Transcript SEMI F47

VOLTAGE SAGS-SOLUTIONS IN SEMICONDUCTOR INDUSTRY
Armand Usher
Electrical Engineer
Intel Electronics
Kiriat Gat Israel
1
Intel Confidential
Voltage sags in semiconductor industry
SAGS
In the semiconductor industry facilities (FABs) the “voltage sags” or “voltage
dips” (in British English) are the most common power problem and cause
downtime, scrap and M$ losses.
SAG – voltage drop below 90% of the Un ,but not interruption
Causes - Weather conditions ,equipment failure, operation errors
https://www.youtube.com/watch?v=SeGqCl3YAaQ
Voltage sags in semiconductor industry
ΔU=35.8%Un
Phase
Start Time
Duration (s)
Value (V)
Deviation
Voltage Sag
2
15/09/2014 5:17:32.441AM
0.079
59600
35.83%
64.12%
Interpretation
161 KV 1Ph sag 35% → 22 KV 2 Ph sag 20% → 0.4 KV 3Ph sag 12%
Voltage sags in semiconductor industry
L2
L1
L3
3 Ph Sc
Voltage sags in semiconductor industry
100.00%
90.00%
80.00%
70.00%
60.00%
50.00%
Series1
40.00%
30.00%
20.00%
10.00%
0.00%
0.000
0.050
0.100
0.150
0.200
0.250
0.300
0.350
0.400
0.450
Source Intel Fab 28A XFMR 522 45MVA 161/22KV Dec 2012 –Dec 2013
0.500
Voltagesags
sagsininsemiconductor
semiconductorindustry
industry
Voltage
Affected systems:
•Instrument and controller power supplies
•VFD –variable frequency drives
•Voltage monitoring relays
•Circuit breakers open due to increased current on phases without sags
•Sensor faults or errors
•Robot failure
•Internal communication errors
•Computer re-boots
Voltage sags in semiconductor industry
SOLUTIONS
1 IEC performance improvement
2 Increase the voltage sags immunity for equipment's and tools
3 Install DVR (Dynamic Voltage Restorer)
4 SEMI F47 standard
Voltage sags in semiconductor industry
SOLUTIONS
1 IEC performance improvement
In 1999 were registered about 200 events from IEC supply grid
In 2013 were registered about 100 events
Voltage sags in semiconductor industry
2 Increase the voltage sags immunity for equipment's and tools
-
Switch power supply settings
-
Increase the rating of power supply unit (PSU)
-
Reduce the load in the power supply unit(PSU)
-
Use 2 Phase PSU instead of one phase
-
Use 3 phase PSU
-
Change the voltage relays settings (threshold and trip delay)
-
Use contactors instead of relays were possible
-
VFD calibration instead of scalar to set DFC (direct fly start) were flying start is
automatic
Voltage sags in semiconductor industry
3 Install DVR (Dynamic Voltage Restorer)
The DVR purpose to compensate loss of power during voltage sags
The energy is provided by a capacitors bank
Intel DVR statistic
• Two DVRs –rated power of one DVR 15/22MVA
• Concept : DVR at Off line mode Vs UPS at On line mode
• 15 years in service
• DVR availability 99.9%
• Average voltage compensation /year 120
• DVR external/internal compensation rate 99.5%
• Compensation for 1Ph sags– 50% , for 500msec
• Compensation for 3Ph sags– 35% , for 500msec
Voltage sags in semiconductor industry
Voltage sags in semiconductor industry
DVR
Booster Transformer
Distrib.
Bus
Load
Converter
Energy
Storage
Voltage sags upstream DVR on 161KV
161/93KV
ΔUn=35%
22/12.7KV
ΔUn=2.9%
After DVR compensation on 22KV
Voltage sags in semiconductor industry
Voltage sags upstream DVR on 161KV
After DVR compensation
Voltage sags in semiconductor industry
4 SEMI F47- Specification for Semiconductor
Process Equipment Voltage Sag Immunity
SCOPE
SEMI F47-0706 defines the required voltage sag
tolerance for a semiconductor tool that must
operate without interruption
For sags Phase to N and two Phases (not 3 Ph)
SEMI= Semiconductor Equipment and Materials
International
The standard has been implemented by
semiconductor tool vendors
Voltage sags in semiconductor industry
The primary focus for tools: Lito, Dif, Etch etc
The secondary focus for utilities subsystems and components
–Power supplies units
–Ultrasonic generators
–Computers and communication systems
–Robots and factory interfaces
–AC Contactor coils and AC relay coils
–Chillers pumps and blowers
–Variable frequency drives (VFD)
Voltage sags in semiconductor industry
SEMI F47 requires that tools tolerate the following voltage sags:
•50% remaining voltage, 50% missing voltage, for 200 milliseconds
•70% remaining voltage, 30% missing voltage, for 500 milliseconds
•80% remaining voltage, 20% missing voltage for 1 second.
In addition, SEMI F47 recommends, but does not require, that tools tolerate:
•0% remaining voltage, 100% missing voltage, for 1 cycle
•80% remaining voltage, 20% missing voltage, for 10 seconds
Voltage sags in semiconductor industry
SEMI F47-0706
Equipment will
continue to
operate
Equipment not
required to
operate
Voltage sags in semiconductor industry
F28A 2012-2013 VOLTAGE SAGS vs SEMI -F47 STANDARD
100.00%
90.00%
80.00%
70.00%
60.00%
50.00%
Series1
40.00%
30.00%
20.00%
10.00%
0.00%
0.000
0.100
0.200
0.300
0.400
0.500
Voltage sags in semiconductor industry
Bibliography:
-Intel F28 DVR ABB Switzerland-Maintenance manual
-Intel F28 Elspec- Investigator manual
-SEMI F47-0706 and IEC Voltage Sag Standards -Differences, overlaps, and
similarities - Alex Mc Eachern Power Standards Lab (PSL)
-Sag immunity - Inexpensive, simple ways to increase sag immunity -Power
Standards Lab (PSL)
-Voltage sag immunity standards –Pacific Gas and Electric Company –Power
quality bulletin 3
-www.semi.org