Transcript Micro Heater with PT-CR thin film Thermo

Micro Heater with PT-CR thin film
Thermo-Couple for high speed
Biological Measurements
Fujita Laboratory, IIS, cIRMM, the University of
Tokyo ,JAPAN
F. Gillot, H. F. Araa, F. O. Morin, D. Collard
and H. Fujita
Tranducer 2007
報告人： 蘇聖欽
Outline
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Introduction
Manufacturing Process
Biological Application
Conclusion
References
Outline
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Introduction
Manufacturing Process
Biological Application
Conclusion
References
Thermo-Couple
• Thermoelectric voltage :
m : number of couples legs
V  m ABT
ΔT : temperature between
hot and cold junctions
αAB : seebeck coefficient
Outline
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Introduction
Manufacturing Process
Biological Application
Conclusion
References
Fabrication of PT-CR
Hot junction has
2.5-um * 2.5-um
area
PT-CR couple offers a
high Seebeck
coefficient(17.4uV/K)
Device Calibration
Thermal device
behavior using finite
element analysis
(FemLab 3.1)
Micro TFTC coupled with a 471Ω CMS
resistor
ramping the voltage by steps of 0.1V
(waiting time of at least 30s)
Output voltage of Thermocouple
4-noctyl-4cyanobiphenyl(8CB)
Separation line between the
nematic and the smectic phase
on 1.2V applied
(a)-(c) pictures taken by a BX
51 Olympus(20x)
Outline
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Introduction
Manufacturing Process
Biological Application
Conclusion
References
Unzipping dsDNA into ssDNA
Syber green binds to
dsDNA but not to ssDNA
16um long λDNA
together with fluorecent
on the thermodevice
The final quick decrease
corresponded to
unzipping of a DNA that
completed within 52
ms(stage 3)
Outline
•
•
•
•
•
Introduction
Manufacturing Process
Biological Application
Conclusion
References
Conclusion
• Showing fast thermal shifting as well as thermal
sensing in the ms range.
• Thermocouple can use for other application
(actuator).
References
[1] F. Gillot, H. F. Araa, F. O. Morin, D. Collard and H. Fujita, “Micro
Heater with PT-CR thin film Thermo-Couple for high speed
Biological Measurements”, Transducer, pp. 21-23, 2007.
[2] F Gillot, FO Morin, HF Arata, R Guégan, H Tanaka, “On-chip
thermal calibration with 8 CB liquid crystal of micro-thermal”, Lab on
a Chip, pp. 1600 – 1602, 2007.