Transcript micro/nano photonics

IMT expertize
in the development and procesing of
multifunctional organic materials
for sensors and photonics
Dana Cristea, Paula Obreja, Raluca Muller, Mihai Kusko,
Roxana Rebigan,
Micro and Nanophotonics Laboratory
Contact person- email: [email protected]
Thematic area
NMP-2004-3.4.2.3-1 - Materials by design:
multifunctional organic materials
The flexibility in the design and processing of organic solids (usually polymers)
allows them to meet the requirements of many technologically significant
applications. Multifunctional organic materials are used in displays,
electronic circuits, solar cells, chemical sensors and actuators, lasers,
storage media and electronic paper, as well as for insulation and packaging
in electronics.
The expected STREPs should aim at highly innovative long-term research for the
development of new multifunctional organic materials for electronics,
including modelling and experimentation, and considering as well their
processing and potential applications. The objective is to increase the
capability of industry to have materials with characteristics needed for the
intended applications. Molecular and nano-electronics are excluded
Micro and Nanophotonics Laboratory
Recognized at national level, and funded between 2001 and 2004, as a Centre of Excellence in Micro
and nanophotonics
MISSION
 Research activity in the field of
microphotonics and optical MEMS:
 Development of new materials, processes,
micro- and nano-scale photonic structures
 Development of optoelectronic integrated
circuits (OEIC)
 Development of materials, technologies
and components for optical MEMS
 Education and training in the field of
micro/nano photonics in cooperation with
“Politehnica University” Bucharest (courses
and laboratories for students, training by research
for PhD students).
Micro and Nanophotonics Laboratory
Relevant expertize for the thematic area NMP-2004-3.4.2.3-1
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Development of new nanostructured doped polymers and hybrids (inorganic +
organic) for integrated optics (with controlled refractive index and transmssion)
Development of photosensitive polimers (cooperation with INCDFM)
Depositon and patterning of organic thin films
Optical waveguides and optical modulators based on elastomers
Sensitive layers for chemical and biosensors with optical detection Design and
modelling of microphotonic photonic devices, optoelectronic integrated circuits,
sensors with optical read-out
Specific facilities:
Software: time-domain simulation software for advanced passive and active photonics
components- OptiFDTD-cad, semiconductor heterostructure modeling software HS_Design;
Characterization: AFM, spectroelipsometer, spectrophotometer; experimental set-up
for optoelectric characterization in UV-VIS-IR spectral range of optoelectronic and
photonic circuits
Technology: facilities for silicon and polymer processing
Development of new nanostructured doped polymers and hybrids for
integrated optics (with controlled refractive index and transmssion)
Polymers: PMMA, PVA, PVK, PDMS, PANI, SU-8
Undoped or doped with metal ions
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thin layers polymers, co-polymers, polymer composites and hybrid inorganic/organic materials for the fabrication of
photonic devices
polymer layers with controlled film characteristics (thickness, refractive index)
Refractive index of PVA solutions
(Abbé refractometer) and of PVA thin films
SOLUTION
n solution
20 ml 7% PVA-1, 1 ml 1% CrO3, 1 ml 10% KI
1,3435
1,55 – 1,7
20 ml 7% PVA-1, 1 ml 1% CrO3, 1 ml 5% CuCl
1,3448
1,6 – 1,8
20 ml 7% PVA-1, 1 ml 1% CrO3, 2 ml 5% CuO
1,3475
1,6 – 2
20 ml 5% PVA-2, 1 ml 1% CrO3, 1 ml 10% KI
1,3407
1,5 – 1,65
20 ml 5% PVA-2, 1 ml 1% CrO3, 1 ml 5% CuCl
1,3418
1,6 – 1,75
20 ml 5% PVA-2, 1 ml 1% CrO3, 2 ml 5% CuO
1,3450
1,6 – 1,9
PVA (1) → 7% PVA, M.W.= 31000 – 35000;
PVA(2) → 5% PVA, M.W.= 124000 – 186000.
n film
Photosensitive polymers
Cooperation with INCDFM
PVA + CrO3 + CuO
Transmittance (%)
100
PVA(1)-f
PVA(2)-f
80
60
40
20
0
200
PVA(1)-s
PVA(2)-s
400
600
800
1000
Wavelenght (nm)
Transmittance spectra of PVA (1) and PVA(2)
doped with CuO; s – solution, f – thin layer
AFM –
PVA + CrO3+ CuO
Optical waveguides based on PVA(1) doped with Cr and Cu (20
ml 7% PVA-1 +1 ml 1% CrO3
+1 ml 5% CuCl)
(PVA(1) layer, spin-coated at 1000 rpm, exposed and developed)
Polymers and hybrids for integrated optics
Cooperation with ICF and INCDFM
Waweguides and Y splitters obtained using
sol-gel-technique
and polymer technology
•Hybryd sol-gel and
doped PVA layers
•Thikness: 800 nm
•Width: 10 -50 m
Polymer processing
Deposition and patterning
a) Photopatternable polymers and hybrids
(SU-8, ORMOCORE) – UV lithography
S8-based
waveguides
Thickness: 2 – 5 m
Width: 5- 50 m
SU8 waveguides + V-grooves for fiber
allignment
Polymer processing
Deposition and patterning
b) Non-photopatternable polymers and hybrids
(PDMS, PMMA) – molding
Metal deposition and patterning
PDMS-based
microstructures
using resist
moulds
Process flow
Metal patterning
Photoresist deposition
lithography to obtain the mold
PDMS spining and curing
Metal deposition for the upper
electrode
Lift-off – to remove the mold
and to pattern the upper
electrode
MOLDING – applications:
Optical modulators – process flow
Metal deposition and patterning
(bottom electrode)
Photoresist deposition and
lithography to obtain the mold
PDMS deposition and curing
Metal deposition fot the upper
electrode
Lift-off – to remove the mold and
to pattern the upper electrode
Sensitive layers for chemo and biosensors
Chemo-optical sensor
For ammonia (5 – 1000 ppm)
Cooperation with ICF
Transducer layer
doped with BCP
Sensitive layers for chemo and bio-sensors
Photonic biosensor
General configuration
Urea sensor
Modelling and simulation
Microring resonators – coupling analysis
Ring radius 20 m
Bus waveguide core thickness 300 nm
z=28 m (z = 8 m)
Offset 0 m
Offset 1 m
Modelling and simulation
Design and simulation of microphotonic and micro-optical components using
commercial software (based on BPM and FDTD methods) or home-made
software
Microlens simulation with
Opti-FDTD v.5.2
Micro and Nanophotonics Laboratory
Interests in cooperation –thematic area
NMP-2004-3.4.2.3-1 - Materials by design: multifunctional organic
materials
STREPs in the following areas:
 Chemo or bio sensors based on organic materials
 Organic multifunctional materials for micro/nanophotonics and optoelectronics
Relevant international projects:
Network of Excellence 4M – Multi-Material Micro Manufacture: Technologies and
Applications - micro-optics cluster
Micro and Nanophotonics Laboratory
Interests in cooperation –thematic area
NMP-204-3.4.1-3- Methods of computational modelling of
multifunctional materials
Modelling of new metamaterials
(metamaterial = an artificially structured system consisting in a
periodic array of electric or magnetic scatterers).
New research activities in IMT: developing analytical and numerical methods to design and
investigate the LHM (left-handed metamaterial)
A FDTD simulation of the propagation of an
electromagnetic wave at the interface
between a right-handed material and a lefthanded metamaterial. Note that the
refracted wave is on the same side of the
optical axis as the incident wave showing
the negative Snell’s law.