Transcript ch10-1x
Specimen
Preparation
T R A NSMIS SION E LE CT RON MI CR OS COPY
Introduction
• Broad subject with several techniques
• Preparation technique mustn't affect measurement
• Preparation times range from 5 minutes to 2 days
• Specimen must be electron transparent
Safety
• Liquids used for polishing solutions can be poisonous,
corrosive, or explosive
• For example, extremely poisonous hydrofluoric acid (HF)
• Important to be up-to-date with laboratory safety before
preparing the specimen
Before preparing the specimen
• Different samples will require
different preparation paths
• Specimens either selfsupported or on a grid
• Mechanical stability is
crucial
• Different sample geometries
Williams, D.B. and Carter, C.B., 2009, Transmission
Electron Microscopy: A Textbook for Materials
Science (2nd Ed, Springer, NY)
Self-supporting disks and grids
• Grid may contribute to the X-ray spectrum
• The best result is achieved with thin specimens
• Nominal disk diameter is 3.05 mm
• Specimen should be located at the center of a disk
Pre-thinning
• Initial thinning involves a slice of 100 and 200 mm thick
• Cutting the 3-mm disk from the slice
• Pre-thinning the disk to a few micrometers
Williams, D.B. and Carter, C.B., 2009, Transmission Electron Microscopy: A Textbook
for Materials Science (2nd Ed, Springer, NY)
Final thinning
• Electropolishing of electrically
conducting samples
• Specimen is bombarded and
sputtered in Ion milling
• Ion beam will penetrate the specimen
• Ion implantion will occur
Williams, D.B. and Carter, C.B., 2009, Transmission
Electron Microscopy: A Textbook for Materials
Science (2nd Ed, Springer, NY)
Cross-section specimens (1/2)
• Preparation technique in order to study interfaces
• Special type of self-supporting disk
• Interface is parallel to the electron beam
• To study structural and chemical variations close to an
interface
Cross-section specimens (2/2)
• Sample can be cut and
glued together
• “Sandwich” is sectioned
to see the layers
• Low-temperature epoxies
to be used in gluing
• Glued sections can be cut
into 3 mm rods
Williams, D.B. and Carter, C.B., 2009, Transmission
Electron Microscopy: A Textbook for Materials
Science (2nd Ed, Springer, NY)
Electropolishing
• Used for a thin sheet of metal
• Sheet is cut into approx. 10 mm square and edges are
sealed
• Exposed ‘window’ is immersed in electrolyte
• Surrounded by a cathode and voltage is applied
• Viscous layer will build up on the surface
• The sheet will thin in the center
Ultramicrotomy
• Slices less than 100 nm thick
• Used for biological samples and
polymers
• Recently used also for
crystalline materials
• Leaves chemistry of the sample
unchanged
• Fractures and/or deforms the
sample
Williams, D.B. and Carter, C.B., 2009, Transmission
Electron Microscopy: A Textbook for Materials
Science (2nd Ed, Springer, NY)
Grinding and Crushing
• Brittle materials are easily prepared by crushing
• Crushing done in a clean pestle and mortar in an inter
liquid
• Liquid can be ultrasonically stirred
• Drop of the liquid placed on a holey carbon film on a grid
• Liquid will evaporate leaving particles on the support film
Replication and extraction
• Direct replication used to study fracture surfaces or surface
topography
• Carbon film is evaporated on the surface of interest
• Underlying film is etched away
• Alternatively, soft plastic can be pressed on the surface
• Plastic replicate is then pulled off and coated with carbon
• Plastic is dissolved and carbon replicate is picked on a
support grid
Cleaving
• Oldest technique
• Adhesive tape is attached on both sides of the sample
• Two pieces of tape is pulled apart
• Special variation: small-angle cleaving technique (SACT)
The 90 degree wedge
• Used for compound semiconductors such as GaAs
• Semiconductors that are grown with a (001) surface
• Cleaved on planes that are perpendicular to growth
surface
Williams, D.B. and Carter, C.B., 2009, Transmission
Electron Microscopy: A Textbook for Materials
Science (2nd Ed, Springer, NY)
Lithography and etching
• Technique used in
microelectronics
• Preferential area is
masked
• Other parts of the
substrate is
chemically etched
Focused-ion beam (FIB)
• Prices are going down, becoming more readily available
• FIB an SEM with a built-in ion mill
• Well-controlled beam of Ga ions
• Polish the specimen thin for TEM
Specimen storing
• Periods up to 1 month: dry, inert atmosphere, and inert
container
• For long-term storing: no gelatin capsules for delicate
materials, no slotted grid-holders for anything that might
deform
• Always use vacuum tweezers
• Old specimens can be cleaned by ion polishing
or chemical cleaning
Conclusions
• Most tedious aspect of TEM work
• Thinner is always better
• Quality of data directly proportional to quality of specimen
• Need to find method that works best for your material
• Safety is important
Reference
• Williams, D.B. and Carter, C.B., 2009, Transmission Electron
Microscopy: A Textbook for Materials Science (2nd Ed,
Springer, NY)