Transcript Camtek_AOI

AOI
(Automatic Optical
Inspection )
Presented by: 傅楸善 & 王林農
0917533843
[email protected]
指導教授: 傅楸善 博士
Digital Camera and Computer Vision Laboratory
Department of Computer Science and Information Engineering
National Taiwan University, Taipei, Taiwan, R.O.C.
Camtek
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Camtek provides intelligent optical inspection
systems.
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Semiconductor Manufacturing and Packaging
High-Density Interconnect Substrates
Printed Circuit Board
DC & CV Lab.
NTU CSIE
Semiconductors
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Ensuring high production yields and reliable
service life of the device.
Defects in the active die area, may lead to
device failure.
DC & CV Lab.
NTU CSIE
A Natural Born Defect Hunter
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Falcons are nature's fastest birds.
Their acute eyesight and flying skills enable
them to capture their target in mid-air.
Trained falcons have been used by royalty for
hunting since early ages.
Camtek's Falcon offers similar qualities:
Keen vision to detect minute defects, and the
speed to do it in rapid motion. But training our
Falcon is much easier.
DC & CV Lab.
NTU CSIE
Falcon 500
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A series of advanced optical inspection
systems for wafers.
Designed to ensure known-good die.
Detects visible defects that may impact die
integrity or interconnect reliability.
DC & CV Lab.
NTU CSIE
Falcon 500 Working Theory
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Dedicated algorithms analyze probe marks to
determine their size, proximity to pad edge
and number of touch-downs.
Equipped with the Camtek’s optional
Confocal Chromatic Height Sensor (CCS),
the Falcon 500 can even plot sampled probe
mark profiles.
Proprietary optics provides high resolution
and contrast.
DC & CV Lab.
NTU CSIE
Falcon 500 Working Theory(cont’)
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Bright and dark field illuminations bring surface
irregularities out while obscuring normal process
variations
Working together, the Falcon’s optics,
illuminations and sophisticated algorithms
provide superb detection with minimal false call
rate. Intelligent and intuitive recipe setup adapts
detection performance to user preferences.
DC & CV Lab.
NTU CSIE
Falcon 500
DC & CV Lab.
NTU CSIE
Falcon 500 Working
Theory(cont’)
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Performance Highlights
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High throughput for 100% inspection at
production rates
New adaptive probe marks analyzing algorithm
Superb surface defect detection
Optional 3D measurement capabilities
Fast, easy and intuitive setup
DC & CV Lab.
NTU CSIE