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Microfluidics Research at
Harvard
Robert Benson
Director of Business Development
October, 2006
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For More Information:
• Visit the Harvard table at the reception
• Visit: www.techtransfer.harvard.edu
• Join: “Harvard Inventions” email newsletter
• Contact:
Bob Benson
617-496-3830
[email protected]
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George Whitesides
• Soft Lithography – rapid, inexpensive technique for
making microstructures
• Many patent filings on microfluidic inventions – valves,
mixers, devices for assays etc.
• Companies that have licensed or been founded on these
patent filings including Surface Logix (pharmaceuticals),
Nano Terra (microtechnology), Claros (microfluidic
immunoassay device), Fluidigm,
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Microcontact Printing and Micromolding, and Microfluidic
Systems
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Microdilutor network (mDN):
a microfluidic version of 96-well assays
Case 1925
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OptoFluidics
Microfluidic
waveguide
laser
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Howard Stone
Colloidal Particle Stabilization of Droplets and Bubbles
– Opportunities for drug delivery, catalysis, and other products involving
particulate materials
– Stability of gas bubbles and liquid droplets
Characterization of the mechanical properties of red and
white blood cells and other “soft” objects
– Role in disease studies, drug modification of cells, …
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Flow Focusing in Microchannels
Silicone oil
moil = 0.06 Pa•s
Oil
Wo=278mm
Water
Wi=197mm
Oil
Wo
Wi=963mm
D=44mm
Interfacial tension
Hf=161 mm
Channel depth
h = 105 mm
Microchannel fabricated with PDMS using soft lithography
• Microfluidic Planar Flow Focusing Device (Case 2215)
• Fluid in central channel is “focused” through the constriction
and under right flow conditions produces monodispersed
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droplets or bubbles
Qw/Qo
Qo
[mL/sec]
5.6x10-5
Phase Diagram
1/4
1/40
1/400
1.4x10-4
4.2x10-4
1.4x10-3
4.2x10-3
8.3x10-3
100 mm
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Formation of a shell of particles
Microfluidic device
Dimensions about 100 microns
gas or liquid
Suspension:
liquid +
particles
formation
of a shell
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“Colloidal shells”: Particles on
the surfaces of small droplets
50 mm diameter gas bubble
covered with 4 mm diameter
polystyrene particles
• Many drugs, chemical additives, flavors, catalysts,
etc. are made as small particles (nanometers to
microns in dimensions)
• This is a technology that stably suspends the
particles, allows their coordinated movement, and
can controllably release the particles
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“Colloidal shells”: Particles on
50 mm diameter gas bubble
covered with 4 mm diameter the surfaces of small droplets
polystyrene particles
• Gas bubbles are used in chemistry, drug delivery, etc.
Micron-diameter gas bubbles are useful but they are
unstable: the gas can dissolve into the surrounding
liquid and gas bubbles readily coalesce.
• Long-term stability of gas bubbles and liquid droplets:
a technology that makes shells of particles on a
surface; the shells confer significant stability to the
interface.
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David Weitz
A uniquely controllable, flexible and scaleable method and
device for making multiple emulsions that enable the
production of new types of emulsions and other materials
for:
Encapsulating active materials, and
Making new materials
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Multiple emulsions:
Flow focusing of coaxial flow
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Large phase space of droplet formation
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Triple Core-Shell Emulsions
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Asymmetric Encapsulants
Evaporate intermediate fluid
Vesicle for controlled encapsulation
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Products and Markets Relevant to
Weitz’ Multiple Emulsion Invention
• Fine emulsions for personal care and food industries
• Drug Delivery
• Pesticides Delivery
• Sustained Release
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IC / Microfluidic Hybrid Systems for
the Manipulation of Biological Cells
Hakho Lee, Yong Liu, Donhee Ham and
Robert M. Westervelt
Harvard University
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IC / Microfluidic Hybrid
Micro-electromagnets
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CMOS IC Chip
2 mm 5 mm
Yong Liu
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Large array of coils
Logic/timing circuits
Temperature sensors
Cell Manipulation
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Soft Lithography Foundry
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Advanced low cost manufacturing
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Microfluidic Assemblies
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Microcontact Printing
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Replica Molding
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Self-assembled monolayers
CNS Cleanroom, shared for
Soft Lithography
Au pads Fabricated
through Microcontact
Printing
Master Profile
Stamp Profile
Replica Molding (REM)
REM Profile
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Nanofab and Soft Lithography
New Equipment
• JEOL 7000 E-Beam Writer
• SUSS MA6 Mask Aligner
• SUSS MJB3 Mask Aligner
JEOL 7000 E-Beam Writer
• Veeco Dektak 6M profilometer
• Gaertner LSE-WS Wafer-scan
Ellipsometer
• Agilent 4156C Semiconductor
Parameter Analyzer
• LOOMIS LSD-100 Wafer Cleaver
• Unaxis SHUTTLELINE ICP RIE
• AJA ATC-2400V Sputtering System
CNS Staff is training a user on
SUSS MA6 Aligner
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For More Information about the Soft
Lithography Foundry:
Dr. Jiangdong Deng (JD)
617-495-3396
[email protected]
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