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Basic MOS Device Physics
1
Concepts
understanding of semiconductor devices is
essential in analog IC design
Performance affected by second order effects,
often neglected in digital design
More for deep submicron technologies
Develop transistor model for circuit
performance and analysis
MOS structure, IV characteristics, second order
effects, parasitic capacitances, small-signal
model for MOSFET ,SPICE model
2
MOS Device Structure
4-terminal device, with S and D
interchangable
Digital IC: transistor acts like a switch
Turns on (S and D “connected together”)
when VG high, off when VG low
Structure:
2 heavily-doped n regions defining D and S,
heavily-doped polysilicon forming G, thin layer
of oxide insulating G from substrate
Useful action occurs in substrate region under
gate oxide
3
NMOS and PMOS
with Well
CMOS – both NMOS and PMOS available
on the same substrate
Ok for NMOS, but PMOS must define a local nsubstrate -> n-well
NMOS: S/D junction must be reverse-biased ->
substrate connected to most negative supply voltage
PMOS: S/D junction must be reverse-biased ->
substrate connected to most positive supply
4
MOS Symbols
5
triode region I-V characteristic
ID nC
W
ox
L
1
[(VGS V TH)VDS VDS 2 ]
2
Triode region when VDS <= VGS - VTH
6
Operation in Triode Region
1
2
ID nC
[(VGS V TH)VDS VDS ]
2
W
ID nCox L (V GS VTH )VDS, V DS 2(V GS VTH )
W
ox
L
-> ID linear function of VDS
Parabola approximated by
straight line.
S-D can now be modelled as
a linear controlled-resistor given by
VDS/ID and value controlled by overdrive voltage (VGS – VTH)
1
RON
W
n Cox L (VGS V TH)
7
Active Region (cont.)
Active Region
8
Operation in Active
(Saturation) Region
If VDS > VGS-VTH?
I/V curve no longer parabolic
ID constant, device in saturation/active region
Density of inversion layer proportional to VGS – V(x) – VTH
If VDS slightly greater that VGS – VTH, inversion layer stops at x <= L;
i.e. channel is pinched off
As VDS increases further
Point at which Qd equals zero gradually moves toward S
1
ID nC
[(VGS V TH)VDS VDS 2 ]
2
'
V DS V GS VTH (Pinch off )
nCox W
ID
(V GS VTH )2
2 L
W
ox
L
9
Drain current characteristics
10
Drain current
Linear region (Vds < Vgs - Vt):
Id = k’ (W/L)(Vgs - Vt)(Vds - 0.5 Vds2)
Saturation region (Vds >= Vgs - Vt):
Id = 0.5k’ (W/L)(Vgs - Vt) 2
11
MOS operation conclusion
region
VG
ID
VDS condition
condition
OFF
VG < VTH
Any value
TRIODE/
LINEAR
VG >VTH
VDS < VDS -VTH nCoxW/L (VDSVTH)VDS – 0.5VDS2
SATURAT
ION
VG >VTH
VDS > VDS -VTH 0.5nCoxW/L (VDSVTH)2
0
12
Transconductance, gm
Let’s define gm as an indicator of how well a device
converts a voltage to a current (consider saturation
region)
ID nCox W (VGS V TH)
L
gm
VGS VD S cons tan t
gm represents device sensitivity
gm 2 nCox L ID
2ID
VGS V TH
W
e.g. small change in VGS results in large change in ID
As seen in eqn above, gm is equal to inverse of Ron in deep
triode region
13
gm behavior – from gm plot
Notice:
gm increases with overdrive if W/L constant
gm decreases with overdrive if ID constant
14
Triode and Active Region Transition
Rule of thumb when trying to know if device
is in saturation or linear
NMOS: VG - VD < VTHN, pinch-off occurs
PMOS: VD – VG < |VTHP|, saturation
Active
Active
15
Second-Order Effects
Now let’s look at second order effects and
get some idea on how our circuit could be
affected by the phenomena
16
Body
Effect
What happens when bulk and source are not at the same
potential
Consider NMOS: When VB drops below VS
S and D still reverse-biased -> device continues to operate properly
but some device properties might change
e.g. VS=VD=0; VG a bit less than VTH -> depletion layer formed but
no inversion layer
As VB becomes more negative -> more holes attracted to substrate
connection, leaving larger –ve charge behind (i.e. depletion region
becomes wider)
VTH = f(total charge in depln region), and gate charge must mirror Qd
(channel charge density) before an inversion layer formed
VB drops, Qd increases, VTH increases -> “Body effect” / “Backgate”
Effect
VTH V TH0 2F V SB 2F ,
2qsiNsub
Cox
17
Body Effect …
VTH
Qdep
MS 2F
Cox
l denotes body effect coefficient
Typical values: 0.3 to 0.4V1/2
Could take place when:
Bulk potential change
Source potential varies wrt bulk potential
18
VTH and Body Effect
Ignore body effect:
No Body Effect
With Body Effect
As Vin varies, Vout closely follows the input
Drain current remains I1
• I1=0.5nCox(W/L)(Vin-Vout-VTH)2
• i.e. (Vin-Vout) is constant if I1 is constant
Body effect significant, substrate tied to gnd
As Vin and Vout become more positive
VSB increases -> VTH increases
To maintain constant ID, Vin-Vout must increase as well
Body Effect: Undesirable, complicates design of analog and
digital Ics
Nsub and Cox has to be balanced for reasonable l device
engineers’ job!!!)
19
Channel Length
Modulation
L
L’
Noted earlier that VGD L’ (pinch-off)
L’=f(VDS) channel length modulation
1
1
/
L
'
(1 DL / L)
We can then write: L' L DL
L
st
Assume 1 order relationship btwn DL/L and VDS,
and define l as CLM coefficient:
1
1/ L' (1 lVDS ), l VDS DL / L
L
We can re-write current equation in saturation:
ID
nCox W
2
L
(V GS VTH )2 (1 lV DS )
20
Channel Length Modulation
(cont’d…)
CLM results in non-zero
slope in IV characteristics
Non-ideal current source btwn D and S in saturation regime
l represents relative variation in length for a given increment in VDS
Short channel -> must consider bcoz it’s bigger compared to longer
channels
DL/L VDS linear approximation becomes less accurate for shorter
channel
Re-write equation for current in saturation -> must rewrite equation
for transconductance, gm
2 nCox W L ID
W
gm nCox (V GS VTH )(1 lV DS ) gm
(1 lVDS )
L
2ID
gm
, (unchanged)
VGS VTH
21
Subthreshold Conduction
When VGSVTH, weak inversion layer still exists
(transistor do not fully turn off)
hence allowing some current flows from D to S
ID drops at a finite rate as VGS falls below VTH
VGS
ID I 0 exp
kT
z
q
Exponential dependence on VGS
z > 1 = nonideality factor, VT=kT/q
Eqn similar to bipolar’s characteristic
Subthreshold Conduction:
Subthreshold conduction
Static Power Dissipation (Leakage)
a problem for large circuits (e.g. memory)
22
MOS Layout
Brief look at layout to better understand / visualize
device capacitance & MOS model
Layout determined by:
Electrical properties required of the device & design rules
(e.g. W/L dictates gm, L governed by the process)
(a) 3D view of an NMOS
(b) top-view
Poly extends beyond diffusion
Ensure reliable definition of edge of transistor
Total S and D area minimized to minimize capacitance
23
Layout…
Draw layout of circuit in (a)
24
Device Capacitances
Need to consider to predict ac behavior
Value of capacitance depends on bias
conditions of transistor
Source of capacitance:
Oxide capacitance, Cdepln, Coverlap
25
Device cap… cont’d
Oxide capacitance
Btwn gate and channel
C1 = WLCox
Depletion capacitance
Btwn channel and substrate
C2 = WL(qsiNsub/(4fF))
Overlap capacitance
C3 and C4, simplest formula WLDCox
More elaborate calculations required for accurate value
Junction capacitance
Btwn S/D and substrate
Cbottom-plate (Cj) + Cside-wall (Cjsw)
Cj = Cjo/[1 + VR/fB]m, VR = reverse voltage across junction, fB built-in26
potential, m a power in between 0.3 and 0.4
Layout for Low Capacitance
Folded structure
For layout in (a)
C DB C SB WEC j (W 2 E )C jsw
For the same transistor in (b)
W
C DB EC j 2( E )C jsw
2
W
W
C SB 2 EC j 2( 2 E )C jsw
2
2
WEC j (W 4 E )C jsw
Note: (b) has less CDB than (a)
27
G-S and G-D
Capacitance
Device off
CGD = CGS = CoverlapW
CGB = Cox in series with Cdepln
CoxCdepln/(Cox + Cdepln)
Device in deep triode region (VS VD)
CGS = CGD = Cox/2 + overlap cap = WLCox/2 + Wcov
Cox/2 because WLCox divided equally btwn GS and GD terminals
• Change DV in VG draws equal amount of charge from S and D
Device in saturation
CGD Wcoverlap
Non-uniform vertical electrical field in gate oxide along channel because
Potential across channel varies from VGS @ S to VGS – VTH at pinch-off point
CGS = 2WLeffCox/3 + Wcoverlap
CGB neglected in triode & saturation because inversion layer acts as shield
btwn G and bulk. Charge supplied by S and D rather than bulk for a change in
28
DVG
MOS Small Signal Models
Channel length
modulation modeled as
aVDS
Channel length
modulation modeled
as a resistor
Body effect modeled as
gmVBS
29
Models explained…
Channel Length Modulation
ID varies with VDS -> modeled by a voltagedependent current source
Note: I linearly varies with V -> linear resistor
VDS
1
1
1
ro
n
C
ox
W
ID ID / VDS
lID
(VGS VTH ) 2 l
2
L
ro affects circuit’s performance
Limits amplifier gain, affect output impedance, etc.
30
Bulk Transconductance, gmb
Bulk potential affects VTH hence gate-source overdrive
When all other terminals held constant
ID = f(VB) -> bulk behaves like a second gate
Modeled as a dependent current-source -> gmVBS
ID nCox W
V TH
gmb
(V GS VTH )
V BS
V BS
2 L
saturation
Also,
VTH VTH
(2F V SB)1/ 2
V BS
VSB
2
gmb gm
gm
2 2F V SB
fF = work function of polysilicon
gate – work function of
silicon substrate
fF = (kT/q)[ln(Nsub/ni)]
31
Gate Resistance
Need to consider resistivity
as well
Each terminal exhibits finite ohmic resistance
How to minimize the resistance?
Folded structure?
Reduces RG by 4X
32
MOS Small Signal Model with
Capacitance
33
C-V of NMOS
Capacitor on chip very expensive
Transistor capacitive (monolithic)
NMOS: S,D, and bulk GND-ed
VG inversion layer forms from VGS VTH
For VG –ve
Holes in substrate atrracted to oxide interface
• NMOS in “accummulation region”
Device viewed as Cox (gate plate and substrate plate, tox separation)
As VGS density of holes @ interface falls
Depletion region starts to form, device enters weak inversion
C = Cox and Cdepln
For VGS > VTH
Channel formed. Capacitance = Cox
34