Transcript 2007/11/20 Paul C.

Optoelectronic System
and Control Lab., EE,
NCTU
VLSI
Lecture 0:
Introduction
Paul C.–P. Chao
Dept. of Electrical Eng.
National Chiao Tung University
02/24/2015
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2007/11/20 Paul C.-P. Chao
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Introduction
 Integrated circuits: many transistors on one chip.
 Very Large Scale Integration (VLSI): bucketloads!
 Complementary Metal Oxide Semiconductor
 Fast, cheap, low power transistors
 Today: How to build your own simple CMOS chip
 CMOS transistors
 Building logic gates from transistors
 Transistor layout and fabrication
 Rest of the course: How to build a good CMOS chip
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Silicon Lattice
 Transistors are built on a silicon substrate
 Silicon is a Group IV material
 Forms crystal lattice with bonds to four neighbors
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Si
Si
Si
Si
Si
Si
Si
Si
Si
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Dopants
 Silicon is a semiconductor
 Pure silicon has no free carriers and conducts poorly
 Adding dopants increases the conductivity
 Group V: extra electron (n-type)
 Group III: missing electron, called hole (p-type)
Si
Si
Si
Si
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Si
Si
Si
As
Si
Si
B
Si
Si
Si
Si
-
+
+
-
Si
Si
Si
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p-n Junctions
 A junction between p-type and n-type semiconductor
forms a diode.
 Current flows only in one direction
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p-type
n-type
anode
cathode
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nMOS Transistor
 Four terminals: gate, source, drain, body
 Gate – oxide – body stack looks like a capacitor
 Gate and body are conductors
 SiO2 (oxide) is a very good insulator
 Called metal – oxide – semiconductor (MOS) capacitor
Source
Gate
Drain
 Even though gate is
Polysilicon
SiO2
no longer made of metal
n+
Body
p
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n+
bulk Si
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nMOS Operation
 Body is usually tied to ground (0 V)
 When the gate is at a low voltage:
 P-type body is at low voltage
 Source-body and drain-body diodes are OFF
 No current flows, transistor is OFF
Source
Gate
Drain
Polysilicon
SiO2
0
n+
n+
S
p
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D
bulk Si
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nMOS Operation Cont.
 When the gate is at a high voltage:
 Positive charge on gate of MOS capacitor
 Negative charge attracted to body
 Inverts a channel under gate to n-type
 Now current can flow through n-type silicon from source
through channel to drain, transistor is ON
Source
Gate
Drain
Polysilicon
SiO2
1
n+
n+
S
p
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D
bulk Si
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pMOS Transistor
 Similar, but doping and voltages reversed
 Body tied to high voltage (VDD)
 Gate low: transistor ON
 Gate high: transistor OFF
 Bubble indicates inverted behavior
Source
Gate
Drain
Polysilicon
SiO2
p+
p+
n
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bulk Si
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Power Supply Voltage
 GND = 0 V
 In 1980’s, VDD = 5V
 VDD has decreased in modern processes
 High VDD would damage modern tiny transistors
 Lower VDD saves power
 VDD = 3.3, 2.5, 1.8, 1.5, 1.2, 1.0, …
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Transistors as Switches
 We can view MOS transistors as electrically controlled
switches
 Voltage at gate controls path from source to drain
d
nMOS
pMOS
g=0
g=1
d
d
OFF
g
s
s
s
d
d
d
g
OFF
ON
s
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ON
s
s
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CMOS Inverter
A
Y
0
1
1
0
VDD
OFF
ON
0
1
A
Y
ON
OFF
A
Y
GND
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CMOS NAND Gate
A
B
Y
0
0
1
0
1
1
1
0
1
1
1
0
ON
OFF
OFF
ON
A
B
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1
0
0
1
1
0
OFF
ON
Y
ON
OFF
OFF
ON
ON
OFF
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CMOS NOR Gate
A
B
Y
0
0
1
0
1
0
1
0
0
1
1
0
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A
B
Y
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3-input NAND Gate
 Y pulls low if ALL inputs are 1
 Y pulls high if ANY input is 0
Y
A
B
C
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CMOS Fabrication
 CMOS transistors are fabricated on silicon wafer
 Lithography process similar to printing press
 On each step, different materials are deposited or etched
 Easiest to understand by viewing both top and cross-
section of wafer in a simplified manufacturing process
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Inverter Cross-section
 Typically use p-type substrate for nMOS transistors
 Requires n-well for body of pMOS transistors
A
GND
VDD
Y
SiO2
n+ diffusion
n+
n+
p+
p+
n well
p substrate
nMOS transistor
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p+ diffusion
polysilicon
metal1
pMOS transistor
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Well and Substrate Taps
 Substrate must be tied to GND and n-well to VDD
 Metal to lightly-doped semiconductor forms poor
connection called Shottky Diode
 Use heavily doped well and substrate contacts / taps
A
GND
VDD
Y
p+
n+
n+
p+
p+
n+
n well
p substrate
substrate tap
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well
tap
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Inverter Mask Set
 Transistors and wires are defined by masks
 Cross-section taken along dashed line
A
Y
GND
VDD
nMOS transistor
substrate tap
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pMOS transistor
well tap
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Detailed Mask Views
 Six masks
 n-well
 Polysilicon
 n+ diffusion
 p+ diffusion
 Contact
 Metal
n well
Polysilicon
n+ Diffusion
p+ Diffusion
Contact
Metal
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Fabrication
 Chips are built in huge factories called fabs
 Contain clean rooms as large as football fields
Courtesy of International
Business Machines Corporation.
Unauthorized use not permitted.
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Fabrication Steps
 Start with blank wafer
 Build inverter from the bottom up
 First step will be to form the n-well
 Cover wafer with protective layer of SiO2 (oxide)
 Remove layer where n-well should be built
 Implant or diffuse n dopants into exposed wafer
 Strip off SiO2
p substrate
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Oxidation
 Grow SiO2 on top of Si wafer
 900 – 1200 C with H2O or O2 in oxidation furnace
SiO2
p substrate
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Photoresist
 Spin on photoresist
 Photoresist is a light-sensitive organic polymer
 Softens where exposed to light
Photoresist
SiO2
p substrate
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Lithography
 Expose photoresist through n-well mask
 Strip off exposed photoresist
Photoresist
SiO2
p substrate
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Etch
 Etch oxide with hydrofluoric acid (HF)
 Seeps through skin and eats bone; nasty stuff!!!
 Only attacks oxide where resist has been exposed
Photoresist
SiO2
p substrate
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Strip Photoresist
 Strip off remaining photoresist
 Use mixture of acids called piranah etch
 Necessary so resist doesn’t melt in next step
SiO2
p substrate
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n-well
 n-well is formed with diffusion or ion implantation
 Diffusion
 Place wafer in furnace with arsenic gas
 Heat until As atoms diffuse into exposed Si
 Ion Implanatation
 Blast wafer with beam of As ions
 Ions blocked by SiO2, only enter exposed Si
SiO2
n well
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Strip Oxide
 Strip off the remaining oxide using HF
 Back to bare wafer with n-well
 Subsequent steps involve similar series of steps
n well
p substrate
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Polysilicon
 Deposit very thin layer of gate oxide
 < 20 Å (6-7 atomic layers)
 Chemical Vapor Deposition (CVD) of silicon layer
 Place wafer in furnace with Silane gas (SiH4)
 Forms many small crystals called polysilicon
 Heavily doped to be good conductor
Polysilicon
Thin gate oxide
n well
p substrate
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Polysilicon Patterning
 Use same lithography process to pattern polysilicon
Polysilicon
Polysilicon
Thin gate oxide
n well
p substrate
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Self-Aligned Process
 Use oxide and masking to expose where n+ dopants
should be diffused or implanted
 N-diffusion forms nMOS source, drain, and n-well contact
n well
p substrate
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N-diffusion
 Pattern oxide and form n+ regions
 Self-aligned process where gate blocks diffusion
 Polysilicon is better than metal for self-aligned gates
because it doesn’t melt during later processing
n+ Diffusion
n well
p substrate
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N-diffusion cont.
 Historically dopants were diffused
 Usually ion implantation today
 But regions are still called diffusion
n+
n+
n+
n well
p substrate
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N-diffusion cont.
 Strip off oxide to complete patterning step
n+
n+
n+
n well
p substrate
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P-Diffusion
 Similar set of steps form p+ diffusion regions for pMOS
source and drain and substrate contact
p+ Diffusion
p+
n+
n+
p+
p+
n+
n well
p substrate
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Contacts
 Now we need to wire together the devices
 Cover chip with thick field oxide
 Etch oxide where contact cuts are needed
Contact
Thick field oxide
p+
n+
n+
p+
p+
n+
n well
p substrate
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Metalization
 Sputter on aluminum over whole wafer
 Pattern to remove excess metal, leaving wires
Metal
Metal
Thick field oxide
p+
n+
n+
p+
p+
n+
n well
p substrate
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Layout
 Chips are specified with set of masks
 Minimum dimensions of masks determine transistor size
(and hence speed, cost, and power)
 Feature size f = distance between source and drain
 Set by minimum width of polysilicon
 Feature size improves 30% every 3 years or so
 Normalize for feature size when describing design rules
 Express rules in terms of l = f/2
 E.g. l = 0.3 mm in 0.6 mm process
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Simplified Design Rules
 Conservative rules to get you started
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Inverter Layout
 Transistor dimensions specified as Width / Length
 Minimum size is 4l / 2l, sometimes called 1 unit
 In f = 0.6 mm process, this is 1.2 mm wide, 0.6 mm long
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Summary
 MOS transistors are stacks of gate, oxide, silicon
 Act as electrically controlled switches
 Build logic gates out of switches
 Draw masks to specify layout of transistors
 Now you know everything necessary to start designing
schematics and layout for a simple chip!
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About these Notes
 Lecture notes © 2010 David Money Harris
 These notes may be used and modified for educational
and/or non-commercial purposes so long as the source is
attributed.
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