Sill Torres: Microelectronics
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Transcript Sill Torres: Microelectronics
Microelectronics Today Problems and Solutions
Frank Sill Torres
OptMAlab / ART
Universidade Federal de Minas Gerais (UFMG), Brazil
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About Me
I’m German
(from the NorthEast)
Master / PhD. in Electrical Engenering / Microelectronics
(Universität Rostock, Germany)
Research areas:
– Low Power Integrated Circuit (IC) Design
– IC Design for Reliability (analog / digital)
– Nanoelectronics
– ...
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Outline
1. Areas of Microelectronics
2. Chip Design
3. State of the Art
4. Problems
5. Solutions
6. Microelectronics at UFMG and in Brazil
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Areas of Microelectronics
Process/Devices
All activities related to chip fabrication
(Lithography, Etching, Ion Implantation,…)
Design of new transistor devices (Bulk-CMOS,
SOI, FinFet,…)
Work on materials for semiconductors
Clean room - UFMG
MicroElectroMechanical Systems (MEMS), e.g.
– Microphone of the iPhone4
– Micro-lenses
Related laboratory at UFMG / EE
– OptMAlab
Knowles S1950 MEMS Die
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Areas of Microelectronics
Circuits
Design of integrated analog circuits
Design of logic cells
Design of integrated sensors and
actuators
Related laboratories at UFMG / EE
Active pixel for digital camera (OptMAlab)
– OptMAlab
– OptMAlab / ART
high-Vth/Tox
low-Vth/Tox
Advanced low leakage cell (OptMAlab/ART)
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Areas of Microelectronics
Systems
Design of integrated systems
– Application Specific Integrated Systems (ASIC)
– Processors
– System on Chip (SOC)
– Digital / Analog / Mixed-Signal
Design of Intellectual Property (IP) blocks
FPGA design
Related laboratories at UFMG / EE
Copyright: ELV.de
– OptMAlab / ART
– LSI
– LabSCI
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Chip Design
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Chip Design
Standard Designflow
VHDL, SystemC …
Textual description of the design
Synthesis
Mapping of the design onto logic cells
Floorplanning
Planing of basic structure of the chip
(Size, I/O, power supply, blocks, …)
Placement
Placement of logic cell on chip
Routing
Wiring of logic cells
Production
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ASIC Design
Task Description
Up to 25 years ago: chips developed on
drawing board
End of 80‘s: Hardware Description
Languages (HDL)
– Verilog - 1985
– VHDL - 1987
Newest developments
– Object orientated approach
– SystemC
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ASIC Design
Representation with logic cells
Called: Synthesis
Conversion of high-level description into logic cells
Happens automatic by special tools
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Chip Design
Synthesis – Tool (Synopsys DesignVision)
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Chip Design
Determination of Chip Sizes
Called: Floorplanning
Planning of basic structure of the chip (Size, Inputs/Outputs,
power supply, blocks)
What decides the chip size?
PAD-limited
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CORE-limited
BLOCK-limited
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Chip Design
Floorplanning – Tool (Cadence Second Encounter)
Menu
Layer
selection
Tools
Coordinates
Overview
window
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Control
output
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Chip Design
Placement
Placement of logic cells
Usually: Standard cells
Uniform cell height
Different widths
Tool support
Copyright: Weste, 2011
Copyright: Yu, UC Davies
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Chip Design
Placement - Example
Copyright: Yu,
UC Davies
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Chip Design
Routing
Placing of wires that connect logic cells
Two Phases:
– Global Routing
– Detailed Routing
Tool support
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Chip Design
Routing - Examples
Ref.: Wikipedia
Copyright: Yu, UC Davies
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Chip Design
Fabrication
Design project saved as file (e.g. GDS2) → sent to fab
Fab:
– Fabrication, packing, and testing
– Very expensive (e.g. Intel 14 nm - USD 5 Billion,
GlobalFoundries 28 nm – USD 4.6 Billion, source: Wikipedia)
CEITEC S.A., Rio Grande do Sul
(Work in Progress, 0.6 um)
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Chip Design
Design Houses
In the past
– Chip designer and factories together
– Intellectual Property belongs to factory
Today
– Chip designers and factories separate
– Intellectual Property stays with designer
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State of the Art
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State of the Art
Overview
Technology sizes: starting from 22 nm
Processors with 64 bit
Multi-cores
Processors for
– Servers (Opteron, Xeon, …)
– PCs (Core i3/i5/i7, Fusion, …)
– Smartphones / Pads (ARM, Atom, ...)
High integration of functionalities
– Memory controller
– Graphic card
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State of the Art
Processors
[Mill.]
Transistors [Mill.]
Transistors
130 nm
400
400
90 nm
300
300
100
100
0
0
100 nm
Yonah
65 nm
151 Mill.
200
200
150 nm
Technology
Wolfdale
410 Mill.
500
500
Prescott
125 Mill.
45 nm
50 nm
Northwood
55 Mill.
Yonah,
151 Mill.
0 nm
2002
2002
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2004
Year
Year
2006
2006
2008
2008
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State of the Art
Dimensions
m
10
cm
100
nm
10
111mm
cm
µm
µm
Source: „Spektrum der Wissenschaften“
„22 nm“-Transistor
Source: Intel
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Problems
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Problems
Power Dissipation
SoC Consumer Portable Power Trend [Source: ITRS, 2010 Update]
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Problems
Power Density
Nuclear Reactor →
←Hot Plate
Source: http://cpudb.stanford.edu/
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Problems
Leakage
MOS-Transistor: Basic Element
Conducting:
Closed (ideal):
Closed (real):
Current flow
No Current
Still current flow
Dynamic power
dissipation
No power dissipation
Until early 2000‘s
dominating
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(Leakage)
Power dissipation
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Problems
Subthreshold Leakage Isub
Vgs <
>V
Vthth
Threshold Voltage Vth
Gate
– Transistor characteristic
– If: „Gate-Source“-Voltage Vgs higher
than Vth
Gate
Drain
Source
Source
Current between Drain and Source
Isub
Drain
– If: Vgs lower than Vth
(ideal) No current
Subthreshold leakage Isub
– Leakage between Drain and Source
when Vgs < Vth
– Based on:
Short Channels
Diffusion
Thermionic Emission
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Diffusion
high
Concentration
Low
concentration
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Problems
Gate Leakage Igate
Tunneling effect
Potential Energy
Energy
Potential
– Electromagnetic wave strikes at
barrier:
Reflection + Intrusion into barrier
0
– If thickness is small enough:
Wave interfuses barrier partially:
(Electrons tunnel through barrier)
Gate oxide leakage Igate
Igate
– At transistors with Tox< 2 nm
Gate
Gateoxide
Electrons tunnel through gate oxide
Leakage current
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x
Tox
Source
Tox
Drain
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Problems
Process Failures
Occur at production phase
Based on
– Process Variations
– Particles
– …
Source: Mak
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Problems
Electromigration
Transport of material caused
by the gradual movement of
ions in a conductor
Top View
Void
Metal 1
Major failure mechanisms in
interconnects
Metal 1
Proportional to width and
thickness of metal lines
Inversely proportional to
current density
Whisker, Hillock
Cross Section View
Metal 1
Thick Oxide
Metal 2
Source: Plusquellic, UMBC
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Problems
Electromigration cont’d
Void in 0.45mm Al-0.5%Cu line
Source: IMM-Bologna
Whiskers in Sn
Source: EPA Centre
Hillocks in ZnSn
Source: Ku&Lin,2007
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Problems
Gate Oxide Breakdown
Tunneling currents
Wear out of gate oxide
Creation of conducting path
between Gate and Substrate,
Drain, Source
Depending on electrical field
Source: Pey&Tung
over gate oxide, temperature
(exp.), and gate oxide
thickness (exp.)
Also: abrupt damage due to
extreme overvoltage
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Source: Pey&Tung
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Problems
Soft Errors
Source: Automotive 7-8, 2004
1
In 70’s observed: DRAMs occasionally flip bits for no apparent reason
Ultimately linked to alpha particles and cosmic rays
Collisions with particles create electron-hole pairs in substrate
These carriers are collected on dynamic nodes, disturbing the voltage
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Problems
Soft Errors cont’d
Internal state of node flips shortly
If error isn’t masked by
– Logic: Wrong input doesn’t lead to wrong output
– Electrical: Pulse is attenuated by following gates
– Timing: Data based on pulse reach flipflop after clock transistion
wrong data
FF
FF
FF
FF
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Problems
Delay [s]
Drain current IDS [pA]
Temperature Variations
Temperature [°C]
Threshold voltage Vth changes with temperature drain-source current
changes delay changes
Source: Burleson, UMASS, 2007
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Problems
Failures due to Increasing Delay
FF
Logic
FF
Data are
processed before
clock phase is over
Clk
Clock (Clk)
VDD↓, Temp.↑, ...
FF
Clk
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Logic too slow!
→ Data processing
FF
longer than clock
phase
→ Wrong Data in
next clock phase!
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Solutions
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Solutions
New Technologies
For example: Intel
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Solutions
Basics: Delay and Power versus VDD
10
5
8
Pdyn
4
td
6
3
4
2
1
2
0
0
0.8
1
1.2
1.4
1.6
1.8
2
2.2
Relative Pdyn
Relative Delay td
6
2.4
Supply voltage (VDD)
Dynamic Power can be traded by delay
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Solutions
Adaptive Dynamic Voltage/Frequency Scaling (DVS/DFS)
Slow down processor to fill idle time
More Delay lower operational voltage
Active
Idle
Active
Idle
Active
3.3 V
2.4 V
Runtime Scheduler determines processor speed and selects
appropriate voltage
Transitions delay for frequencies <150s
Potential to realize 10x energy savings
E.g.: Intel SpeedStep, AMD PowerNow, Transmeta Longrun
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Solutions
DVS/DFS with Transmeta LongRun
% of max powerl consumption
100
90
80
70
60
50
40
30
20
10
0
300
300 Mhz
0.80 V
Peak performance region
Typical operating region
400
433 Mhz
0.87 V
500
533 Mhz
0.95 V
600
700
667 Mhz
1.05 V
800
800 Mhz
1.15 V
900
900 Mhz
1.25 V
1000
1000 Mhz
1.30 V
Frequency (MHz)
Source: Transmeta
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Solutions
Clock Gating
Most popular method for power reduction of clock signals and
functional units
Gate off clock to idle functional units
Logic for generation of disable signal necessary
Strong reduction of dynamic power dissipation
clock
R
Functional
e
unit
g
disable
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Solutions
Clock Gating: Example
Without clock gating
30.6mW
With clock gating
8.5mW
0
5
10
15
VDE
20
25
MIF
DSP/
HIF
Power [mW]
90% of FlipFlops clock-gated
DEU
896Kb SRAM
70% power reduction by clock-gating
MPEG4 decoder
Source: M. Ohashi, Matsushita, 2002
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Solutions
Power-orientated Programming
Switched Capacitance (nF)
14000
12000
10000
Others
Functional Unit
Pipeline Registers
Register File
8000
6000
4000
2000
0
bubble.c
heap.c
quick.c
Algorithms can differ in power dissipation
Source: Irwin, 2000
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Solutions
Basics: Stack Effect
Transistor stack: at least two transistors in a row
Based on behavior of internal nodes:
The more transistors are non-conducting (off) the lower the leakage
Leakage Isub [nA]
10
8
6
4
2
0
1
2
3
4
Transistors off in stack
Source: Roy, “Lecture”
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Solutions
Sleep Transistors
Idea: Insertion of additional transistors
between logic block and supply lines
sleep
Vdd
Virtual Vdd
These transistors: connected with
SLEEP-signal
If circuit has nothing to do:
SLEEP signal is active: Stack effect
(additional off transistor in row to
other)
Mostly insertion only of 1 transistor
Circuit
sleep
Virtual Vss
Vss
Source: Kaijian Shi, Synopsys
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Solutions
Basics: Relation of Vth, Delay and Leakage
Threshold Voltage Vth:
– Influence on sub-threshold leakage Isub
– Influence on delay of logic gates
160
120
55
Isub
50
45
80
40
40
0
0.25
35
0.27
0.29
0.31
0.33
0.35
Dealy [ps]
Leakage- -Isub
Isub [nA]
[nA]
Leakage
Inverter (BPTM 65 nm)
30
0.37
Threshold Voltage
[V] [V]
Threshold
VoltageVthNMOS
VthNMOS
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Solutions
Dual-Vth
“LVT”- Cells
Cells consist of transistors with low Vth
Low delay
High leakage
For critical paths
“HVT”- Cells
Cells consist of transistors with high Vth
Longer delay
Low leakage
For uncritical paths
Leakage reduction at constant performance
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Solutions
Dual-Vth Example
LVT- Cells
HVT- Cells
Critical Path
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Solutions
Triple Module Redundancy (TMR)
Input
Logic L
A
Copy of
Logic L
B
Voter
Output
C
Copy of
Logic L
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Solutions
Self Adaptive Design
Extend idea of clock domains to Adaptive Power Domains
Tackle static process and slowly varying timing variations
Control VDD, Vth (indirectly by body bias), fclk by calibration at
Power On
Test inputs
and
responses
fclk
Test
Module
VDD
Module
VBB
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Solutions
Reliability Enhancement via Sleep Transistors
Basic idea: Reduction of degradation via module deactivation
Problem: What to do at run-time?
Module 1
Instance 1
Module 2
SLEEP
Module 1
Instance 2
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MUX
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Opportunities in Brazil
and
Activities at UFMG
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Opportunities in Brazil
CEITEC S.A. – Design House and Chip factory (Rio Grande do Sul)
Over 22 Design Houses
– DHBH in Belo Horizonte
– MINASIC in Itajubá
– CTI, Eldorado, LSI-TEC, von Braun, …
Many other companies, e.g.:
– AEGIS / SEMIKRON: Power devices
– SMART / HT Micron: Back-end for memories
– FREESCALE: Design center
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Opportunities in Brazil cont’d
Minas Gerais
– InventVision - Optical Systems, FPGA
– Jasper - Verification
– CBS (wafer production) - planned
– CMinas (MEMS) - planned
– Foxconn (Displays) - planned
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Activities at UFMG / EE
OptMAlab
Laboratory for Optronics and Microtechnologies (OptMAlab)
Located at PPGEE / UFMG
Coordinator: Dr. Davies William de Lima Monteiro
Adaptive Optics: wavefront aberration, components and systems
Microelectronics: Analog Integrated-Circuit design custom pixels,
image sensors and optical position-sensitive devices (PSDs)
Micromachining: silicon wet processing micro-optics
Ophthalmic Optics: technology and characterization of intraocular
lenses
Photovoltaics: alternative self-configurable cells
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Activities at UFMG / EE
OptMAlab - IC for read-out for infrared sensor
CMOS AMS 0.35µm
Chip area: 12 mm2
3.3V e 5.0V
> 90 pins
> 60 structures
Digital circuits
Analog circuits
Mixed-Signal Circuits
Photo-diodes
Photo-resistors
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Activities at UFMG / EE
OptMA - ART
Asic-ReliabiTiy (OptMAlab / ART)
Extension of OptMAlab at PPGEE/UFMG
Coordinator: Frank Sill Torres
Dedicated to reliability in micro- and nanoelectronics applications
Activities in the field of
– Design for Reliability
– Low Leakage / Low Power Chip Design
– Development of CAD tools extensions
– Robust Nanoelectronics
More information: www.asic-reliabity.com
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Activities at UFMG / EE
OptMA – ART / Reliable Adder
CMOS AMS 0.35µm
Chip area: 1 mm2
3.3V
> 10 pins
Test structures
Modified logic cells
Sleep Transistors
Prepared for
Controlled
Destruction
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LSI – Laboratório de Sistemas Inteligentes
Projeto: Desenvolvimento de um Sistema de
Determinação de Atitude com Tolerância a Falhas para
Satélites de Baixa Órbita.
Projeto Financiado pela AEB – Programa UNIESPAÇO
– Colaboradores: INPE, UFABC, OptMa
Síntese do Projeto:
– O que é Atitude
– Satélites que operam em Baixa Órbita Terrestre
– O ambiente hostil a que os CIs são colocados em
funcionamento.
– Condições limitadoras: alta precisão de apontamento, baixa
potência, baixo peso, baixo custo e confiabilidade 99,99999%
durante a missão.
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LSI – Laboratório de Sistemas Inteligentes
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LSI – Laboratório de Sistemas Inteligentes
Áreas de atuação da Microeletrônica:
– Entender e modelar o efeito de falhas em CIs.
Diversidade de Dispositivos
Diversidade de Arquiteturas
Diversidade de Ambientes e Situações
– Emular o efeito de falhas em CIs.
– Mitigar o efeito das falhas dos CIs nos Sistemas que os
compreendem Técnicas de Tolerância a Falhas
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LSI – Laboratório de Sistemas Inteligentes
Equipe atual:
– Fernando Esquírio Torres (bolsista de mestrado CPDEE)
– Thalles Hermes R. Gomes (bolsista PET-EE)
– Wagno Alves Bragança J. (bolsista PET-EE)
– Bruno Henrique S. Guimarães (voluntário IC-EE)
– ... ????
Contato:
– Prof. Ricardo de Oliveira Duarte Email: [email protected]
Sala pessoal: 2521
Sala do LSI: 2515
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LSI – Laboratório de Sistemas Inteligentes
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Thank you!
[email protected]
OptMAlab / ART
www.asic-reliability.com
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Solutions
Network on Chip
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