Transcript NA I&C report December 2011

North America Information & Control
Committee
Liaison Report
December 2011
NA I&C Report - December 2011
Outline
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Leadership
Organization Chart
Meeting Information
Ballot Results
Upcoming Ballots
Task Force Reports
Upcoming Meeting Schedule
NA I&C Report - December 2011
Task Force and Leadership Changes
• Energy Saving Equipment Communication TF
– New task force
– Thomas Huang and Gino Crispieri (ISMI) appointed as TF
leaders
• Data Quality TF
– Task force disbanded
• Diagnostic Data Acquisition (DDA) TF
– Harvey Wohlend stepped down as TF co-leader
– Gino Crispieri (ISMI) appointed as TF co-leader
– Brian Rubow (Cimetrix) remains as TF co-leader
NA I&C Report - December 2011
Leadership
• Committee Co-chairs
– David Bricker / Applied Materials
– Jack Ghiselli / Ghiselli Consulting
– Lance Rist / RistTex
• Technical Architect
– Gino Crispieri / ISMI
NA I&C Report - December 2011
Current Committee Structure
Information & Control
Committee
AMHS IBSEM TF
Sensor Bus TF
Diagnostic Data
Acquisition (DDA) TF
Process Control
Systems (PCS)
Architecture TF
Energy Saving
Equipment
Communication TF
GEM300 TF
NA I&C Report - December 2011
Sort Map TF
Meeting Information
• Last meeting
– October 26 for NA Fall 2011 Meetings
San Jose, California
• Next meeting
– April 4 for NA Spring 2012 Meetings
San Jose, California
NA I&C Report - December 2011
Document Review Summary [1/4]
Cycles 5 & 6
* Cycle 5 *
Doc #
Description
TC Action
5102A
Revision to Add a New Subordinate Standard Specification for
Sensor/Actuator Network Specific Device Model for Vacuum
Pressure Gauges to SEMI E54-0710, Sensor/Actuator
Network Standard
Note: Copyrighted material identified as technically justified.
Copyright release will be requested.
Superclean
5179A
(1 LI)
Revision to SEMI E90.1-0706, Provisional Specification for
SECS-II Protocol Substrate Tracking
1: Passed as balloted
NA I&C Report - December 2011
Document Review Summary [2/4]
Cycles 5 & 6
* Cycle 6 *
Doc #
Description
TC Action
4828
(1 LI)
Revision to SEMI E133-1110, Specification for Automated
Process Control Systems Interface. Line item changes to E133
to provide a virtual metrology capability
1: Passed as balloted
5002A
New Standard: Specification for EDA Common Metadata
Failed, reballot
5181
Revision to Add a New Subordinate Standard Specification for
Sensor/Actuator Network Communications for CC-Link IE
Field Network to SEMI E54-0710, Sensor/Actuator Network
Standard
Note: Use of CC-Link IE was assessed as potentially material
and technically justified. This is similar to other E54
subordinate standards. LOA will be requested from IP holder.
Superclean
NA I&C Report - December 2011
Document Review Summary [3/4]
Cycles 5 & 6
* Cycle 6 *
Doc #
Description
TC Action
5273
(8 LIs)
Revisions to:
• SEMI E40-0709, Standard for Processing Management
• SEMI E40.1-1106, SECS-II Support for Processing
Management Standard
• SEMI E87-0709, Specification for Carrier Management (CMS)
• SEMI E90-0707, Specification for Substrate Tracking
• SEMI E94-0309, Specification for Control Job Management,
• SEMI E94.1-1107, Specification for SECS-II Protocol for
Control Job Management (CJM)
To remove References to Inactive Standards and Defects in
the GEM 300 Standards
1: Superclean
2: Superclean
3: Superclean
4: Superclean
5: Superclean
6: Superclean
7: Superclean
8: Superclean
NA I&C Report - December 2011
Document Review Summary [4/4]
Cycles 5 & 6
* Cycle 6 *
Doc #
Description
TC Action
5316
Reapproval for SEMI E4-0699 (Reapproved 0307), SEMI
Equipment Communications Standard 1 Message Transfer
(SECS-I)
Passed as balloted
5317
Reapproval for SEMI E95-1101 (Reapproved 0307),
Specification for Human Interface for Semiconductor
Manufacturing Equipment
Note: E95 allowed by NA I&C to go into Inactive status
Failed, discontinued
5318
Reapprovals for SEMI E116-0707E, Specification for Equipment
Performance Tracking and SEMI E116.1-0707, Specification for
SECS-II Protocol for Equipment Performance Tracking (EPT)
Failed, discontinued
NA I&C Report - December 2011
Technical Ballots to be reviewed at
NA Standards Spring 2012 Meetings
* Voting Period – Cycle 1 or 2 *
Document #
Document Title
TF / SC
5002B
New Standard: Specification for EDA Common Metadata
DDA TF
5177A
Revision to SEMI E145, Classification for Measurement Unit Symbols in XML
DDA TF
New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator
Network Specific Device Model for Generic Equipment add-on Sensor
(ADDON)
Sensor Bus TF
5274
NA I&C Report - December 2011
Task Force Updates
• Energy Saving Equipment Communication TF
– New task force
– Charter
• Develop and propose standards that specify communications
between the factory system and production equipment to move
the equipment between power saving modes as defined in S23.
– Scope
• This TF will focus on communication protocol and message
content for the purpose of reducing energy consumption on
process equipment and supporting subsystems..
• The TF will collaborate with the EHS Committee to avoid conflict
with definitions in S23
NA I&C Report - December 2011
Task Force Updates [continued]
• Data Quality TF
– Task force disbanded
• Diagnostic Data Acquisition (DDA) TF
– TF leadership changes
• Harvey Wohlwend stepped down as co-leader
• Gino Crispieri appointed as new co-leader
– New Standard: Specification for EDA Common Metadata
(#5002B) submitted for C1 or C2-12
NA I&C Report - December 2011
Task Force Updates [continued]
• GEM300 TF
– No new ballots or SNARFs originating from NA
• Process Control Systems (PCS) TF
– E133.1 revision (#4507A Info) for fault detection
enhancements to be issued as an informational ballot in
conjunction with C2-12
NA I&C Report - December 2011
Task Force Updates [continued]
• Sort Map TF
– E142.x revisions (#5104) to be balloted for Cycle 4, 2012
• Sensor Bus TF
– New E54 subordinate standard for Generic Equipment
add-on Sensor (ADDON) [#5274] to be balloted for C1
or C2-12
NA I&C Report - December 2011
Other Discussions
• Withdrawal of SNARF # 5319 (E118 and E118.1 reapproval)
– NA I&C approved the withdrawal of SNARF # 5319 since E118 and
E118.1 are the responsibility of the Japan I&C committee. Japan I&C
agreed to perform the appropriate 5-Year maintenance on E118 and
E118.1
• Withdrawal of SNARF # 5318 (E116 and E116.1 reapproval)
– NA I&C approved the withdrawal of SNARF # 5318 since Korea I&C
plans to update E116
NA I&C Report - December 2011
NA I&CC Spring 2012 Meeting Schedule
[DRAFT]
• Monday, April 2
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–
I&C Leadership (11:30 AM to 1:00 PM)
PCS (1:00 PM to 3:00 PM)
GEM300 (1:00 PM to 5:00 PM)
I&C GCS (5:00 PM to 6:00 PM)
• Tuesday, April 3
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–
–
–
DDA (8:00 AM to 3:00 PM)
Sensor Bus (1:00 PM to 3:00 PM)
Sort Map (3:00 PM to 5:00 PM)
Energy Saving Equip Comm (3:00 PM to 6:00 PM)
• Wednesday, April 4
– I&C Committee (8:00 AM to 4:30 PM)
NA I&C Report - December 2011
SEMI Headquarters
San Jose, CA
NA Standards Spring 2012 Meetings
• April 2-5
• SEMI Headquarters in San Jose, California
• Inviting local companies willing and able to host
some of the meetings to maintain one-week format
• Final schedule to be announced soon
NA I&C Report - December 2011
NA Standards Spring 2012 Meetings
April 2-5
Sunday
1
Monday
2
Tuesday
3
Wednesday
4
Thursday
5
Friday
6
Saturday
7
EH&S
NARSC
Facilities & Gases
Liquid Chemicals
Information & Control
MEMS/NEMS
HB-LED
Schedule
-at-a-glance
Metrics
PV Materials
Physical Interfaces & Carriers
Silicon Wafer
Traceability
ATE
3DS-IC
NA I&C Report - December 2011
NA Standards Staff Changes
Paul Trio
Sr. Manager, NA Standards Operations
Kevin Nguyen
Manager, NA Standards Committees
Provisional: Contact
Paul Trio ([email protected]) or Kevin
Nguyen ([email protected])
Operations
Committees: NARSC / I&C / ATE / MEMS / Microlithography,
HB-LED / 3DS-IC
Meetings & Events Planning
General Information
STEPS/Workshops and Sponsorships
Committees: Facilities / Gases / PV / PV Automation /
PV Materials / Silicon Wafer / Traceability
Standards Website
Committees: Compounds Semiconductor Materials / EHS /
FPD / Liquid Chemicals / Metrics / PIC
Hiring of new NA Standards staff has been completed.
Official announcement by the end of the month.
NA I&C Report - December 2011
Thank You!
For more information or participate in
any NA I&C activities, please contact
Paul Trio at SEMI ([email protected])
NA I&C Report - December 2011