Transcript ECE 491 Meeting PVD Synthesis and electrical

ECE 491 MEETING
PVD SYNTHESIS AND ELECTRICAL CHARACTERIZATION OF
«?» THIN FILMS
Nov 24, 2011
MOTIVATION
• To get a know «know how» to use PVD system in order to
deposit a thin film
• To get experience on characterization techniques of thin
films
OBJECTIVES
• Formation of «?» thin films by PVD
• Electrical – Optical - Structural Caracterization of these
thin films
Therefore, the project is composed of TWO important parts:
Synthesis
Characterization
Methodology
Determination of the starting parameters of PVD
(P, T, t, substrate, target)
Deposition of the Thin Film by PVD
Electrical – Optical - Structural Characterization of
these thin films
Studying the effect of process parameters
Optimization
Simple Device Fabrication and tests
Questions to be answered
• For which application?
• Electrolumiscent device?
• Sensor?
us
• Which material will be deposited, what will be the
source?
• Which substrate will be used?
• What are the parameters? What will be our starting
parameters?
• T, P, time, etc.
• How does a PVD system operate?
• What are electrical – optical – structural characterization
techniques?  selection of the characterization
techniques and design of the set-ups for measurements.
you
TO DO
Get an insight on:
• Literature review on selected system
• Vacuum Science and Technology (Chapter 2)
• Gas Transport
• Vacuum pumps and systems
• Physical Vapor Deposition (Chapter 3)
• Electrical Properties of Thin Films (Chapter 10)
• Optical Properties of Thin Films (Chapter 11)
• What are the semiconductor quantities that could be
characterized
• depletion width, carrier concentration, optical generation and
recombination rate, carrier lifetimes, defect concentration, trap
states, etc.
• These quantities fall into three categories when it comes
to characterization methods:
1)
2)
3)
Electrical Characterization
Optical Characterization
Structural/Physical/Chemical Characterization
What are these
quantities really?
Semiconductor / Thin Film
Characterization Techniques
Example
1. Electrical Characterization Techniques
• Used to determine which quantities, which property of
material?
• What are the different methods?
• Principles of these methods?
• Set-up?
• Measures quantities?
• Details....