Transcript chrispp

Preliminary Presentation
Characterisation and
Reliability testing of THz
Schottky diodes.
By Chris Price
[email protected]
Supervisor: Dr Byron Alderman
December 2006
Contents
• Problems with THz technology
• What is a Schottky diode
• What are Schottky diodes used for
• The fabrication method
• European situation
• Characterisation
• Reliability
• Summarise current position
• Future plans
• Questions ???
Probe station (Pegasus s200)
• THz frequencies are loosely defined in the
range of 0.1-10 THz
• There is an absence of low cost, miniaturised
solid state power supplies
Problems with THz Technology
10-3
10-2
10-1
1
Frequency (THz)
10
Problems with THz Technology
• Transit Time Devices (up to 170 GHz)
•
Advanced electronics
•
Equivalent to commercially available
devices with reduced dimensions
• Maximum frequency determined by;
•
Time taken for a carrier to move a characteristic
distance
•
And to a lesser extent the RC time constant
Problems with THz Technology
• Energy Transition Devices
– Charge carriers undergo a transition between
energy states
– Frequency given by (E2 – E1)= h f
• Problems;
– Cannot get population inversion at room
temperatures
– Photon density of states α Frequency^2
E2
Photon
Frequency, f
E1
•
•
P-N diode
is a combination to two oppositely doped semi-conductors
What
is
a
Schottky
diode
P- Type
N- Type
Recombination of electrons and holes occurs creating a
depletion zone
Energy Band
diagram of
P-N junction
What is a Schottky diode
• Combination of metal and a semi-conductor
• This creates;
– Lower junction voltage
– Almost non-existent depletion width in metal
• Another property of Schottky diodes;
– Majority carrier
• No slow random recombination
Energy band
diagram of
Schottky
junction
Planar Schottky diode
• Diode current voltage relationship is given by;
qVd
i  I 0 (exp(
)  1)
k B T
i is the current
I0 is reverse saturation current
q is the charge on an electron
Vd is voltage across the diode
kb is the Boltzmann constant
T is the temperature in kelvin
η is the ideality
Schottky Contact
Air Bridge
Ohmic
• Two devices that use the non-linear
properties are;
• Multipliers (diode used as a varactor)
– High frequency multipliers use the
nonlinear
2
I (VB capacitance
 V )  a0property,
 a1V and
 a2afilter
V toa3eliminate
V 3  ...
specific harmonics and produce an output that
is a multiple of the input frequency
What diodes are used for
What diodes are used for
•Mixers (diode used as a varistor)
•
A mixer is a non linear circuit that
A1. A2
receives
two
and
v1 .v2 
[cos(
2 [input
f1  f 2signals
]t )  cos(
2 [outputs
f1  f 2 ]t )]
2
a signal
equal to the difference and to
the sum of the two input frequencies
The creation of these diodes can be
broken down into four stages:
1) Making the ohmic
Fabrication Process
2) Making the Schottky contact
3) Making the finger
4) Making the air gap
3
4
2
2
1
1
3
4
Preparing the ohmic
Annealer
Thermal evaporator
Schottky Contact
E- beam evaporator
Anode Finger
Air Gap
• Virginia Diodes Inc. (VDI)
– Leading supplier of Schottky diodes
– Concerns over future availability
• University of Bath
Supply
Situation
in Europe
– Made limited
progress
• Darmstadt
– Are developing a novel approach
• UMS
– Provide commercial diodes, but no influence over
design
• RAL
– Produced leading mixer results at 200 GHz
– Very much at the forefront of technology
• Two methods:
– Current Voltage (IV)
• Measures DC characteristics
• Useful for mixers
Characterisation
– Capacitance Voltage (CV)
• Measures AC characteristics
• Useful for multipliers
Probe station (Pegasus S200)
IV setup
IVplot
plotof
ofp8.1
p8.12um
2um single
single anode
anode row
row 44
IV
Basic Circuit
1.00E-03
1.00E-03
9.00E-04
8.00E-04
1.00E-04
7.00E-04
Current (A)
Current (A)
6.00E-04
1.00E-05
5.00E-04
4.00E-04
3.00E-04
1.00E-06
2.00E-04
1.00E-04
1.00E-07
0.00E+00
0.000
0.000
0.100
0.100
0.200
0.200
0.300
0.300
0.400
0.400
Voltage (V)
(V)
Voltage
0.500
0.500
0.600
0.600
0.700
0.700
0.800
0.800
Calculating Parameters
• Parameters Interested in;
– Spreading Resistance Rs,
– Ideality η and
– Reverse saturation current I0
• Two methods of calculations:
– Standard formulae on current point
measurements
– Curve fitting the IV characteristics
at arbitrary measurement points
Calculating Parameters
• Standard formula
• ΔV = V – V
•R
= 1000 ((V – V ) – ΔV
•η
= q ΔV log (e) / (k T)
•I
= i / (exp ((q V ) /(η k T)) – 1)
• Allows comparison between measurements
• Good heritage for comparisons with
previously used diodes but
• If two or more points are missed comparison
is no longer valid
3
4
5
s
4
10
0
1
B
1
B
Calculating Parameters
• Curve fitting
qVd
i  I 0 (exp(
)  1)
k B T
– Derived from IV equation and
– assumes there is a constant
k bT ln( I 0 )
k BT
c also

a
b  Rs
spreading
resistance
q
q
– Assuming that i >> I
– Substituting in V = V – i R
– V = a ln(i) + b i + c
– Least square fits is performed to
calculate the coefficients
0
d
s
Results
Results
Surface map
Plot of ideality,
spreading
P8.1
resistance
1um single anode
S10
S10
S9
S9
S8
S8
S7
S7
S6
S6
YYcoordinate
coordinate
S5
S5
1.40-1.50
16.00-20.00
1.30-1.40
S4
S4
12.00-16.00
1.20-1.30
1.10-1.20
8.00-12.00
S3
S3
1.00-1.10
0.90-1.00
4.00-8.00
S2
S2
Resistance (ohms)
Ideality
11
22
33
44
55
66
XXcoordinate
coordinate
77
88
99
S1
S1
10
10
IV setup
• Problem;
Scanning electron microscope (SEM)
• Defined as how resistant it is to failure
• Failure criteria;
– A 10% deviation from original
measurements.
• Simple tests
– Repeatability
– Soldering
– Thermal Cycling
• Accelerated Life tests
– Thermal
– Humidity
– Electrical Biasing
Reliability Tests
• Current Situation:
– Understood how the IV
characterisation calculations are
Summary
done and
– how the Probe Station works
Above: Diced diode
– I have separated
the diodes and
from a wafer
currently building
the basic
circuit
Left: dicing
saw
for the reliability tests and
– I am currently learning LabView
• Remove bugs from the probe
station and calibrate with new
heads
Future plans
• Develop the software necessary
• Build thermal experiment
• Perform repeatability test
• Perform soldering test
• Analyse data collected
Any Questions
???