Transcript Micro to Nano Technologies

Micro to Nano
Technologies
By: Brent Hare
Lenox laser
March 30, 2004
Micro to Nano Technologies

Micro - Prefix meaning one millionth,
1/1,000,000

Nano – Prefix meaning one billionth,
1/1,000,000,000
The Powers
of 10
10+0
1 Meter
10-1
10 Centimeters
10-2
1 Centimeters
10-3
1 Millimeter
10-4
100 Microns
10-5
10 Microns
10-6
1 Micron
10-7
1,000 Angstroms
10-8
100 Angstroms
10-9
1 Nanometer
10-10
1 Angstrom
10-11
10 Pico meters
10-12
1 Pico meter
10-13
100 Fermis
10-14
10 Fermis
10-15
1 Fermi
10-16
0.1 Fermis
10-17
0.01 Fermis
10-18
0.001 Fermis
Current Micro Technologies
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Photonics - Optical Apertures and Flow Orifices
Electronics – Semiconductor chips, anodic bonding
MEMS – Micro Electro Mechanical Systems
Communication – Fiber optics, switching
interconnects
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Biotechnology - cell filtration, drug discovery
Current Nano Technologies

Molecular manufacturing – Precision down to
the atomic level

Nanotubes –Building advanced lightweight materials
as well as advancements in LCD technologies
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Medicine – Devices that will flow through the
circulatory system
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Nanocomposites – Assisting in vast improvements
in material compositions

Electronics – Advanced CMOS and silicon transistor
integration with lithography
Micro scaling to Nano
Click Picture to watch Nanotechnology movie
mms://stream.techtv.com/windows/bigthinkers/2
002/bt020225b_165_0.asf
Micro - Optics
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Ability to drill to ½ micron for half the
wavelength
Micromirrors for next generation telescope
optics
Micromirrors
Microlens Arrays
http://www.memsoptical.com/prodserv/products/
microlensar.htm
Micro - Electro

Pentium 4
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Top speed – 3.4ghz
Built on a 0.13
micron die
168 million
transistors on
200mm2
http://www.geek.com/procspec/intel/pic2p413.htm
Micro - Chemical
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Miniature fuel cells
Micro channels
Chemical reactors
Micro Chemical Channel
Micro Fuel Cell
http://www.utnl.jp/~mada-lab/research.html
50 Micron Chemical Reactor
Micro Flow Devices
Swagelock has
begun to
minaturize
its flow
components
=
6in. x 18in.
Photos from Pittcon
3ft. X 4ft.
Micro - Engineering
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Micro gears
Micro embossing and
stamping
Microactuators (Tiny
Motors)
Micro-valves
Complex Ratchet
http://www.memx.com/image_gallery.htm
Micro embossing
Micro-valves
Micro - Mechanical
Microactuators – tiny motors
http://us.st.com/stonline/prodpres/dedicate/mem
s/technolo/micro/photo.htm
Micro Mechincal
World’s smallest steam engine,
the pistons are 5 microns
and it actually works
Micro Clutch mechanism,
gears are 50 microns
http://www.memx.com/image_gallery.htm
Microfluidics
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Capillary uptake
Piezoelectric
inkjets
Flow sensing
Drug dispensing
Flow based
separation
http://www.sensorsmag.com/articles/0700/10/m
ain.shtml
Print Cartridges
Lab-On-Chip for DNA
Detection and Analysis
Micro Canals
Micro Communications
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Full optical switching
technologies
Most fiber optic
backbone in the United
States ranges from 1.3
to 1.5 micrometers and
can transmit over 5
GBps and can span 93
miles
http://www.lucent.com
Fiber optic switching
e-blox (Scaleable, Interfaceable, Stackable)
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Micro to nano interfaces for simple solutions
e-blox allows you to build backbones
connecting Gas, Liquid, Electro, Optical –
Fiber/Micro, and nanotechnologies in
order to build unique devices for MEMS
and other technologies
Imagine devices built with the integration of all of
these competing technologies on a Scaleable,
Interfaceable, Stackable solution at the micro
and nano level
MEMS (Powder Metal Die Casting
for building small parts)
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The ability to arrange particles and then
compress them into a die to build ultra small
parts that can be used in MEMS technologies
i.e. e-blox
They have the ability to create miniature tools
and dies to help build MEMS technologies
Micro Sensor 0.051mm
http://www.smalltimes.com/document_display.cf
m?document_id=5340
Rapid Prototyping
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Use of 3D CAD modeling with
SolidEdge
3D Scanning Technologies –
Use of lasers and optics to
scan surface objects
3D Holography Technologies –
Holograms for real
visualizations
http://www.solid-edge.com/
3D CAD Model
Electroforming Technologies
Electroforming is the process of fabricating a
part from the plating itself. A shaped mandrel
is plated long enough to build up a "stand
alone" thickness. The mandrel is then
removed by melting, chemically etching or
exploiting differences in thermal coefficients
of expansion between the electroformed part
and the mandrel.
http://www.epner.com/electroforming_intro.ssi
Etching Technologies

Wet Etching – Dissolves materials with
chemicals and the use of masks
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Dry Etching - ion etching (RIE), sputter
etching, and vapor phase etching are used by
blasting the material surface with ion gases
http://www.memsnet.org/mems/beginner/etch.ht
ml
Lithography Technologies
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Lithography is a printing process where
image areas and non-image areas are
separated chemically
Silicon semiconductor companies use
extremely small masks to mark silicon wafers
with 248 nm, 193nm, and now 13.4nm
wavelengths of light
http://www.intel.com/research/silicon/lithography
.htm
Piezeo electronics
(for micro to nano movement)
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Pizeoelectronics are materials that produce
an electrical response to a mechanical force.

Can be used in Vibration Monitoring, Imaging
Arrays, Doppler Probes, Biotech,
Pharmaceutical, and Industrial & Process
Control
First NanoChips
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Integrated circuits
can be made down
to 50nm
50nm chips are
made using 193nm
lithography (smaller
than a wavelength
so they use
diffraction
corrections)
http://www.sciam.com/article.cfm?chanID=sa00
2&articleID=000CE8C4-DC31-1055973683414B7F0000&pageNumber=4&catID=2
Next Generation Nano Lithography
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To build chips smaller than 50nm, new
lithography technologies must be
created – The above technology can
use 13nm ultraviolet wavelengths
http://www.sciam.com/article.cfm?chanID=sa00
2&articleID=000CE8C4-DC31-1055973683414B7F0000&pageNumber=4&catID=2
Nano Biotechnologies
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Scientists have developed a way
to use DNA for minuscule wires
that can be used in
nanoelectronics
Ability to have insulated wires
sized at 25nm and 20 microns in
length
http://www.sciam.com/article.cfm?chanID=sa00
2&articleID=000CE8C4-DC31-1055973683414B7F0000&pageNumber=4&catID=2
Nanotubes
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Conductive and highstrength composites
Energy storage and
energy conversion
devices
Sensors
Medical drug delivery
and DNA research
Nanometer-sized
semiconductor devices,
probes, and
interconnects
Nanotubes are built by
arranging
several atoms in a closed
pattern to form an unbelievably
small tube
http://www.lbl.gov/ScienceArticles/Archive/images4/nanotubes-model.jpg