Transcript Title of Project - Tennessee Technological University

MEMS Summer 2007
FEM of MEMS on ANSYS
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Why FEM for MEMS?
Features in ANSYS
Basic Procedures
Examples
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MEMS Summer 2007
Purpose of FEA
• Make development cycle short and cost effective
• To understand behaviors, limits and interactions of
complex processes
• To optimize designs
• For failure analysis
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MEMS Summer 2007
ANSYS Environment
• Has GUI and Coded (for Batch Mode) command
interfaces
• Enable to both creation and importing of models
• Capable of Linear and Non-linear analysis on the
phenomena of Structural, Thermal, Electromagnetic,
Electrostatics, Fluid, etc.
• Ability to simulate Coupled-field behaviors.
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MEMS Summer 2007
Processors
• Start with Begin level – Job name, File name, etc
• Preprocessor – Model creation
• Solution Processor - Apply Loads and Solving
• Postprocessors - Analyzing Results
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MEMS Summer 2007
GUI vs Codes
• Advantage of Repetition and parametric
design with codes
• Easy to follow and to visualize with GUI
• Over 1200 commands with specific
syntaxes for codes
• Help file for each command on codes
• Batch mode execution by codes
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MEMS Summer 2007
Model Creation
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Import or Create
To create - Keypoints, lines, areas and volumes
Material properties and real constants
Element type and Meshing
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MEMS Summer 2007
Units
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MEMS Summer 2007
Applying Loads
• Boundary Conditions
• Various Types of Loads
– Structural displacements, forces, pressures, temperatures
(for thermal strain), gravity
– Thermal temperatures, heat flow rates, convections,
internal heat generation, infinite surface
– Electrical electric potentials (voltage), electric current,
electric charges, charge densities, infinite surface
– Fluids velocities, pressures
– Magnetic potentials, magnetic flux, magnetic current
segments, source current density, infinite surface
• Can apply loads in Steps
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MEMS Summer 2007
Solution and View Results
• Specify analysis type and solve
• Post1 is used to review results from static
or steady state problems
• Post26 is used to review results from
transient problems.
• Reading results by…
– By Sets
– Load Step (LS)
– Time/frequency
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MEMS Summer 2007
Example
• Let’s follow Multiphysics Analysis of a
Thermal Actuator in Ansys Tutorial
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