Transcript High Resolution Observations of Hot Molecular Cores

Status of Process Qualification Centers
Florence
, Strasbourg,
Vienna
Mirko Brianzi
Jean-Charles Fontaine
Thomas Bergauer
Anna Macchiolo
Jean-Marie Helleboid
Margit Oberegger
Christophe Hoffmann
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
PC or MAC to control
the system through
Labview software
System Configuration
Switching matrix
in K7002 main-frame
Measuring Instruments
Probe-card to
contact the 9
test-structures
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
Probe-card
Cap-ts

Sheet
GCD

Cap-AC

Baby
After finalisation of HPK and ST mask designs we have
agreed upon the positions of the probe-card 52
contacts
The same probe-card is compatible for the teststructures of both the suppliers for all the sensor-types
Contacts on the baby detector designed to align the
probe-card with the probe-station chuck and the
standard moon
Cap-DC
Diode
Mos
Mos
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
From the probe-card to the switching matrix
4 K7154
modules of the
switching
matrix:
10 inputs each
Flat cable from
the probe-card
Connection box
between flat-cable
and cables to the
switching matrix
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
Measuring Instruments
All the instrument drivers are
ready and included in the
common software
HV source : up to
1000 V (IV_baby)
V source:
 20 V
LCR meter +
decoupling box
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
New measurement configuration

Change of the previous measurement configuration in order to:
 Make it compatible for the different instrumentation present in the
three laboratories
 Improve the accuracy of some measurements
 Reduce the needed electronic equipment

At the moment each lab is testing the new configuration. After
this phase it will be implemented in the common software
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
K7153: 5 input
channels from the
measuring
instruments
Switching matrix
Switch System
K7002
Slot 1
K7154
Slot 2
k7154
Common Low
(HV+V source)
High
HV source
Slot3
k7154
High V source
Slot 5
K7153
Slot 4
4 outputs to the
New configuration:
Using a common Low for the HV
and V sources we could remove a
K7153 module from the Switching
System, now available as spare
In Florence we are now
replacing our old multiplexers
K7158 (30 V limit on input
voltage) with K7154 (1100 V
limit)  the switching
system is going to be exactly
the same in the 3 labs
k7154
K 7154 modules
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
Selection of the lab
Common Software
Visualisation of the
full set of results of
the 9 measurements
on a standard moon
Strasbourg is now
implementing the
last changes in the
common software
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
Gate Controlled Diode
(A)
New configuration:
Common LOW for HV
source and V source
Surface
generated
current
Florence: we had to
swap HV and V source
because of worse
resolution of the
A-meter of HV
generator
V back = 10V
CSEM M200
Standard moon
inversion
depletion
accumulation
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
V gate (V)
Gate Controlled Diode
(Strasbourg)
OLD= HV source and V
source HIGH were
referred to the same
potential
NEW= HV source and V
source LOW are referred to
a common GRND
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
CV MOS
Changed the connection between High and Low
of HV source and LCR meter through the
switching matrix (same for CV on diode)
To MOS
metal
(F)
HV
source
To back
V
Vfbfb
V gate (V)
LCR Low to
0V since all
the
instrument
GNDs are
connected
together
LCR meter
+
decoupling box
HPK M200 standard moon,
similar behaviour for STM
M200
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
Tests of the new configuration
(Strasbourg)
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
CV on CSEM MOS
f = 100 Hz
Vgate (V)
f =100 Khz
V gate (V)
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
R interstrip
Measured on CAP-DC: 9
strips without bias resistor
To the
central
strip
To the first
neighbouring
strips
Need high sensitivity
of A-meter on HV
source
Voltage
applied across
the central
strip and the
neighbouring
ones
Polarisation
bias to the back
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
IV dielectric
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
Still to do ...
• Implement the new configuration in the final
software and then test it.
• Install the probe-card and complete the connection
with the switching system. Test the fully automatic
procedure with the probe-card.
• Interface to the DB:
a first draft of the output file and of
the VI files to generate it was prepared in Vienna. The
connection to the main acquisition software has to be
implemented in Strasbourg.
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001
Logistic
• Florence:
IB1, IB2, OB1, OB2 (no-longtime IV)
from QTC Perugia and Pisa
5% of the wafers = 693 standard moons
• Strasbourg:
W3, W5A, W5b, W6a, W6b
from QTC Karlsruhe
271 standard moons
• Vienna:
W1, W2, W4, W7A, W7b
from QTC Vienna
235 standard moons
Anna Macchiolo, Status of Process Qualification Centers, Sensor Meeting, 31st Oct 2001