Transcript 6SEMOperationa

Operation of the S4700
FESEM
Quality SEM analysis is a matter of three factors
60% Sample- Preparation or type of sample
30% Knowledge of the operator
10% Type of instrument
Hitachi S4700
Instrument was installed in August of
1999
 Has EDS, Backscatter, EBSD capabilities
 High resolution imaging, up to 500,000X
 Low voltage imaging, down to 0.5kV
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Basic Operation of the S4700
Each time you
use the scope
you need to fill
the LN2 trap to
the side of the
scope.
Degas not Degauss
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If you are the first to
use the scope then
you must “Degas” the
lower aperture
This is to clean the
lower aperture.
Flip the switch
located in the left of
the instrument panel
on the column down
from “Heating” to
“DEGAS”
Software
Software
You will be given a user account and you will
set up a password that will be changed each
time you use the scope.
The initial logo should appear once you log in
If it does not then open the SEM software from
the FE-SEM icon on the desktop
This is the operating
window of the 4700
software.
All operation can be done
with the mouse or with the
help of the small control
panel.
Log Book
The microscope
operating conditions
will be written in a log
book. These include
the readings of the
ion pumps, Ip1, Ip2,
Ip3, the Vext, Ie, Vacc,
date, user name,
advisor and flash
information if
applicable
Set the HV using the HV
control window and the
drop down Vacc menu.
HV’s between 0.5-30 kV are
available
kV selection for a sample should be
based on the type of analysis
Samples that are non-conductors such as ceramics, glass, some
oxides should be run at lower kV due to charging effects, which can
cause problems with imaging.
Samples that are conductors such as metals can be run at higher
kVs but might not be necessary.
Check the sample to see if the desired results are there at lower kVs.
There is no need to blast the sample if the desired results can be
obtained at a lower voltage.
Remember the 2X rule for doing EDS on samples.
Insert Sample into Sample
Exchange chamber
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Once the sample has
been correctly
prepped, it should be
screwed to the end of
the insertion rod.
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DO NOT BEND THE
INSERTION ROD
WHEN MOVING THE
SAMPLE!
Chamber Scope
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The S4700 is fitted with in
infrared camera. This
allows the user to see
inside the sample chamber
and avoid bumping into
detectors when inserting
samples and moving the
stage
Chamber scope is turned
on prior to inserting the
sample into the sample
chamber
On switch
Sample Chamber
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When the S.E.C. light
on the front panel
turns green open MV1
on the sample
exchange door and
allow the sample to be
pulled into the sample
chamber by the
vacuum, watch on the
chamber scope.
Column Setup
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As the sample
chamber pumps
down, use the
Column Setup for
the type of SEM
examination
The S4700 has 6
operation modes
for the column
Ultra High Resolution
Analysis
Normal
Long WD
Magnetic
UHRA
Working distance – True working distance and
can be set.
Condenser lens 1 - Default is 5, smaller
numbers are bigger spot size, range is 1-16.
DeGauss- To degauss the column
Select Detector – Mixed for analysis and
imaging
Upper for high resolution
Lower for analysis and samples that have
slight charging
HV On
Turn on HV in the HV window when
the sample chamber is at L X 10-3
 Check Ip3, if it is 1 X 10-5 then DO
NOT OPERATE
 Note the Vacc, Ie and Vext and put in
Log book
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Imaging
Beam alignment
 Select scan speed
 Locate area of interest
 Go to High Mag mode
 Aperture alignment
 Stigmate
 Final Focus
 Brightness and contrast
 Capture image
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Beam alignment
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Focus the image
Click on “Beam
alignment” in the
“Alignment” window
Use the left knobs on
control panel to adjust
the beam in the middle
of the target.
Will have to been done
multiple times
throughout operation.
Alignment window
Beam align button
Beam
Move the beam to the center of the
target
Can be done in the grid window
using the mouse
Select scan speed
6 scan speeds
 Fast 1 and 2 – Frame averaging Can
be set in the “Signal Processing
Window”
 Slow 1-4 – are raster scan in seconds
and are preset
 5 is a reduced area scan used to aid in
focusing in a smaller area
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Scan Speed buttons
12 12 34
5
Signal Processing window
Locate area of interest
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Orient the sample
using 5 axis stage
X, Y, Z, Tilt, and
rotation
Move the sample to
locate an area of
interest, with
trackball, click and
drag, stage arrows,
change x, y, z, tilt,
and rotate
Trackball
Mouse
Stage Control
Change x and y
positions
Click and drag
either the stage
or the beam.
Rotate
This button for
the beam. Blue
hand cursor
Z position
Stage arrows
Tilt
This button for
the stage.
Yellow hand
cursor
Go to High Mag mode
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Use the Low Mag mode to locate an area of
interest
Low Mag mode is 30-10,000x and can not be
used for EDS
Use High Mag mode for EDS and imaging
High Mag mode is 250x to 500,000x
Not all samples can be imaged at 500,000x
Typical magnification is 25,000x to
250,000x
Aperture alignment
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Check the beam alignment
Increase the mag, best done at the highest
resolution
Click on the “Aperture Align” in the
“Alignment” window
Use X and Y alignment knobs on control
panel
Good alignment has little or no X or Y
movement. Image should pulse or rotate
Low Mag/High Mag mode
Aperture Alignment
Stigmate
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Refocus the image after Aperture alignment
If the image skews out of focus it is out of
sigmation.
Use knobs on the left of the control panel
Y Stigmate first, X Stigmate, fine focus then
check Y and X stigmation again
Gross movement of the image indicates the
sigmators need alignment
Use the Alignment window and proceed with
sigmation alignment in the same manner as
aperture alignment.
Stigmation alignment
Final Focus
Select a slow scan speed to increase
resolution
 Refocus image
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Brightness and contrast
After focus do an “Auto Brightness
and Contrast”
 Brightness and Contrast can also be
adjusted manually with the
“Brightness and Contrast” monitor
button
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Auto Brightness
and Contrast
Button
Brightness
and Contrast
Monitor
Button
Capture Image
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Select image capture options in the “Capture
Image Window”
Capture an image with the “M” button on the
main window.
Image will be temporarily saved to a
“Capture Image Window”
“Capture Image Window” will appear, use the
“Disk Icon” to save the image.
All Images are to be saved on the D drive
At completion images should be moved to the
internet or recorded on a CD.
Capture Resolution-Change
the size of the captured image
Capture speed of the imageFrame averaging or slow
scanning speed
Saved
Capture Image
Window
Red “Saved”, image has been
saved
Red number in upper left corner
is the active image
Yellow number in the upper left
corner is the next window to be
occupied
Disk Icon for saving the image
Use the SEM Data Manager to
view your images
Blurred Images
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Beam Alignement
Aperture Alignement
Stigmantion
Coarse Focus
Fine Focus
Building Vibrations
Stray Electric Fields
Tip Noise
Hints on Stigmation
Check Stigmation Alignment
 Focus best possible image with fine
focus with no “Skewing”
 Y stigmate
 X stigmate
 Fine Focus
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Tip Noise
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Flash Tip
Open the HV Window
Select “Flash”
Click on Flash and watch the Ie number
quickly appear in the window
Note this number in the Log Book
DO NOT operate if the Vext has changed 1.2
more than the most recent Flash Ie
Ie and Vext
Ie changes rapidly after flashing
 “SET” a new Vext as the Ie drops
 Best working conditions are at an Ie
of >9
 If Ie goes up to 12 STOP operation
and flash
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The “On” button becomes a “SET”
Button when HV is on
Flashing button
Ie can be changed, most common is 10
micro Amps