Transcript Semiconductor Training 2011

About Conax Semiconductor
2011
© 2011 Conax Technologies
|
2300 Walden Avenue, Buffalo, New York 14225 USA
|
www.conaxsemiconductor.com
• Division of Conax Technologies LLC
• 55 Year Old Company based in Buffalo, NY, USA
• Fully Integrated, State-of-the-Art Facility featuring
some of the most sophisticated manufacturing
systems in the industry.
• ISO 9001:2008 certified
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
|
www.conaxsemiconductor.com
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Facilities
Our fully integrated, state-of-the-art ISO 9001:2000 certified production facility in upstate New York features some of the most sophisticated
manufacturing systems in the industry.
Complete in-house capabilities include computer-aided engineering, design and manufacturing. We have state-of-the-art equipment for machining,
assembly, welding and testing. All Conax Semiconductor products are produced under our stringent quality assurance program.
Product Assurance Capabilities
• Calibration Lab
• Unholtz-Dickie Vibration System (600lb Table Capacity, 5g’s, to 2000Hz)
• Environmental Chambers (Temperature and Humidity Testing)
• High Purity Mineral Insulated Cable Fabrication
• Leak Testing (Helium Mass Spectrometer with sensitivity to 10-11 scc/sec)
• X-ray Capabilities
• High Magnification Video Inspection System
Helium Mass Spectrometer
Product Development and Analysis Capabilities
We have a wide variety of equipment to support product development efforts and should the need arise,
failure and root cause analyses. This equipment includes chambers for accelerated thermal aging and
cycling with temperature capabilities to 1700°C, temperature and humidity chambers, high magnification
video inspection system and in-house x-ray capabilities to name a few.
We are also located less than 15 minutes from the renowned State University of New York – Buffalo
where we routinely access sophisticated analysis tools such as Scanning Electron Microscopy (SEM).
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Laminar Flow Tables – Certified 209E, Class 100
We manufacture a variety of products for the semiconductor industry. Some are required to be
manufactured under and packaged for clean room environments. In these cases, we utilize
laminar flow tables for assembly and double bag products to allow for a two-step unpacking
process as our products move into cleaner environments within the fab prior to installation.
Inside of our specialized semi production unit, we utilize laminar flow tables to assemble those
temperature sensors that require this exacting process.
Raw materials used in the construction of these types of thermocouples are only handled with
latex-gloved hands. The components are cleaned with semiconductor grade, lint-free isopropyl
alcohol wetted wipes.
Laminar Flow Tables
Test and Calibration Lab
Our instruments are tested and calibrated against exacting standards that are traceable to
the National Institute of Standards and Testing (NIST) and conform to the latest industry
specifications and protocols such as the American Society for Testing and Materials
(ASTM).
We have in-house capabilities enabling us to perform NIST traceable calibrations at
temperature up to up to 1650°C.
We utilize a state-of-the-art computer controlled data acquisition system that provides
computer generated calibration reports, ensuring data accuracy and integrity by eliminating
potential human errors in reporting.
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2300 Walden Avenue, Buffalo, New York 14225 USA
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Test and Calibration Equipment
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Laser Welding Capabilities
We have three welding processes that perform on a daily basis. Two of these processes, Tig
and Plasma have been utilized in our production for a number of years.
These welding process produce welding techniques that are faster and better. For example, we
can can now precisely form an ungrounded junction on MIMS that are as small as .040” in
outside diameter and also form isolated ungrounded junctions on MIMS that are .062” in
diameter with 4-wires.
Laser welding also creates a very minimal HAZ (Heat Affected Zone) on thermocouple wires
and leaves the junctions with virtually no mechanical stress. This dramatically improves the
integrity and life of the products.
Laser Welding Equipment
Laser Engraving Capabilities
Laser Engraving Examples
When appropriate, Conax Semiconductor laser engraves serial numbers on each
thermocouple connector.
Our competitors routinely provide no serialization, or at best hand-scratch serial numbers
onto connectors.
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Conax
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Quality Assured Packaging Process
Conax Semiconductor takes all the necessary packaging steps required by the semi industry.
For example, when we package and ship our quartz sheathed thermocouple products, we place all finished thermocouple assemblies inside
their unsealed bags into a vacuum chamber. Once evacuated, the chamber is filled with hospital-grade dry-air. This process is then repeated.
Following the second drying cycle, the plastic bags are then sealed. Each serial numbered assembly is then placed into a foam padded box for
shipment.
Same Day Shipment Program
Conax Semiconductor stocks many temperature sensor and sealing gland styles that are ready
for same-day shipment. If you need a customized product, Conax will stock these on our
shelves as well if you enroll in our Customer Managed Inventory Program (CMI).
Re-sheath and Reclamation Programs for Thermocouples
For customers who wish to reuse the internals of our thermocouple (ex. precious metals), Conax offers a Thermocouple Resheath Program that is designed to save money and extend the ROI on your initial purchase.
For those customers who prefer not to reuse their thermocouple internals but would like to save money (and the environment),
Conax offers a Precious Metals Reclamation Program. This program provides our customers with credits to be used to offset
the cost of new thermocouples.
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
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Our Website and Literature
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Our Focus on the Semiconductor Industry
• Leading supplier of custom designed temperature sensors
and compression seal fittings to the Semiconductor
Industry for over 30 years.
• Specializing in:
– High Temperature Epitaxial thermocouple designs for several
Silicon and Compound Semiconductor process tools
– High Temperature Photovoltaic Crystal Growth temperature
sensors, electrode and thermocouple/wire feedthroughs for PV
Cell Processing/Coating
– High Temperature Compound Semiconductor Crystal Growth
– High Accuracy/High Stability room temperature controls used in
Nanotechnology Research and Development Laboratories
– Fiber Optic Feedthroughs used to introduce Fibers into High
Vacuum tools such as EUV Lithography Tools
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Partial List of Semiconductor/PV Customers
Allegro Microsystems
Linear
Samsung
Analog Devices
LG Siltron
Siltronic (Wacker)
Applied Materials
Maxim Integrated Products
SolarWorld
Axcelis Technologies
MEMC Electronic Materials
SORAA
Axic
Miasole
SST International
Blue Square Energy
Moore Technologies (Moore Semi Parts)
Sumco Phoenix
Chartered (Global Foundries)
Nanofilm
Sumika
Fairchild
Nanosolar
Texas Instruments
First Solar
Numonyx
TSMC
GT Solar
On Semiconductor
Veeco Compound Semiconductor
Hemlock Semiconductor
Osram Opto Semiconductor
Vishay Siliconix
II-VI (eV Products, Endicott Interconnect)
Philips Lumileds
Willard & Kelsey
Intel
Polar Semiconductor
Xunlight
International Rectifier
Poongsan Microtec
Zygo
IQE-RF
Power Film
Resellers selling to unknown customers
Kayex
Rainbow Opto
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Two General Product Groups
• Compression Seal Fittings
• Temperature Sensors
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Thermocouples for ASM Epsilon® Reactors
• Conax offers a full line of thermocouples for the 150mm,
200mm and 300mm versions of ASM Epsilon reactor
• Two choices for cost conscious Fabs
– Gen 1.0 manufactured using OEM Certified quartz components
– Gen 1.1 manufactured from standard-sized quartz tubing with
sensor life 10%-30% longer than OEM standard but at a lower
price
• One version for Fabs requiring long life performance
– Gen 2.0 designed for 40-160% longer service life over standard
OEM version with no reactor modification needed
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Thermocouples for ASM Epsilon® Reactors
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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One 150/200 ASM Epsilon Customer’s Experience
• Our longer-lasting Gen 2.0 TCs allows our customer to
reduce by 50% the number of PMs required solely to
change out thermocouples
• Gives them ability to produce more wafers
• Translates into a projected $1 million annual increase in
finished product per reactor per year!
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Epitaxial Barrel
Reactor
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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Epitaxial Barrel Reactor
Calibration TC
Triple-Point Calibration TCs
AMAT P/N
Conax P/N
676692
9277-01
676693
9277-02
678582
9277-03
678583
9277-04
678826
9277-05
671097
9277-06
N/A
9277-07
0090-14001
317579-001
N/A
317579-002
90602
316518-001
N/A
316518-003
N/A
318436-001
66534
10-0344-001
Single-Point Calibration TC
1310-01031
© 2011 Conax Technologies
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C424-1
2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Centura Epitaxial
Reactor Calibration TC
Centura Calibration TCs
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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AMAT P/N
Conax P/N
1150-01015
10-0800-001
1310-01058
10-0800-002
1310-00127
10-0800-003
www.conaxsemiconductor.com
Ion Implanter TCs
Axcelis Ion Implanter TCs
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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Axcelis P/N
Conax P/N
7435-0011-0001
318441-001
7435-0010-0001
318441-002
?
10-1160-001
?
10-1160-002
www.conaxsemiconductor.com
Horizontal & Vertical
Diffusion/Oxidation Furnaces
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Profile TC for
Horizontal Diffusion/Oxidation Furnaces
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Profile TC for
Horizontal Diffusion/Oxidation Furnaces
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Profile TC for
Vertical Diffusion/Oxidation Furnaces
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Single and Dual Spike TCs for
Vertical Diffusion/Oxidation Furnaces
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Dual, small diameter TC with Conax
machined VCR Seal for high vacuum
application
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Dual, small diameter TC with Conax
machined KF Flange for high vacuum
application
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Bare
Junction
C-type
TC for
High
Temp.
High
Vacuum
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Mini, High Temperature, Bare Junction TC
for Fast Response
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Heavy Duty Dual Ceramic/Metal Sheath,
Dual Sheath Seal, ANSI Flange
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Heavy Duty Dual Ceramic/Metal Sheath,
Dual Sheath Seal, ANSI Flange
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Ceramic Sheath, Dual Seal on Sheath and
Bare Wires with Union for fast removal
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Bare Junction TC with Quartz Sheath for Vacuum
environment with Metal Mounting Bracket
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Dual High-Temp TC with Dual Sheath/Wire
Seal and Integrated Vacuum Flange
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Copper Wire Feedthrough
for HAST IC Testing
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Thermocouple Wire Feedthrough
for HAST IC Testing, Chamber Validation
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Various Small and Large Diameter Wire
Feedthroughs, some transitioning from Solid to
Stranded Wires for Increased Flexibility
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
Multi-mode, Multi-axis Fiber Optic
Vacuum Feedthrough
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com
RF Coaxial, Multi-mode, Single-Mode
Fiber Optic Vacuum Feedthrough
© 2011 Conax Technologies
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2300 Walden Avenue, Buffalo, New York 14225 USA
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www.conaxsemiconductor.com