption
Subdivide sensitive area in ”small” matrices
running INDIVIDUALLY in rolling shutter mode
Adapt the number of raws to required frame r.o. time
few µs r.o. time may be reached (???)
Vrst
Vclp1+Vth
CS
Av
~4
Vclp2
Vclp2
CS
Clamp0
Clamp
Vclp2
CS
Clamp1
Clamp4
Digital Memory
Latch
MOSCAP
(100fF)
PWRON_A
MOSCAP
MOSCAP
(20fF)
PWRON_D
PWRON_D
Digital Readout
Vclp2
Track Latch
Discriminator
Tier-1
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and
LATCH_D
DREAD
Tier-2
Planned also to connect this 2 tier circuit to XFAB detector tier
Vertex-2009
IRFU - IPHC [email protected]
19
Conclusion
2D MAPS have reached necessary prototyping maturity for real scale
applications :
Beam telescopes allowing for sp ~ few μm & 106 particles/cm²/s
Vertex detectors requiring high resolution & very low material budget
The emergence of fabrication processes with depleted epitaxy / substrate
opens the door to :
Substantial improvements in read-out speed and non-ionising radiation tolerance
"Large pitch" applications trackers (e.g. Super LHC )
Translation to 3D integration technology :
Resorb most limitations specific to 2D MAPS
T type & density, peripheral insensitive zone, combination of different CMOS processes
Offer an improved read-out speed : O(μs) !
Many difficulties to overcome (ex. heat, power)
R&D in progress 2009/10 important step for validation of this promising
technology
14-18/09/2009
Vertex-2009
IRFU - IPHC [email protected]
20