Transcript Document

Accelerating Productization
Functional MetrologyTM
When and Where You Need Visibility Into Your Product
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Challenges of Semiconductor Productization
Leading IDM’s Solution
Novel Solution -> In-product Functional MetrologyTM
Functional MetrologyTM User Applications
Summary of Functional MetrologyTM
Challenge: Longer Productization Cycles
26
33
Months
Months
Intel Investor Meeting 2014
Over 25% Increase in
New Process/Product
Introduction
Challenge: Longer Productization Cycles
New product introduction is taking longer, driven by
• Advances in process technologies, new devices and
“shrinks”
• Increasing design and process complexity
• Power-Performance balance
• Increasing yield detractors (e.g. across-chip
variability)
Lack of visibility inside of the product die
restricts actionable plans
Challenge: Exponentially Increasing Data
Data (Complexity & Volume)
“Data Mining” for Actionable/Relevant Functional Data is Difficult
How to
generate
actionable /
relevant data?
Shrinking Geometry - Time
Industry Leader Solution
Test Circuits Deployed Across Product Die Enable Functional Measurements
Figure 21: Ring Oscillator can be placed product die
Functional MetrologyTM Introduction
Shortening Productization Cycle at “Zero-Impact” and “Zero-Cost”
tau-Metrix’s Functional MetrologyTM enables
across-die performance measurements, and
provides early direct insight into the design, process
and product from early R&D/Characterization to
High-Volume Production
Functional MetrologyTM has been verified on
product die delivering an estimated 20-40% cycle
time reduction.
Enabling In-Product Functional Insight
Shorten Every Phase of the Product Cycle
• In-Product Die Measurements with Zero Impact
– User's test circuits inserted at user’s choice (e.g. critical
nodes, cells, etc.)
– “Autonomous” non-invasive, no-impact high spatial
density
– Full design and process compatibility
• Relevant Functional Data at Metal 1
– Early Performance Metrics
– “At-speed” measurement of circuit functionality and
performance
– Non-disruptive and complementary to standard test and
metrology
IC-AuditorTM – Direct @SpeedTM Measurement
Ubiquitous, “Autonomous”, Zero Impact and Non-Contact Measurements
Scalable (~ 50-100mm2)
Output 1
Non-Contact
Activation
Input
ROs
Output 2
Non-Contact
@SpeedTM Detection
User’s Circuit
Examples:
pFET
Drive
nFET
Drive
Inverter
Vt , Threshold
• Switching delay Voltage
• Sensitive to Leff
Drive Strength
Interconnect
Gate Capacitance Resistance
Interconnect
Capacitance
• User’s electrical and physical “autonomous” in-product test-structures
• Full design/process (Bulk and SOI) and FinFET compatible
• Qualified from 90nm to 22nm
Product Die Functional Measurements
tau-Metrix acquires Functional Measurements early at Metal-1
Functional Metrology at Metal-1
Wafer Sort at Final Metal
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Global full product functional test
Long distance from core logic
Accumulative timing delays
Product Die
Scribe
Chip
Pad
Pad
Local @SpeedTM functional measurement
Direct non-loading and non-invasive measurements
Implement in Fill Areas (Zero Cost)
Product Die
Scribe
Chip
Pad
Pad
Block
Block
Pad
Probe
Tip
RO
Pad
Pad
Cell
Pad
Cell
Pad
Logic
Logic
RO
Pad
Pad
Pad
Pad
Pad
RO
Pad
RO
Pad
Pad
Pad
Pad
Nth
Pad
Pad
Pad
IC-AuditorTM
Functional MetrologyTM User Applications
Shorten Every Phase of the Productization Cycle
Product Die
Functional
Performance
Wafer and Die
Yield Forecast
Process Integration
and Performance
Predictive Performance
Yield at M1
Failure Analysis
Process and Model
Development
IC-AuditorTM
Productization Cycle Time Reduction
Early Visibility to Capture Functional Data Reduces Cycle Times
Traditional Functional Measurement Cycle
Design
Mask
Active
P
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M
1
Fab
M
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Sort
Package
FT
M
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Sort
Package
FT
16-18 Weeks
Months
Functional Metrology Cycles
Design
Mask
Active
P
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M
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Fab
M
6
M
1
0
8-9 Weeks
Data When and Where You Need it Across the Entire Productization Cycle
Functional MetrologyTM Impact
Complexity
“Early Visibility” and “Intelligent Data” Reduces Cycle Time by 20-40%
Shrinking
Geometry
Time
Functional MetrologyTM
 Functional MetrologyTM delivers performance measurements early, at Metal-1,
using “Zero Impact” IC-AuditorTM embedded throughout the die
 Non-contact performance measurements maintain design and wafer integrity
while providing direct circuit access
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Applying
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User’s circuits utilized to build “IC-AuditorTM ”
Autonomous IC-AuditorTM embedded in “Fill Space”
Full process/design compatible (including FinFET)
Scalable and verified on 90nm-22nm Bulk and SOI
Enables
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Minimal implementation resources and design complementary
Ubiquitous and dense (spatial) in-product-die, scribe and cross-wafer
Fast and early Metal-1 performance measurements
@SpeedTM functional performance measurements
Applications
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R&D/characterization of device and process
Design/process development and integration
Yield forecast and optimization in volume production
Process monitor/control and functional test
Failure analysis on “good” AND “bad” (non-functioning) die/wafer
Eliminates
– Weeks of waiting for product performance data
– In-die test overhead circuitry for power/detection and control
– Dedicated test-wafers and non-product mask-sets
Functional MetrologyTM Summary
• Intra-Die “IC-AuditorTM” – Early and Relevant Data
• Compatible “Zero Impact” – Ready to Use
• Autonomous “Circuit” – No Product Impact
• “Performance” Measurements – Non-Contact @SpeedTM
• Simple “Plug & Play” Structures – Easy to Use
Early/immediate visibility into across-die functional data
significantly reduces the productization cycles
Implementing Functional MetrologyTM
• Implement user’s cells in product
– tau-Metrix helps with design and integration process
IC-AuditorTM
Product Die
Wafer
• Measure IC-AuditorTM cells across die and wafer
– tau-Metrix takes measurements and provides data
Automated Measurement
@SpeedTM Measurement
Functional MetrologyTM Deployment
Enabling an innovative solution to support customer’s unique requirements
1. Functional MetrologyTM Service
– tau-Metrix provides design integration support and
measurement services on customer’s devices
– Ease of adoption and implementation
2. Functional MetrologyTM off-line
– tau-Metrix provides design support as needed
– Customer acquires fully automated measurement system
– Enables full customer control and unlimited measurements
3. Functional MetrologyTM in-line
– tau-Metrix provides design support as needed
– FAB deploys fully automated FAB measurement system
– Enables in-line fully automated measurements, complementing
metrology and test tools
Thank You