Transcript What does the EUV and thin film group do?

What does the EUV and thin film
group do?
1. Optical properties of matter in the EUV and
2.
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Soft X-rays
Thin film preparation and characterization
Allred N265 2-3489 Meeting M 1600- N288 ESC
Thin Films for Mirrors
Turley N308 2-3095 Meeting F 1600- N308 ESCVUV and EUV Spectrometers
L V Knight N373 2-2450 Tues C389 BNSN (Linford)
EUV Spectrometer
Roentgen discovers x rays
http://wave.xray.mpe.mpg.de/roentgen/roentgen-1.gif
http://library.tedankara.k12.tr/chemistry/vol1/period/trans43.jpg
http://users.zoominternet.net/~matto/M.C.A.S/electromagnetic_spectrum.gif
Where do the EUV and Soft X-rays fit?
Characteristics
– interact strongly with all matter
– Human hair is 100 micron.
– Characteristic absorption length is 0.01
to 0.1 micron
– Refractive index is ~1
How do you make optical elements
to focus and direct light?
Why Extreme Ultraviolet (EUV) and Soft X-Rays?
Thin Film or Multilayer Mirrors
EUV Lithography
(making really small computer chips)
EUV Astronomy
Soft X-Ray Microscopes
BYU EUV Optics
The Earth’s magnetosphere in the EUV
Images from www.schott.com/magazine/english/info99/ and www.lbl.gov/Science-Articles/Archive/xray-inside-cells.html.
April 19, 2004
Other Applications
Astrophysics
http://euv.lpl.arizona.edu/euv/
Surface studies.
Plasma studies- matter under
extreme conditions
Microelectronics
Soft x-ray microscopy
BYU Work Applications
Astrophysics:
– Image satellite http://euv.lpl.arizona.edu/euv/
– Uranium and Thorium for the EUV.
Microelectronics: Stabilizing Mo/Si Also Ru,
Soft x-ray microscopy: Sc and others.
Surface and Nanofabrication studies.
– How to be clean in an unclean world.
– Ambient temperature oxidation of materials
Group meetings: Monday @1300 N209
– Sub: Wednesday @1300 N308 (Turley) BYU
Spectrometer.