Transcript microBUILDER is

microBUILDER
An integrated modular service for microfluidics
and mixed technologies
www.microBUILDER.org
”Roadshow” presentation
Chapter 1 Introduction
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microBUILDER is ...
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www.microBUILDER.org
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A collaboration of 9 European companies, R&D
institutes and universities on microsystem foundry
services, focusing on microfluidic applications
Part of the EUROPRACTICE network
www.europractice.com
Supported by the European Union within the
Information Society Technology (IST) thematic priority
of the 6th Framework program
Providing a complete service package for the
development and production of new products
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based on mixed technologies
with a focus on microfluidics applications
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The Mission
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Increase the commercial success and competitiveness
of European industry
Simple and cost-efficient access to mixed technology
development and manufacturing through
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www.microBUILDER.org
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Design & engineering services
Prototyping and manufacturing services
Specific CoventorWare software modules
Training
Demonstration of technological capabilities by sample
devices
SME User club
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Advises the microBUILDER partners
First-hand access to information
Open for interested SMEs
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Mixed Technology
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Combination and interaction of
different technologies and
competences
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www.microBUILDER.org
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Moulding of plastics
Silicon and glass
micromachining
Packaging and
system integration
Actuators
Electronics
Surface functionalisation
and modification
All technologies and
competences are available within
the microBUILDER network
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Microfluidics
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Handling of small amounts of liquids
and gases
Key enabling technology for different
application areas:
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Diagnostics and analytics
Drug discovery
Drug delivery
Medical devices
Fuel cells
Process control
Machinery and automation
Microfluidic devices and systems:
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Lab-on-chip
Valves and pumps
Flow and gas sensors
Chemical micro-reactors
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The Offer
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Complete service package from
the first idea to a final product
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www.microBUILDER.org
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Design and engineering services
Silicon prototyping and series
production
Prototyping and series production
of polymer parts
CoventorWare software modules
Training and education
Technologies and processes are
documented in a design handbook
Easy access to services through
one single customer interface
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Design & Engineering Services
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Custom-tailored development services
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Feasibility and concept studies
Proof of principle investigations
Design, modelling and simulation
Prototyping
Test and characterisation
Based on a portfolio of validated
methods, processes and technologies
Design Handbook
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Specifications of the available
technologies and processes
Design rules
Examples of validated designs
Enables experienced users to design
their own device
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CoventorWare Process Access Kits
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Library of microBuilder specific process emulation files
Specific material property databases
Library of parametric elements for system-level and component
design
Layout template file incl. DRC
www.microBUILDER.org
Materials’
Properties
Process
Parameters
Target
Process
System and
MEMS Co-design
Layout
3D Model
FEM/BEM
Analysis
Fabrication
@ MicroBuilder
(SensoNor, Tronics etc.)
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MPW Services at
Infineon Technologies SensoNor
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www.microBUILDER.org
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Bulk micromachining of Si and glass
Minimum feature size: 2 µm
High-volume approach to production
High-precision membrane definition by
etch stop against pn-junctions
High aspect ratio RIE
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High stability piezoresistors for sensing elements
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Triple-stack Glass/Si/Glass anodically bonded
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Hermetically sealed cavities with electrical feedthroughs
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Thermal excitation / Piezoresistive detection
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MPW and manufacturing services at
TRONICS Microsystems
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Industrialization and manufacturing of Si/Glass products
» Advancing concepts into reliable products
» Building supply chains for custom products
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Prototyping on MPW and semi-custom runs:
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SOI-HARM (High Aspect Ratio Micromachining)
Si-DRIE/Glass under development
www.microBUILDER.org
Gold electrical contacts
Openings for light,
fluids, gas or vacuum
Si = 60µm
Hermetic Sealing
DRIE etching of pillars, channels…
Aspect ratio > 1:20
Min. gap: 3µm, Min. Feat.: 4µm
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Polymer technology
Full service: From design and construction to mass production
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Microfludic
design Service
Check for mass
production
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Ultra precision milling
Quick prototyping
www.microBUILDER.org
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Advanced quality
service
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Small volume
production
Mass production
by high precision
moulding
Add on processes,
e.g. hydrophilic coating
Micro assembly
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Microfluidic Construction Kit
The idea: modular concept as an intermediate step
on the way to integrated systems
Concept = Kit
Lab on a Chip
www.microBUILDER.org
Microfluidic
Functions
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Microfluidic Construction Kit
The product:
 Assembly platform and
microfluidic connectors
 Library of standard slides:
pumps, mixers, splitters
 Customer specific microfluidic
slides by high precision moulding
www.microBUILDER.org
Application field examples:
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Fuel cells
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Environmental monitoring
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Biological assay development
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Pharmaceutical formulation
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Drug synthesis on demand
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Add-on processes – bioactive layers
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Functional surfaces for attachment of:
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proteins (antibodies)
single stranded
oligo-nucleotides
glucose molecules
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Au or NiCr/Au films on silicon
Commercial or customers’ own biochemistry
To be combined with lab-on-chip systems
K.W. Wee et al. 2005
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Add-on processes –
hydrophobic surfaces
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Functional surfaces for
inhibiting fluids or for
driving fluids through
designated areas
Teflon (C4F8) or SiO2 on
silicon as hydrophobic
and hydrophilic surfaces
Attractive for making
valves and for metering
(hydrophobic) and for
pumps (hydrophilic)
To be combined with labon-chip systems
Photo: SINTEF
Hydrophobic surface
Photo:
SINTEF
Hydrophobic surface utilized to
inhibit fluid flow in a channel
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Add-on processes –
optimizing lab-on-chip systems
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Au films or piezoresistors
for local heating
On-chip temperature
measurements
Sample separation,
enrichment and cleaning by
electric fields (using e.g. Au
thin film electrodes)
Avoid inhibition of
biochemistry reactions by
means of surface coatings
Infineon SensoNor process
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Add-on processes –
piezoelectric thin films
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Functional surfaces for
resonating elements
(cantilevers or diaphragms)
or for pumps and actuators
Attractive for chemical and
biochemical sensors
Piezorelectric film (PZT) on
silicon
To be used as stand-alone
or to be combined with
lab-on-chip systems
Photo: MASCOT
Prototype acoustic gas
sensor in a ceramic package
LP-A; sn01; FG-inst: 8Vp-pAC sinus 0Voffset; 25-45kHz(12,5-22,5); 200Hz (100Hz) mellan sampel;
7,8VDC; 1s mellan sampel; flat ingångsfilter; 100ms slutfilter; vektorrepresentation; mätning 7;
rumstemperatur, 21,5°C; 31% RH; CO2; 2003-11-06
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Utsignal (10=50uV)
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Täta (°)
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Frekvens (Hz)
Frequency characteristics of the
prototype acoustic gas sensor in
CO2 at room temperature
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Training
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Short courses: 1 to 2 days introduction to the
microBUILDER foundry processes
2-4 days hands-on training courses: Design training for the
microBUILDER foundry processes using state-of-the-art
design tools like CoventorWare
Web-based distant learning with animation presentation
Master level university course with MEMS and microfluidics
basics, introduction to microBUILDER foundry processes
and hands-on design with design tools
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Application Areas
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Life sciences research
Medical diagnostics and
analysis
Drug discovery
Drug delivery
Environmental monitoring
Process control e.g. oil
industry and food industry
Food analysis
Security devices e.g.
detection of explosives
Energy technology
including fuel cells
Photo:
SINTEF/Stanford
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www.microBUILDER.org
microBUILDER partners
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